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3. The Fabrication of an Applicative Device for Trench Width and Depth Using Inductively Coupled Plasma and the Bulk Silicon Etching Process

4. Low power consumption micro C2H5OH gas sensor based on micro-heater and screen printing technique

5. Use of Gas-Sensor Array Technology in Lung Cancer Diagnosis

6. A Study on the Surface of the Dry Etched TaN Thin Film by Adding The CH4Gas in BCl3/Ar Inductively Coupled Plasma

7. The Dry Etching of TiN Thin Films Using Inductively Coupled CF4/Ar Plasma

8. Surface Micromachined Pressure Sensor with Substrate Internal Vacuum Cavity

9. Analytical Pinning-Voltage Model of a Pinned Photodiode in a CMOS Active Pixel Sensor

10. Evaluation of 1/f Noise Characteristics for Si-Based Infrared Detection Materials

11. Uncooled amorphous silicon 16x16 infrared focal plane arrays development

12. 1.5 V Sub-mW CMOS Interface Circuit for Capacitive Sensor Applications in Ubiquitous Sensor Networks

13. Fabrication and Properties of Vanadium Oxide Thin Films for Microbolometer by using Plasma Atomic Layer Deposition Method

14. Micromachined air-gap structure MEMS acoustic sensor using reproducible high-speed lateral etching and CMP process

15. A low-loss single-pole six-throw switch based on compact RF MEMS switches

16. A Low Power Analog CMOS Vision Chip for Edge Detection Using Electronic Switches

17. Miniaturized Electronic Nose System Based on Personal Digital Assistant

18. A portable electronic nose (E-Nose) system using PDA device

19. Surface micromachined thermally driven micropump

20. A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror

21. Fabrication of MEMS devices by using anhydrous HF gas-phase etching with alcoholic vapor

22. Effects of phosphorus on stress of multi-stacked polysilicon film and single crystalline silicon

23. Development and application of a laterally driven electromagnetic microactuator

24. Z-axis capacitive MEMS accelerometer with moving ground masses

25. Chip scale packaging with surface mountable solder ball terminals for microsensors

26. Sensitivity tunable capacitive type micro accelerometer

27. Sputtered silicon antimony thin film for the infrared detection layer of microbolometer

28. Deformation Reduction of a MEMS Sensor by Stress Balancing of Multilayer

29. Sensing gap reconfigurable capacitive type MEMS accelerometer

30. Design, Fabrication, and Characterization of a Readout Integrated Circuit (ROIC) for Capacitive MEMS Sensors

31. A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method

32. Monolithic Electronic Nose System Fabricated by Post CMOS Micromachining

33. Sub-ppm Detection of Gold Nanoparticle Transducer Toward Carboxyl Functionality

34. Multiplexed polymer surface plasmon sensor with integrated optical coupler

35. Diversifying chemical selectivity using mixed-ligand gold nanoparticles

36. Wafer-level fabrication of polymer microsensors with integrated heat control

37. A single-pole 6-throw (SP6T) antenna switch using metal-contact RF MEMS switches for multi-band applications

39. Novel lithography process for extreme deep trench by using laminated negative dry film resist

40. Packaging technology for wavelength tunable filter based on optical MEMS

41. A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

42. An iridium oxide reference electrode for use in microfabricated biosensors and biochips

43. An independent, temperature-controllable microelectrode array

44. Glucose sensor using a microfabricated electrode and electropolymerized bilayer films

45. Surface properties of ZrO2thin film under Cl2/Ar plasma using angle-resolved X-ray photoelectron spectroscopy

46. Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum platform for gas and liquid applications

47. Temperature-Addressable Microelectrode Array

48. Formation of low-stress multilayered thick polysilicon films for fabrication of microsystems

49. Silicon surface micromachining of a deep vacuum cavity structure and its application to a microflow sensor

50. Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

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