A single-pole 6-throw (SP6T) antenna switch using metal-contact RF MEMS switches for multi-band applications

A single-pole 6-throw (SP6T) antenna switch using metal-contact RF micro-electro-mechanical system (MEMS) series switches has been developed for multi-band applications. The fabricated metal-contact MEMS switch with a broad signal line gap of 140 /spl mu/m shows a very high isolation loss of -51 dB at 2 GHz because its center-wedge (CW) can control a membrane stiction problem due to the anchor role. The pull-down voltage (V/sub P/) of the MEMS switch is 27.5 V and its leakage current is 26.1 /spl mu/A at V/sub P/. The SP6T antenna switch, which has six SPST MEMS switches, is comprised of two transmitter (Tx) ports and four receiver (Rx) ports for quad-band application. The chip area is very compact to 1 mm/sup 2/ (1.3 mm /spl times/ 0.8 mm). This antenna switch has an isolation loss of -48 dB and an insertion loss of -0.27 dB at 2 GHz between the antenna (ANT) port and transmitter portl (T/spl times/1) at V/sub A/ = 36V.