1. The Effects of Nitrogen Content on the Mechanical and Tribological Properties of CrTaWN x Thin Films.
- Author
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Chang, Li-Chun, Wang, Li-Zhu, and Chen, Yung-I
- Subjects
FACE centered cubic structure ,THIN films ,WEAR resistance ,MECHANICAL wear ,SUBSTRATES (Materials science) - Abstract
In the study described herein, CrTaWN
x thin films were deposited on Si and 304 stainless-steel (SUS304) substrates through magnetron co-sputtering using CrW and Ta targets. The nitrogen flow ratio (fN2 = [N2 /(N2 + Ar)]) was adjusted to 0.05, 0.2, 0.4, and 0.5 to fabricate CrTaWNx films with various N contents. The CrTaWNx films prepared at a low fN2 of 0.05 exhibited a low stoichiometric ratio x of 0.16 and a nanocrystalline structure. In contrast, the CrTaWNx films fabricated at an fN2 of 0.2–0.5 exhibited x values of 0.42–0.62 and formed a face-centered cubic phase. The nanocrystalline (Cr0.34 Ta0.20 W0.46 )N0.16 film exhibited mechanical properties and wear resistances that were inferior to those of the crystalline CrTaWNx thin films. A (Cr0.38 Ta0.15 W0.47 )N0.55 film exhibited a hardness of 25.2 GPa, an elastic modulus of 289 GPa, and a low wear rate of 0.51 × 10−5 mm3 /Nm. [ABSTRACT FROM AUTHOR]- Published
- 2024
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