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A positive-tone and aqueous-base-developable benzo- cyclobutene (BCB)-based dielectric material curable in air (CYCLOTENE * AD6000 series Advanced Electronics Res- ins) is described in this paper. The prepolymer is made from divinylsiloxane bisbenzocyclobutene (DVS-bisBCB) and BCB-acrylic acid. The formulation contains antioxidants that allow the prepolymer to cure in air and a diazonaph- thaquinone to make it photosensitive. Patterned films have high resolution, and via openings are scum-free without a descum operation. Whether cured in nitrogen or in air, the prepolymer produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as packaging applications and as a planari- zation or insulation layer in display applications.

A self-priming and photosensitive aqueous-base-developable benzocyclobutene (BCB)-based dielectric material curable in air is described. The polymer is made from divinylsiloxane benzocyclobutene and BCB-acrylic acid. Patterned films have high resolution, and via openings are scum-free without a descum operation. Whether cured in nitrogen or in air, the formulation produces a film with optical, electrical, thermal, and mechanical properties desired for many microelectronic applications, such as packaging applications and a planarization layer or insulation layer in display applications.

A self-priming and photosensitive aqueous-base-developable benzocyclobutene (BCB)-based dielectric material curable in air is described. Patterned films have high resolution. Whether cured in nitrogen or in air, the formulation produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as a planarization layer or insulation layer in display applications.