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3. Tungsten Interconnect Resistance Reduction Enabling Energy Efficient and High Performance Applications for 2nm Node and Beyond

4. BEOL Interconnect Innovation: Materials, Process and Systems Co-optimization for 3nm Node and Beyond

7. MOL Local Interconnect Innovation: Materials, Process & Systems Co-optimization for 3nm Node and Beyond

9. A Holistic Development Framework for Hybrid Bonding

15. Integration scheme for 3D NAND with nonreplacement word line and its cell characteristics investigation

23. Performance boost using spacer-confined cavity for advanced FinFET technology

24. Transistor Optimization with Novel Cavity for Advanced FinFET Technology

26. A Novel Approach to Control Source/Drain Cavity Profile for Device Performance Improvement

28. Detailed investigation of Ge–Si interdiffusion in the full range of Si1-xGex(0≤x≤1) composition.

30. Detailed investigation of Ge-Si interdiffusion in the full range of [Si.sub.1-x][Ge.sub.x] (0<=x<=1) composition

31. RF-pFET in fully depleted SOI demonstrates 420 GHz FT

32. Modélisation physique et simulation de défauts étendus et diffusion des dopants dans le Si, Soi et SiGe pour les MOS avancés

33. Modélisation physique et simulation de défauts étendus et diffusion des dopants dans le Si, SOI, SiGe pour les MOS avancés

37. Investigation of Embedded SiGe Source/Drain for 28nm HKMG PFET Performance Enhancement

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