Aqueous-Base-Developable Benzocyclobutene (BCB)-Based Material Curable in Air

A positive-tone and aqueous-base-developable benzo- cyclobutene (BCB)-based dielectric material curable in air (CYCLOTENE * AD6000 series Advanced Electronics Res- ins) is described in this paper. The prepolymer is made from divinylsiloxane bisbenzocyclobutene (DVS-bisBCB) and BCB-acrylic acid. The formulation contains antioxidants that allow the prepolymer to cure in air and a diazonaph- thaquinone to make it photosensitive. Patterned films have high resolution, and via openings are scum-free without a descum operation. Whether cured in nitrogen or in air, the prepolymer produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as packaging applications and as a planari- zation or insulation layer in display applications.