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1. Nanocrystal memory cell integration in a stand-alone 16-Mb NOR flash device

Author

Gerardi, Cosimo, Ancarani, Valentina, Portoghese, Rosario, Giuffrida, Stella, Bileci, Marco, Bimbo, Gabriella, Brafa, Orazio, Mello, Domenico, Ammendola, Giuseppe, Tripiciano, Elena, Puglisi, Rosaria, and Lombardo, Salvatore A.

Subjects
Nanotechnology -- Research, Flash memory -- Design and construction, Dielectrics -- Electric properties, Flash memory, Business, Electronics, Electronics and electrical industries
Abstract

The full process integration of nano-crystal (NC) memory cells in a stand-alone 16-Mb NOR Flash device is examined. The findings suggest that NC sizes, dispersion and the interpoly dielectric structure are responsible for affecting the electrical performances related to reliability issues.

Published
2007

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