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3. Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET

4. Insights into Scaled Logic Devices Connected from Both Wafer Sides

6. Low temperature source/drain epitaxy and functional silicides: essentials for ultimate contact scaling

7. FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits

9. FinFETs and Their Futures

11. Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices

16. FinFETs and Their Futures

18. Addressing Key Challenges for SiGe-pFin Technologies: Fin Integrity, Low-DIT Si-Cap-Free Gate Stack and Optimizing the Channel Strain

20. Vertical Nanowire and Nanosheet FETs: Device Features, Novel Schemes for Improved Process Control and Enhanced Mobility, Potential for Faster & More Energy Efficient Circuits

21. A record GmSAT/SSSAT and PBTI reliability in Si-passivated Ge nFinFETs by improved gate stack surface preparation

22. Scaled spintronic logic device based on domain wall motion in magnetically interconnected tunnel junctions

23. BTI Reliability Improvement Strategies in Low Thermal Budget Gate Stacks for 3D Sequential Integration

25. WS2 transistors on 300 mm wafers with BEOL compatibility

26. BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

27. Challenges and opportunities of vertical FET devices using 3D circuit design layouts

29. Junctionless gate-all-around lateral and vertical nanowire FETs with simplified processing for advanced logic and analog/RF applications and scaled SRAM cells

30. Gate-all-around NWFETs vs. triple-gate FinFETs: Junctionless vs. extensionless and conventional junction devices with controlled EWF modulation for multi-VT CMOS

32. Strain enhanced low-VT CMOS featuring La/Al-doped HfSiO/TaC and 10ps invertor delay

33. Thermal and Plasma Treatments for Improved (Sub-)1nm EOT Planar and FinFET-based RMG High-k Last Devices and Enabling a Simplified Scalable CMOS Integration Scheme

35. Phosphorus doped SiC Source Drain and SiGe channel for scaled bulk FinFETs

36. W vs. Co-Al as Gate Fill-Metal for Aggressively Scaled Replacement High-k/Metal Gate Devices for (Sub-)22nm Tech. Nodes

37. RMG Tech. Integration in FinFET Devices

38. Effective Work Function Engineering for Aggressively Scaled Planar and FinFET-based Devices with High-k Last Replacement Metal Gate Tech.

39. Process-improved RRAM cell performance and reliability and paving the way for manufacturability and scalability for high density memory application

40. Process control & integration options of RMG technology for aggressively scaled devices

41. Dual-channel technology with cap-free single metal gate for high performance CMOS in gate-first and gate-last integration

42. Investigation of Forming and Its Controllability in Novel HfO2-Based 1T1R 40nm-Crossbar RRAM Cells

44. High yield sub-0.1µm2 6T-SRAM cells, featuring high-k/metal-gate finfet devices, double gate patterning, a novel fin etch strategy, full-field EUV lithography and optimized junction design & layout

47. Characteristics and Integration Challenges of FinFET-based Devices for (Sub-)22nm Technology Nodes Circuit Applications

48. Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

49. Full-field EUV and immersion lithography integration in 0.186μm2 FinFET 6T-SRAM cell

50. Capping-metal gate integration technology for multiple-VT CMOS in MuGFETs

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