1. Stiction-free cantilevers with rounded cross-section
- Author
-
Jun-Bo Yoon, Jin-Wan Jeon, Dae-Hvun Kim, Koeng Su Lim, and Sung-Il Chang
- Subjects
Surface tension ,Surface micromachining ,Materials science ,Cantilever ,Stiction ,Nanotechnology ,Laplace pressure ,Composite material - Abstract
In this work, we developed a novel anti-stiction structure with rounded cross section which dramatically prevented stiction by reducing the Laplace pressure force and contact areas effectively. Also structure with rounded cross-section was more effective in reducing stiction because of the increased rigidity. We demonstrated a 6/spl mu/m-suspended 1/spl mu/m-thick metal cantilever with 60/spl mu/m in width and 1,000/spl mu/m in length successfully released in the conventional wet releasing process for the beam with rounded cross-section, while the length was limited to 125/spl mu/m for the beam with rectangular cross-section.
- Published
- 2005
- Full Text
- View/download PDF