1. Analyses of laser and furnace treated sol-gel coatings
- Author
-
De Hosson, JT, De Haas, M, Sudarshan, TS, Jeandin, M, Khor, KA, and Applied Physics
- Abstract
Here we explore a new method that allows thin films to be made with almost any composition and degree of porosity by means of a combination of sol-gel and laser technology. Results are presented for furnace and laser treated TEOTI-(tetraethylorthotitanate as sol precursor) coated silicon samples. From detailed X-ray analyses it appeared that the TEOTi-derived sol-gel coatings experience crystallisation during furnace as well as laser treatment. The resulting TiO2 is present in two different tetragonal phases. As far as the residual stress measurements on the TEOTi derived sol-gel coatings are concerned it can be concluded that there is no significant tri-axial stress state present in the coating, which justifies the biaxial stress analysis.
- Published
- 1998