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1. Decal transfer microlithography: A new soft-lithographic patterning method

Author

Childs, William R. and Nuzzo, Ralph G.

Subjects
Decals -- Analysis, Chemistry
Abstract

A new soft-lithographic method for micropatterning polymeric resists, decal transfer microlithography (DTM), is described. The method is found to be capable of transferring micron to submicron-sized features with high fidelity over large substrate areas and potentially simplifies to a significant degree the requirements for affecting multiple levels of registration.

Published
2002

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