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Advanced electric-field scanning probe lithography on molecular resist using active cantilever
- Source :
- Proceedings of SPIE; March 2015, Vol. 9423 Issue: 1 p94230E-94230E-16, 9328787p
- Publication Year :
- 2015
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9423
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs35679278
- Full Text :
- https://doi.org/10.1117/12.2085846