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3. Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

4. Single nano-digit and closed-loop scanning probe lithography for manufacturing of electronic and optical nanodevices

5. Scanning probe-based high-accuracy overlay alignment concept for lithography applications

6. Field-Emission Scanning Probe Lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions.

8. Advanced electric-field scanning probe lithography on molecular resist using active cantilever

9. Advanced electric-field scanning probe lithography on molecular resist using active cantilever

12. Multiscale Fabrication and Characterization of a NEMS Force Sensor.

13. Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

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