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5. CF4 plasma-based atomic layer etching of Al2O3 and surface smoothing effect.

7. Residual stress in obliquely deposited Mg[F.sub.2] thin films

40. Head-up display using an inclined Al_2O_3 column array

41. Low-refractive-index oxide thin films originated from the Kirkendall effect

42. The research of relationships between residual stress and columnar angles in oblique deposition of magnesium fluoride thin films

43. Photocatalysis of Ag-Loaded TiO2Nanotube Arrays Formed by Atomic Layer Deposition

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