251. (Invited) Amorphous Silicon Transistors and Integrated Circuits
- Author
-
Masakiyo Matsumura
- Subjects
Amorphous silicon ,Materials science ,business.industry ,Transistor ,General Engineering ,General Physics and Astronomy ,Nanotechnology ,Charge (physics) ,Integrated circuit ,law.invention ,chemistry.chemical_compound ,chemistry ,law ,Logic gate ,Optoelectronics ,Image sensor ,business ,Order of magnitude - Abstract
Theoretical and experimental studies of amorphous-silicon field-effect-devices developed in Tokyo Institute of Technology are reviewed in this paper. Mobility as high as 1.9 cm2/Vsec, which is about an order of magnitude higher than the one reported to data, was observed. The first amorphous-silicon logic circuits, image sensors and charge coupled devices are presented. Problems which must be overcome, are described.
- Published
- 1983