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Decal transfer microlithography: A new soft-lithographic patterning method
- Source :
- Journal of the American Chemical Society. Nov 13, 2002, Vol. 124 Issue 45, p13583, 14 p.
- Publication Year :
- 2002
-
Abstract
- A new soft-lithographic method for micropatterning polymeric resists, decal transfer microlithography (DTM), is described. The method is found to be capable of transferring micron to submicron-sized features with high fidelity over large substrate areas and potentially simplifies to a significant degree the requirements for affecting multiple levels of registration.
- Subjects :
- Decals -- Analysis
Chemistry
Subjects
Details
- Language :
- English
- ISSN :
- 00027863
- Volume :
- 124
- Issue :
- 45
- Database :
- Gale General OneFile
- Journal :
- Journal of the American Chemical Society
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.123891199