Stiction-free cantilevers with rounded cross-section.

Authors :: Dae-Hvun Kim
Jin-Wan Jeon
Sung-Il Chang
Koeng Su Lim
Jun-Bo Yoon
Source :: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005; 2005, p455-458, 4p
Publication Year :: 2005

Language :: English
ISBNs :: 9780780387324
Database :: Complementary Index
Journal :: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005
Publication Type :: Conference
Accession number :: 80761514
Full Text :: https://doi.org/10.1109/MEMSYS.2005.1453965