623 results on '"Film growth"'
Search Results
252. Electron induced epitaxy of cubic ZnS on GaAs(1 0 0) surfaces
- Author
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Shimaoka, G., Arakawa, T., and Suzuki, Y.
- Subjects
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ZINC sulfide , *REFLECTION high energy electron diffraction - Abstract
Growth processes of vacuum-evaporated ZnS thin films on GaAs(1 0 0) surfaces with or without electron irradiation were investigated by reflection high-energy electron diffraction (RHEED), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The electron irradiation was made with medium-energy electrons lower than 500 eV, for very short time from the slanting direction to the substrate surface.Results showed that without electron irradiation two types of orientation of the ZnS films were observed at the substrate temperature of 200–300 °C, depending on the chemical binding at the interface between the film and the substrate. Perfect epitaxial cubic-ZnS films were successfully obtained by using a technique of irradiation with a medium-energy electron beam (∼1013 electrons/(cm2 s) at 400 eV) on the substrate at 275 °C. The film was flattened in a submicroscopic scale by the electron irradiation. These results are discussed in terms of the surface modifications by the interaction of electrons with the substrate surfaces. [Copyright &y& Elsevier]
- Published
- 2003
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253. Stress development during thin film growth and its modification under ion irradiation
- Author
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Pieńkos, T., Gladyszewski, L., Prószyński, A., Chocyk, D., Gladyszewski, G., Martin, F., Jaouen, C., Drouet, M., and Lamongie, B.
- Subjects
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THIN films , *ION implantation , *STRAINS & stresses (Mechanics) - Abstract
The paper presents the results of average stress measurements during deposition of thin copper and silver films and during ion irradiation of molybdenum thin films. Deposition chamber and ion implanter were equipped with the same optical systems for radius of curvature measurement (scanning technique). The average stress in the 92 nm total thick Cu/Ag/Cu/Ag system on 100 μm Si substrate during deposition at room temperature is reported. Deposition process was intermitted after each material. The non-continuous changes of the stress are interpreted as differences in temperature of the sample in different deposition stages. High residual stresses up to 3 GPa were evidenced in the Mo thin films deposited on Si substrate with RF sputtering. During ion implantation with Kr and Ar ions stress relaxation effect of Mo thin films was observed. Kr ion irradiation of the silicon substrate without a film was additionally performed. After the irradiation (total dose 1.4×1015 ions/cm2), the implanted region of the silicon wafer was under compressive stress. A stress maximum was evidenced for a dose of 1×1014 ions/cm2. [Copyright &y& Elsevier]
- Published
- 2003
- Full Text
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254. Analytical solution to a growth problem with two moving boundaries
- Author
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Braun, A., Wokaun, A., and Hermanns, H.-G.
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THICK films , *SURFACES of solids - Abstract
The equation of motion for two moving reaction boundaries in a solid is analysed. The distance between the two boundaries corresponds to a film, and its thickness is given by an analytical expression in terms of the Lambert W function. The time dependent growth of the film thickness is discussed, including its limits. [Copyright &y& Elsevier]
- Published
- 2003
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255. Growth of Ag films on PET deposited by magnetron sputtering
- Author
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Charton, C. and Fahland, M.
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THIN films , *ARGON , *SPUTTERING (Physics) , *DIFFUSION - Abstract
Thin Ag films grown under varying deposition conditions are analysed by means of SEM, AFM and XRD measurements. The films are deposited onto a Polyethylene terephthalate web by DC magnetron sputtering. The extent to which the deposition conditions influence the growth mode of the Ag films is examined. The electron micrographs clearly show that the percolation threshold as well as the film thickness at which a closed film is formed, are dependent on the Ar pressure during deposition. The influence of the Ar pressure during deposition on the film growth is discussed in terms of the amount of energy deposited into the film during the growth process and the resulting influence on surface diffusion processes. [Copyright &y& Elsevier]
- Published
- 2002
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256. Processes in silicon deposition by hot-wire chemical vapor deposition
- Author
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van Veenendaal, P.A.T.T. and Schropp, R.E.I.
- Subjects
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CHEMICAL vapor deposition , *THIN films , *SILICON - Abstract
Hot-wire chemical vapor deposition is a rapidly developing CVD technique for the deposition of silicon thin films and silicon alloys and may become a competitor of the plasma-enhanced (PE) CVD method due to significant advantages such as high deposition rate, efficient source gas utilization, lack of ion bombardment, and low equipment cost. Little is known, however, about the mechanisms for catalytic decomposition of the source gases, gas phase reactions at commonly used pressures, and the growth reactions. In this article, the differences in the reactions at various filament materials are discussed and it is shown that the subsequent reactions in the gas phase and reactions contributing to film growth can be substantially different from those in PE-CVD, due to the lack of energetic electrons and ions. Further work is necessary to identify the role of each precursor for the deposition of amorphous and microcrystalline films. [Copyright &y& Elsevier]
- Published
- 2002
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- View/download PDF
257. Growth of silver films on Cu(1 1 1) at low temperatures
- Author
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Otop, Henryk
- Subjects
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LOW energy electron diffraction , *ELECTRON microscopy - Abstract
The growth behavior of silver films on the Cu(1 1 1) face during the initial stage of silver deposition (i.e. for
θ<3 ML) and thermal stability of the films were studied by means of AES and LEED. Silver layers were deposited at substrate temperature ranging from 85 to 200 K in UHV. It was found that only during the early stage of silver deposition at 200 K the 2D growth takes place. With increasing surface coverage, a gradual transition from 2D to 3D growth was observed. A reduction of the deposition temperature from 200 to 100 K yields a transition to a smoother (flatter) growth of Ag on Cu(1 1 1). The LEED observations suggest a disordered growth of Ag on Cu(1 1 1) at 100 K. The thermal stability of silver films during annealing up to about 850 K was studied. The surface morphology of about 2.5 ML Ag film grown at 100 K is not stable during annealing. On heating (above 700 K), a rearrangement to an ordered Ag(1 1 1) structure takes place within the silver layer. [Copyright &y& Elsevier]- Published
- 2002
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258. An integrated kinetic Monte Carlo molecular dynamics approach for film growth modeling and simulation: ZrO<f>2</f> deposition on Si<f>(1 0 0)</f> surface
- Author
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Knizhnik, A.A., Bagaturyants, A.A., Belov, I.V., Potapkin, B.V., and Korkin, A.A.
- Subjects
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MONTE Carlo method , *MOLECULAR dynamics - Abstract
In this paper we present a novel integrated approach, which combines kinetic Monte Carlo and molecular dynamics (kMC-MD) methods, and its application in modeling initial steps of ZrO
2 film growth on Si(1 0 0) surface. The modification of kMC for non-regular structures consists in dynamical determination of chemical structure at the energy minimization (surface relaxation) step using known and newly developed force field potential. The chemical adsorption and surface reaction probabilities incorporated in the kMC module have been determined from molecular cluster DFT calculations using kinetic transition state theory and Rice–Ramsperger–Kassel–Marcus methods. The force field potential has been developed forZrO2/SiO2/Si film and interface using electro-negativity equalization method, limited set of available force field parameters and fitting procedure based on DFT calculations of a small molecules with appropriate bonding peculiarities. [Copyright &y& Elsevier]- Published
- 2002
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259. Modelling of ZrO<f>2</f> deposition from ZrCl<f>4</f> and H<f>2</f>O on the Si(1 0 0) surface: initial reactions and surface structures
- Author
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Brodskii, V.V., Rykova, E.A., Bagatur'yants, A.A., and Korkin, A.A.
- Subjects
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ZIRCONIUM oxide , *ATOMIC structure - Abstract
The mechanism of initial reactions and atomic structures arising in ZrO
2 atomic layer deposition (ALD) on a Si(1 0 0) substrate using ZrCl4 and H2 O as precursors have been studied using first-principle DFT plane-wave and quantum-chemical cluster calculations. The wet oxidation of silicon and reactions corresponding to the first two ZrO2 ALD steps have been examined, and energy characteristics of these reactions have been calculated in the cluster approximation. The results of cluster and periodic calculations have been compared. The growth of amorphous ZrO2 films has been explained based on a simple chemical mechanism. [Copyright &y& Elsevier]- Published
- 2002
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260. Multiscale approaches for metal thin film growth
- Author
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Vogl, P., Hansen, U., and Fiorentini, V.
- Subjects
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METALLIZING , *VAPOR-plating , *THIN films - Abstract
Two recently developed multiscale approaches for simulations of metalization morphologies under ionized sputter deposition conditions are reviewed. These methods are capable of predicting the growth of thin films on the feature scale, based on calculations that are simultaneously carried out on all relevant scales and consistently employ data from atomistic simulations. In both techniques, the first step consists in molecular dynamics simulations that compute the relative probabilities of all relevant reactions taking place during physical vapor deposition. These probabilities are consequently employed in feature-scale simulators. One of the methods employs a two-dimensional cellular automaton technique to calculate the film topographies. The second approach employs a Green function method to combine the molecular dynamics results with a line of sight transport model in a two-dimensional feature, and incorporates all effects of re-emission and re-sputtering in a self-consistent manner. In the final step, a level-set method is used to describe the morphology of the growing film. Both methods provide complete growth rate models that allow the inclusion of energy and angular dependent reaction rates. Several applications of both techniques are discussed. [Copyright &y& Elsevier]
- Published
- 2002
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261. Resonance Raman scattering and scanning tunneling spectroscopy of CdS thin films grown by electrochemical atomic layer epitaxy—thickness dependent phonon and electronic properties
- Author
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Gichuhi, Anthony, Boone, B. Edward, and Shannon, Curtis
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THIN films , *RESONANCE Raman effect , *EPITAXY - Abstract
The thickness dependence of electron–phonon coupling and the band gap of ultrathin CdS films deposited on Au substrates using electrochemical atomic layer epitaxy (EC-ALE) have been measured by resonance Raman scattering and scanning tunneling spectroscopy (STS). Polarization dependent resonance Raman experiments indicate that electron–phonon coupling is strongly dependent on film thickness when measured using p-polarized radiation, but is essentially thickness independent when measured using s-polarized light. We find that the electron–phonon coupling reaches its limiting value at a film thickness of seven monolayers, yielding an estimated apparent exciton diameter of 2.3 nm. STS measurements of the electronic band gap of the same samples confirm this behavior. The band gap is observed to shift from its bulk value of 2.4 to >2.7 eV for a three monolayer film. The size dependence of the band gap can be described qualitatively using the strong confinement model. [Copyright &y& Elsevier]
- Published
- 2002
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262. Electrochemical and optical study of rhenium layers formed on gold electrodes
- Author
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Zerbino, J.O., Castro Luna, A.M., Zinola, C.F., Méndez, E., and Martins, M.E.
- Subjects
- *
RHENIUM , *VOLTAMMETRY , *ELLIPSOMETRY - Abstract
Films obtained after cathodic polarization at Ec, −0.2 V≤Ec≤0.1 V (vs. RHE), in aqueous acid perrhenate have been investigated using cyclic voltammetry and ellipsometry. The thickness and optical indices corresponding to the electrodeposited rhenium layer were calculated. The results indicate the formation of a composite layer, with a volumetric fraction of about 30% of metallic rhenium and hydrogen occlusion. [Copyright &y& Elsevier]
- Published
- 2002
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263. Electrochemical synthesis of ba- and Sr-based titanate thin films using Ti electrode prepared by RF sputtering.
- Author
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Kim, Jae, Kang, Jinwook, Kim, Geon-Joong, and Tak, Yongsug
- Abstract
Barium and strontium titanate films were electrochemically synthesized onto Ti thin film prepared by RF sputtering. Applied current waveform was modulated to investigate the film growth mechanism. Superimposed cathodic pulses accelerated the formation of titanate thin films, and both the electrode surface pH and (Ba
2+ , Sr2+ ) ion size had a strong influence on film formation. Titanate film formation mechanism was investigated with a scanning electron microscope, an X-ray diffractometer and an electrochemical quartz crystal microbalance (EQCM). Insitu mass change of Ti electrode during electrolysis indicated that electrochemical method sets a limit to film growth. [ABSTRACT FROM AUTHOR]- Published
- 2001
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264. Effect of Oxygen Plasma on Growth, Structure and Ferroelectric Properties of SrBi2Ta2O9 Thin Films Formed by Pulsed Laser Ablation Technique.
- Author
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Tirumala, S., Rastogi, A.C., and Desu, S.B.
- Abstract
Growth of SrBi
2 Ta2 O9 (SBT) thin films has been carried out in the presence of O2 -plasma created by applying a potential at an auxiliary ring electrode placed near the substrate. Effect of plasma excitation potential and polarity, especially negative polarity, on the formation of a proper SBT phase at 700°C and in modifying crystallite orientation and microstructure of SBT films over (1 1 1) oriented Pt film coated over TiO2 /SiO2 /Si(1 0 0) substrates has been demonstrated. Preferred c-axis orientation of SBT films changes to (a–b) orientation with decrease in plasma excitation potential from −700 to −350 V and eliminates secondary Bi2 Pt phase formation even at 600°C Microstructural study show a 2-dimensional large flat c-oriented crystallites formed at −700 V change to small crystallites in conformity with the changed aspect ratio for crystallites in (a–b) plane parallel to film plane. Spectroscopic ellipsometric results are in agreement with the microstructural data. These affects are attributed to O2 -ion bombardment during film growth which reduces nucleation barrier for growth of crystallites in (a–b) plane. O2 -plasma sustains the cationic species formed by laser ablation, which along with O ions, provide necessary activation energy and enhance the oxidation rates required for SBT phase formation even at 700°C. SBT films grown in O2 -plasma show enhancement in remnant polarization value from 1.2 to 6.6 μC/cm2 and display ferroelectric properties superior to those formed without plasma. Further O2 -plasma eliminates post deposition annealing step for observance of enhanced polarization values. This study shows O2 -plasma excitation potential could be exploited as a new process parameter in laser ablation growth of ferroelectric oxide thin films. [ABSTRACT FROM AUTHOR]- Published
- 2000
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265. Stability Analysis of Multi Process Parameters for Metal-Organic Chemical Vapor Deposition Reaction Cavity
- Author
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Yanli Pei, Jian Li, Ziling Wu, Gang Wang, and Xu Yifeng
- Subjects
Reaction mechanism ,Materials science ,stable flow ,film growth ,Surface Properties ,Flow (psychology) ,Pharmaceutical Science ,Chemical vapor deposition ,Article ,Analytical Chemistry ,law.invention ,lcsh:QD241-441 ,lcsh:Organic chemistry ,law ,Drug Discovery ,Organometallic Compounds ,Pressure ,Metalorganic vapour phase epitaxy ,Physical and Theoretical Chemistry ,Organic Chemistry ,Temperature ,process parameters ,Water ,Rotational speed ,Volumetric flow rate ,Oxygen ,Chemical engineering ,Chemistry (miscellaneous) ,Metals ,Scientific method ,MOCVD ,Hydrodynamics ,Molecular Medicine ,Quantum Theory ,Gases ,Zinc Oxide ,CFD ,Susceptor - Abstract
The parameters for metal-organic chemical vapor deposition (MOCVD) processes significantly influence the properties of ZnO films, especially the flow stability of the chamber, which is caused by process parameters such as the shape of reaction chamber, the working pressure, the growth temperature, the susceptor rotational speed, the gas flow rate, and the nature of the carrier gas at inlet temperature. These parameters are the preconditions for the formation of high-quality film. Therefore, this study uses Ar as a carrier gas, diethylzinc (DEZn) as a Zn source, and H2O as an oxygen source and adopts the reaction mechanism calculated by quantum chemistry, which includes ten gas reactions and eight surface reactions. The process parameters of a specific reaction chamber model were analyzed based on the computational fluid dynamics method. This study also presents an accurate prediction of the flow regime in the reactor chamber under any operating conditions, without additional experiments, based on an analysis of a great quantity of simulation data. Such research is also significant for selecting the growth parameters relevant to production, providing a specific process growth window, narrowing the debugging scope, and providing a theoretical basis for the development of MOCVD equipment and process debugging.
- Published
- 2019
266. Chromium films deposition by hot target high power pulsed magnetron sputtering: Deposition conditions and film properties
- Author
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Grudinin, V. A., Bleykher, G. A., Sidelev, D. V., Krivobokov, V. P., Valery, P., Bestetti, M., Vicenzo, A., and Franz, S.
- Subjects
Materials science ,High power pulsed magnetron sputtering (HPPMS), Cr films and coatings, Hot target, Sublimation, Film growth ,Sublimation ,chemistry.chemical_element ,02 engineering and technology ,01 natural sciences ,Chromium ,0103 physical sciences ,Cr films and coatings ,Materials Chemistry ,Surface roughness ,Composite material ,010302 applied physics ,Surfaces and Interfaces ,General Chemistry ,Sputter deposition ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Hot target ,chemistry ,Duty cycle ,High power pulsed magnetron sputtering (HPPMS) ,Cavity magnetron ,Film growth ,Sublimation (phase transition) ,High-power impulse magnetron sputtering ,0210 nano-technology ,Order of magnitude - Abstract
This study focuses on the deposition conditions, structural and mechanical properties of Cr films obtained by magnetron sputtering with hot target, and using high power pulsed supply with pre-ionization (pulse frequency 500 Hz, duty cycle 4% in the range of averaged power from 15 to 40 W/cm 2 ). It has been found that hot target leads to a tenfold increase in the energy flux to the substrate compared to magnetron sputtering with cooled target. Intense sublimation from the target allows increasing the deposition rate of Cr films of about an order of magnitude. Moreover, the increase in the magnetron power may be accompanied by less heating of the substrates when depositing films of the same thickness. High power pulsed magnetron sputtering (HPPMS) with sublimating Cr hot target can be characterized by a combined mode in the film structure formation, leading to the formation of pores at the initial stage of growth. Cr films with a thickness of about 10 μm, obtained using a hot target, have lower surface roughness, hardness, and Young's modulus compared with sputtered Cr from a cooled target.
- Published
- 2019
267. Fabrication of Single-Phase Manganese Oxide Films by Metal-Organic Decomposition
- Author
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Kyung-Hwan Kim, Do Kyung Lee, and Yun-Hyuk Choi
- Subjects
Technology ,Materials science ,film growth ,Mn3O4 ,chemistry.chemical_element ,02 engineering and technology ,Manganese ,010402 general chemistry ,01 natural sciences ,Article ,metal-organic decomposition ,law.invention ,Crystallinity ,law ,General Materials Science ,Calcination ,Mn2O3 ,Inert gas ,Solution process ,solution process ,Inert ,Microscopy ,QC120-168.85 ,QH201-278.5 ,Thermal decomposition ,Engineering (General). Civil engineering (General) ,021001 nanoscience & nanotechnology ,Decomposition ,TK1-9971 ,0104 chemical sciences ,Descriptive and experimental mechanics ,chemistry ,Chemical engineering ,Electrical engineering. Electronics. Nuclear engineering ,TA1-2040 ,0210 nano-technology - Abstract
Here, single-phase Mn2O3 and Mn3O4 films are successfully fabricated by a facile solution process based on metal-organic decomposition (MOD), for the first time. A formulated manganese 2-ethylhexanoate solution was used as an MOD precursor for the preparation of manganese oxide films. The difference in thermal decomposition behavior of precursor solution in air and inert atmospheres was observed, indicating that the calcination atmosphere is the main factor for controlling the valence of manganese oxide films. Significantly, the solution-coated films on substrates are found to be transformed into single-phase Mn2O3 and Mn3O4 films when they are calcinated under air and inert atmosphere, respectively. The film crystallinity was improved with increasing calcination temperature for both Mn2O3 and Mn3O4 films. In particular, it is noted that the grains of Mn2O3 film were somewhat linearly grown in air, while those of Mn3O4 film exhibited the drastic growth in Ar with an increase of calcination temperature.
- Published
- 2021
- Full Text
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268. High-speed flow field prediction and process parameters optimization in a vertical MOCVD reactor based on a hybrid RSM-KNN model.
- Author
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Wang, Jie, Li, Jian, He, Yi-cong, Luo, Tie-cheng, Li, Ya, Fan, Bing-feng, and Wang, Gang
- Subjects
- *
PROCESS optimization , *CHEMICAL vapor deposition , *METAL organic chemical vapor deposition , *COMPUTATIONAL fluid dynamics , *EPITAXY - Abstract
Metal-Organic Chemical Vapor Deposition (MOCVD) is an important method of epitaxial growth used to obtain high-quality film and mass production. Computational Fluid Dynamics (CFD) method is widely used to simulate and study the growth process of MOCVD, but the complex process parameters and high computational cost have limited the real-time application. A hybrid Response Surface Methodology–K-Nearest Neighbor (RSM-KNN) model is developed to reach the goal of the high speed of flow field prediction and process parameters optimization. In this paper, a 3-dimensional ZnO-MOCVD model is built and then validated using the experimental and simulation results. The Design of Experiment (DOE) method is used to improve data collection performance. Results of deposition rate and uniformity are combined with the RSM model to analyze the influence of process parameters and to explore the relationship between deposition rate, uniformity and flow state. The results of the flow field are combined with the machine learning method KNN to study and predict the flow field and flow states in the reactor. The hybrid model is also presented and optimized to realize the growth of high deposition rate, and the uniformity is increased by 30% at a steady flow state of plug flow. [ABSTRACT FROM AUTHOR]
- Published
- 2021
- Full Text
- View/download PDF
269. Density Determination of Ices of Astrophysical Interest by Double-Laser Interferometry
- Author
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Luna, R., Satorre, M. A., Blanes, G., Santonja, M. C., Domingo, M., Gomis, O., Gallego, Jesús, editor, Zamorano, Jaime, editor, and Cardiel, Nicolás, editor
- Published
- 2003
- Full Text
- View/download PDF
270. Flame stabilizer for stagnation flow reactor
- Author
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Edwards, Christopher [Sunnyvale, CA]
- Published
- 1999
271. Growth behavior and interface of (In + Nb) co-doped rutile TiO2 films prepared on m-plane sapphire substrates.
- Author
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Li, Bo-Chen, Cheng, Shao-Dong, Cheng, Sheng, Liu, Ming, Lu, Lu, Dai, Yanzhu, and Mi, Shao-Bo
- Subjects
- *
SAPPHIRES , *RUTILE , *PULSED laser deposition , *ELECTRON microscope techniques , *TWIN boundaries , *TITANIUM dioxide - Abstract
• (Nb+In) co-doped rutile TiO2 films grow on m-plane sapphire substrates. • The rutile/sapphire orientation relationship is (001)[010]//(1 1 ¯ 00)[0001]. • The structure of rutile-sapphire interface has been determined. • Cation segregation appears at grain boundaries and twin boundaries. (In + Nb) co-doped TiO 2 (TINO) films with a rutile structure have been prepared on m -plane sapphire substrates using a pulsed laser deposition method. The film growth mode and the atomic-scale microstructure of the TINO/sapphire heterostructure have been investigated by advanced electron microscopy techniques. The crystallographic orientation relationship of (001)[010] rutile //(1 1 ¯ 00)[0001] sapphire between the TINO films and the m -plane sapphire substrates has been determined. Across the TINO/sapphire interface, Ti(In,Nb)O 6 −octahedra connect AlO 6 −octahedra through either edge-sharing or corner-sharing. Misfit dislocations appear at the TINO/sapphire interface and contribute to epitaxial strain relaxation in the heterosystem. Additionally, two types of twins, (011)[100] and (031)[100], form within the films. Cation segregation occurs at the twin boundary and the TINO grain boundary. The findings here may provide a better understanding of the growth behaviors of the (In + Nb) co-doped rutile TiO 2 films prepared on other types of substrates. [ABSTRACT FROM AUTHOR]
- Published
- 2021
- Full Text
- View/download PDF
272. Growth of HfN thin films by reactive high power impulse magnetron sputtering
- Author
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Thorsteinsson, D. O., Gudmundsson, Jon Tomas, Thorsteinsson, D. O., and Gudmundsson, Jon Tomas
- Abstract
Thin hafnium nitride films were grown on SiO2 by reactive high power impulse magnetron sputtering (HiPIMS) and reactive direct current magnetron sputtering (dcMS). The conditions during growth were kept similar and the film properties were compared as growth temperature, nitrogen flow rate, and in the case of HiPIMS, duty cycle were independently varied. The films were characterized with grazing incidence X-ray diffraction (GIXRD), X-ray reflection (XRR) and X-ray stress analysis (XSA). HiPIMS growth had a lower growth rate for all grown films, but the films surfaces were smoother. The film density of HiPIMS deposited films grown at low duty cycle was comparable to dcMS grown films. Increasing the duty cycle increased the density of the HiPIMS grown films almost to the bulk density of HfN as well as increasing the growth rate, while the surface roughness did not change significantly. The HiPIMS grown films had large compressive stress while the dcMS grown films had some tensile stress. The dcMS grown films exhibit larger grains than HiPIMS grown films. The grain size of HiPIMS grown films decreases with increasing nitrogen flow rate, while the dcMS grain size increased with increasing nitrogen flow rate. This work shows that duty cycle during HiPIMS growth of HfN films has a significant effect on the film density and growth rate while other film properties seem mostly unaffected., Export Date: 9 May 2018; Article. QC 20180529
- Published
- 2018
- Full Text
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273. Diamond film growth argon-carbon plasmas
- Author
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Zuiker, Christopher [LaGrange, IL]
- Published
- 1998
274. Method of growing films by flame synthesis using a stagnation-flow reactor
- Author
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Edwards, Christopher [Sunnyvale, CA]
- Published
- 1998
275. Preparation of a semiconductor thin film
- Author
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Ginley, David [Evergreen, CO]
- Published
- 1998
276. Diamond film growth from fullerene precursors
- Author
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Pan, Xianzheng [Woodridge, IL]
- Published
- 1997
277. Application of auger electron spectroscopy and inert metal marker techniques to determine metal and oxygen transport in oxide films on metals.
- Author
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Hindam, H. and Smeltzer, W.
- Abstract
Auger electron spectroscopy in combination with depth profiling by Ar ion sputtering was employed as a surface analytical technique to determine the positions of thin (3-5 nm) inert Pd markers during growth of oxide films on Al, Ni, and β-NiAl. Alumina films 35 and 120 nm thick formed on Al and β-NiAl, respectively, grew by inward diffusion of oxygen. Metal migration accounted predominantly for the growth of a NiO film 150 nm thick on the (111) crystal face of Ni. However, an assessment could not be made with respect to oxygen diffusion, if any, in this film due to the limitations imposed on precise depth profiling of the marker position caused by uneven sputtering of the oxide and metal phases. [ABSTRACT FROM AUTHOR]
- Published
- 1980
- Full Text
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278. Josephson properties of Bi/sub 2/Sr/sub 2/CaCu/sub 2/O/sub y/ bicrystal junctions grown by a sequential deposition technique using molecular beam epitaxy.
- Author
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Kiejin Lee, Iguchi, I., Ishibashi, T., Sato, K., Soutome, H., and Kawabe, M.
- Subjects
- *
SUBSTRATES (Materials science) , *THIN film research , *MOLECULAR beam epitaxy , *CRYSTALLOGRAPHY , *ELECTRON diffraction , *IRRADIATION - Abstract
We report Josephson and crystallographic properties of the Bi/sub 2/Sr/sub 2/CaCu/sub 2/O/sub y/ junctions fabricated on MgO(100) bicrystal substrates by a molecular-beam-epitaxy method incorporating co-evaporation and sequential deposition techniques. With the sequential deposition technique which has the advantage of promoting the surface diffusion of adatoms, we obtained the highly growth-controlled films without precipitation of any second impurity phases. During the film growth, the sharp reflection high-energy electron diffraction (RHEED) patterns were also observed. However, the RHEED patterns showed the a-b twin structures due to the lattice mismatch, which influenced the Josephson transport properties at the junction boundary. The normal resistance of the bicrystal junction was 1.5 /spl Omega/ and the I/sub c/R/sub n/ product was 0.75 mV at 4.2 K. The Shapiro steps under millimeter-wave irradiation were clearly observed up to 65 K. The Josephson microwave self-radiation spectra at receiving frequency f/sub REC/=22 GHz. The observed Josephson transport properties are discussed in relation to the microscopic crystallographic properties. [ABSTRACT FROM PUBLISHER]
- Published
- 1997
- Full Text
- View/download PDF
279. Corrosion Dynamics of Carbon Steel in Used Fuel Container Environments
- Author
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Guo, Dan
- Subjects
Corrosion Dynamics ,Chemistry ,Radiochemistry ,Carbon Steel ,Materials Science and Engineering ,Electrochemistry ,Materials Chemistry ,Nuclear Engineering ,Water Radiolysis ,Film Growth ,Physical Chemistry - Abstract
The current Canadian used nuclear fuel container (UFC) design uses a pressure‑grade carbon steel (CS) vessel with its outer surface coated with a thin layer of copper. One concern regarding the structural integrity of the UFC design is the potential internal corrosion of the CS vessel. Moisture trapped inside a UFC could condense within the gap between the hemispherical head and the cylindrical body of the vessel. The internal UFC environment will be exposed to a continuous flux of ionizing radiation arising from the decay of radionuclides trapped in the used UO2 fuel matrix. This thesis research project investigates the effects of physical and chemical solution parameters on CS corrosion, with the aim of developing a corrosion dynamics model that can be used to assess the integrity of the current Canadian UFC design with confidence. The parameters studied in this thesis project were the ratio of solution volume to surface area, pH, dissolved O2, and the presence or absence of γ-radiation. Corrosion dynamics were followed using electrochemical techniques, both conventional and non‑standard techniques developed as part of this project. The electrochemical tests were augmented with post-test surface and solution analyses to study oxides formed on corroded surfaces and to determine the dissolved metal content in the solution phase. The results of this study clearly demonstrated that CS corrosion involves many oxidation steps that lead to the formation and growth of different oxides as well as the dissolution of metal ions. The transfer of Fe atoms between metal, oxide and solution phases provides routes for developing strong systemic feedback that can induce autocatalytic reaction cycles, resulting in oscillatory behaviours that are observable under certain solution conditions. The dynamics of CS corrosion may not approach and reach only one steady state, but continue to evolve and reach different steady states, depending on solution parameters. A mechanism that can explain the CS corrosion dynamics over long time periods under a range of solution conditions has been proposed. The mathematical formulation of a model for the long-term corrosion of CS based on this mechanism has just begun. This study has shown that the corrosion dynamics in the early stages of corrosion can be easily modeled by applying classical electrochemical reaction rate equations coupled with mass transport flux equations. However, for CS in aerated solutions or other oxidizing environments, these classical equations must be formulated for the metal oxidation process rather than the reduction of solution species (oxidant) because the former process is rate determining.
- Published
- 2018
280. Optimization of the deposition process of cobalt oxide films using magnetron reactive sputtering
- Author
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Azevedo Neto, Nilton Francelosi, Universidade Estadual Paulista (Unesp), and Da Silva, José Humberto Dias [UNESP]
- Subjects
Sputtering reativo ,Crescimento de filmes ,Co3O4 ,Reactive sputtering ,Film growth ,Structure ,CoO ,Estrutura - Abstract
Submitted by Nilton Francelosi Azevedo Neto (nilton@fc.unesp.br) on 2018-11-22T13:54:33Z No. of bitstreams: 1 Azevedo Neto- Tese POSMAT-2018.pdf: 3312025 bytes, checksum: 69a53514543bbe65b47c2fd62ddb6168 (MD5) Approved for entry into archive by Lucilene Cordeiro da Silva Messias null (lubiblio@bauru.unesp.br) on 2018-11-22T16:48:03Z (GMT) No. of bitstreams: 1 azevedoneto_nf_dr_bauru.pdf: 3312025 bytes, checksum: 69a53514543bbe65b47c2fd62ddb6168 (MD5) Made available in DSpace on 2018-11-22T16:48:03Z (GMT). No. of bitstreams: 1 azevedoneto_nf_dr_bauru.pdf: 3312025 bytes, checksum: 69a53514543bbe65b47c2fd62ddb6168 (MD5) Previous issue date: 2018-09-24 Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) A motivação para este trabalho foi buscar uma melhor compreensão sobre o processo de crescimento dos filmes de óxido de cobalto pela técnica de DC magnetron sputtering reativo. Os filmes de interesse foram depositados sobre substratos de sílica amorfa (a -SiO2 ), aluminato de lantânio (LaAlO3 ) e safira - c (Al2O3- c) usando diferentes valores de potência de deposição e fluxo de oxigênio . As condições de crescimento dos filmes foram analisadas utilizando simulação computacional do processo de sputtering reativo baseada no modelo de Depla, medidas da emissão óptica das espécies presentes no plasma e monitor amento da taxa de crescimento através de uma microbalança de quartzo. Os resultados de difração de raios X mostraram que em baixa potência é obtida a fase Co3O4 espinélio, enquanto que em alta potência os filmes apresentaram a fase CoO cúbica . A s simulações computacionais do processo de sputtering reativo indicaram que , quando as potências de deposição são baixas, o processo de crescimento dos filmes ocorre com o alvo no regime “envenenado” . Em contraste, altas potencias favorece m o regime metálico do alvo. Medidas de emissão do plasma de deposição mostraram que em baixa potência de deposição a intensidade da linha de emissão do oxigênio é alta , porém com o aumento da potência sua intensidade diminui e a d a linha do cobalto aumenta. O s filmes de Co 3 O 4 depositados sobre substratos cristalinos apresentaram resultados promissores . Medidas de difração de raios X de alta resolução , utilizando radiação síncrotron , indicaram que a deposição do Co 3 O 4 sobre Al2O3 - c resultou em crescimento epitaxial na qual a direção [ 111] do cristal de Co 3 O 4 é perpendicular à superfície do substrato de safira - c (0001). Enquanto que a deposição sobre LaAlO 3 resultou em crescimento com forte textura de orientação, com as direções [220] e [400] perpendiculares à superfície dos substratos . Os espectros Raman dessas amostras apresentaram picos de vibração bem definidos e característicos da fase Co 3 O 4 e a análise do Raman polarizado do s filmes de Co 3 O 4 sobre Al 2 O 3 - c concorda m com as regras de seleção para a orientação [111] . Para os filmes c om fase Co 3 O 4 , medidas de transmitância na região do UV - Vis - NIR mostraram alta absorção na região do visível e bandas de absorção no infravermelho próximo relacionadas a transições eletrônicas dos íons de Co 2+ e Co 3+ . Para esse crescimento observou - se também resposta intensa de fotocondutividade com exc itação em 405 nm e 532 nm em 10 K. Testes preliminares de fotocatálise indicaram que os filmes de Co 3 O 4 produzidos possuem uma pequena atividade fotocatalítica para degradação do corante Rodamina B. Neste trabalho uma correlação direta entre as condições de crescimento e as mudança s de fase do s filmes foi obtida, demonstrando a versatilidade da técnica de sputtering para crescimento de filmes de óxido de cobalto para estudos científicos e aplicações tecnológicas. The motivation for this work was to obtain a better understanding of the growth process of cobalt oxides by the DC magnetron reactive sputtering technique. The films were dep osited on amorphous silica (a-SiO2), lanthanum aluminate (LaAlO3) and sapphire-c (c-Al2O3) substrates using different values of deposition power and oxygen flow. The conditions of growth of the films were analyzed using the optical analysis of the species present in the plasma and the monitoring of the growth rate through a quartz microbalance. The X-ray diffraction results showed that at lower powers the Co3O4 phase was obtained, while at high er power s the films presented the CoO cubic phase. The computational simulations of the reactive sputtering process indicated that, at low deposition power, the gro wth process of the films occurs with the target in the "poisoned" regime, while in high powers it favors the metallic regime of the target. Plasma emission measurements showed that at low deposition power the oxygen intensity is high while at high power it s intensity decreases and that of cobalt increases. The Co 3 O 4 films deposited on crystalline substrates showed promising results. High - resolution X-ray diffraction measurements using synchrotron radiation indicated that the deposition of Co3O4 on c-Al2O3 resulted in epitaxial growth , in which the direction [111] is perpendicular to the surface of the c - sapphire (0001) substrates. However, the deposition on LaAlO 3 resulted in growth with strong texture in the directions [220] and [400]. The Raman spectra of these samples showed well - defined vibration peaks characteristic of the Co3O4 phase . The polarized Raman analysis of Co 3 O 4 deposited on c-Al2O3 agrees with the selection rules for the [111] orientation, in agreement with the high resolution X-ray diffraction analysis . In the optical transmittance measurements , t he films with Co 3 O 4 phase displayed high absorption bands in the region of the visible and near - infrared . These bands are related to el ectronic transitions of the Co2+ and Co3+ ions. For these films , strong photoconductivity responses were observed for excitations at 405 nm and 532 nm at 10 K . Preliminary photocatalysis tests indicated that the Co3O4 films produced by sputtering have a small photocatalytic activity for Rhodamine B (RhB) dye degradation. Concluding , a direct correlation between the growth conditions and the phase changes of the films was obtained, demonstrating the versatility of the sputtering technique for the growth of cobalt oxide films for scientific studies and technological applications.
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- 2018
281. СТРУКТУРНІ ТА ОПТИЧНІ ВЛАСТИВОСТІ ШАРІВ ZnSO, ОДЕРЖАНИХ ТЕРМІЧНИМ ОКИСНЕННЯМ ТОНКИХ ПЛІВОК ZnS
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ZnS ,ZnO ,magnetron sputtering ,film growth ,annealing ,магнетронное распыление ,выращивания плёнок ,отжиг ,магнетронне розпилювання ,вирощування плівок ,відпал - Abstract
We have grown ZnS thin films by means of the radiofrequency (RF) magnetron sputtering technique onto c-Al2O3 and Si substrates at a temperature of 300°С. An effect of thermal annealing on air in a temperature range from 450°С to 800°С on the properties of the deposited films was studied and discussed. It was found that the annealing of the ZnS films leads to a formation both ZnSО layers with different sulfur/oxygen content and pure ZnО layers. It is evidenced by XRD data and optical transmission measurements. An analysis of the optical transmission spectra allowed determining a dependence of the band-gap energy of the films on the conditions of the thermal oxidations on air., Тонкие пленки ZnS, выращенные высокочастотным (ВЧ) распылением на c-Al2O3 и Si подложках при 300°С и проведено их термическое окисление на воздухе в интервале температур от 450°С до 800°С. Проведение отжига пленок ZnS приводит к образованию как слоев ZnSО с различным содержанием серы и кислорода, так и слоев чистого ZnО, о чем свидетельствуют результаты XRD анализа и спектры оптического пропускания. Для этих пленок с оптического пропускания была определена зависимость ширины запрещенной зоны от условий их термического окисления на воздухе., Тонкі плівки ZnS, вирощені високочастотним (ВЧ) розпилюванням на c-Al2O3 та Si підкладках при 300°С та проведено їх термічне окислення на повітрі в інтервалі температур від 450°С до 800°С. Проведення відпалу плівок ZnS приводить до утворення як шарів ZnSО з різним вмістом сірки і кисню, так і шарів чистого ZnО, про що свідчать результати XRD аналізу та спектри оптичного пропускання. Для цих плівок із оптичного пропускання була визначена залежність ширини забороненої зони від умов їх термічного окислення на повітрі.
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- 2018
282. Wavelet transform-based electron tomography measurement of buried interface roughness
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Marek Malac, Darren Homeniuk, and Misa Hayashida
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Materials science ,semiconductor device ,film growth ,Interface (computing) ,Acoustics ,electron tomography ,02 engineering and technology ,Surface finish ,root mean square (RMS) roughness ,interface roughness ,Wavelet ,0202 electrical engineering, electronic engineering, information engineering ,Surface roughness ,wavelet transform ,defect location ,Instrumentation ,Continuous wavelet transform ,transmission electron microscope ,Shot noise ,Wavelet transform ,020206 networking & telecommunications ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,surface roughness ,Spatial frequency ,0210 nano-technology - Abstract
Interface roughness is a critical parameter determining the performance of semiconductor devices. We show that a continuous wavelet transform is useful to describe not only the magnitude of the interface roughness, but also the spatial frequencies that describe the interface. We propose a simple presentation of the results that makes it convenient to compare between interfaces. In particular, an average and maximum value wavelet profile that is obtained from a series of one dimensional wavelet transforms provides a traceable and quick survey of the results. We demonstrate the wavelet transform method using both computer simulations and by applying it to experimental data obtained by electron tomography of a test sample and to a molecular layer interface. Wavelet descriptions of the interface roughness suffers less from the presence of shot noise in the experimental data than the traditional root mean square error description of interface roughness. An increase in lateral dimensions of an interface that has large features increases the content of low spatial frequencies in wavelet transforms. In comparison, the value of root mean square error increases in an untraceable manner with the same increase in lateral dimensions on the same interface. Morse wavelets with γ = 9 and β = 3 appear to be a suitable choice for applications in interface roughness measurement.
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- 2018
283. Electrochemical and Corrosion Examination of Copper under Deep Geologic Conditions for the Application of Nuclear Waste Containers
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Martino, Taylor L.
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Corrosion ,Sulphide ,Electrochemistry ,Bentonite ,Mechanism ,Nuclear Waste Disposal ,Chloride ,Film Growth ,Physical Chemistry ,Copper ,Analytical Chemistry - Abstract
Copper is the selected material for the fabrication of nuclear fuel waste containers in Sweden, Finland and Canada due to its corrosion resistance in the anoxic aqueous environments, anticipated in deep geological repositories. A potential oxidant for copper is bisulphide produced either by the dissolution of minerals or by sulphate-reducing bacteria. The primary goals of this thesis were to determine the mechanism of corrosion of copper in bisulphide environments and to investigate the chemistry of the bentonite porewater that will ultimately be in contact with the copper container. The mechanism of sulphide film growth and the details of copper corrosion in anoxic aqueous bisulphide solutions in the presence of various groundwater anions have been investigated electrochemically. The chalcocite films were analyzed via voltammetry, electrochemical impedance spectroscopy and surface analysis. Under these conditions, growth of a coherent film occurred initially but the development of interfacial stresses led rapidly to film fracture. Upon fracture, a resistive outer chalcocite deposit formed with continued growth governed by the mass transport of bisulphide. Specific anion effects were observed with chloride, a common groundwater ion, found to maintain porosity in the chalcocite film while the oxyanions, sulphate and bicarbonate were found to suppress film growth. At high bisulphide concentrations and positive potentials growth of the outer deposit caused an apparent partial passivation of the surface, which theoretically could lead to localized film breakdown and pitting. However, the required high bisulphide concentrations are not attainable in a deep geologic repository and pitting should not occur. Bentonite porewater chemistry was successfully monitored using a novel experimental set-up. Electrochemical sensors monitoring pH, chloride concentration and the copper corrosion potential were placed both on the surface and inside of a bentonite clay disk. The results showed that the bentonite acted like a pH buffer and chloride from bulk solution adsorbed onto the montmorillonite structure. Corrosion potential measurements suggested that corrosion likely occurred via formation of a copper chloride complex or growth of a cuprite film. Data collected from these studies will be used directly by SKB via incorporation into models.
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- 2018
284. Zr-O-N coatings for decorative purposes: Study of the system stability by exploration of the deposition parameter space
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N.P. Barradas, Luís Miguel Cunha, Eduardo Alves, M. Apreutesei, Marcos Rodrigues, C. Lopes, Joel Nuno Pinto Borges, Diego Martinez-Martinez, C.I. da Silva Oliveira, Universidade do Minho, Centro de Física da Universidade do Minho (CFUM), Swedish Defence Research Agency [Stockholm] (FOI), Instituto de Plasmas e Fusão Nuclear [Lisboa] (IPFN), Instituto Superior Técnico, Universidade Técnica de Lisboa (IST), Instituto Tecnológico e Nuclear (ITN), ITN, CFNUL, Matériaux, ingénierie et science [Villeurbanne] (MATEIS), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), and Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)
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XRD ,Reactive sputtering ,Corrosion resistance ,Mechanical properties ,Zirconium compounds ,02 engineering and technology ,Substrate (electronics) ,Nitride ,01 natural sciences ,[SPI.MAT]Engineering Sciences [physics]/Materials ,chemistry.chemical_compound ,System stability ,Materials Chemistry ,Deposition (phase transition) ,Composite material ,Oxide films ,RBS ,010302 applied physics ,Chemical bonds ,Surfaces and Interfaces ,Transition metals ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Engenharia e Tecnologia::Engenharia dos Materiais ,Biocompatibility ,0210 nano-technology ,Chemical stability ,Crystalline structure ,Transition metal compounds ,Chemical compositions ,Oxynitrides ,Materials science ,Oxide ,chemistry.chemical_element ,Mineralogy ,Color ,Corrosion ,Nitrides ,Oxynitride ,Decorative ,Sputtering ,Coatings ,Oxynitride films ,0103 physical sciences ,Engenharia dos Materiais [Engenharia e Tecnologia] ,Deposition ,Metallic films ,Deposition Parameters ,Zirconium ,Science & Technology ,General Chemistry ,Nanoindentation ,Rubidium ,Decorative coating ,Aesthetic ,chemistry ,Film growth - Abstract
"Available online 21 November 2017", The deposition of decorative coatings is an excellent solution to modify the surface of any material, particularly the aesthetic finishing, without altering the properties of the substrate. Transition metal oxynitride films are interesting for many applications, due the simple and economic way to tune between nitride and oxide bonding. In reactive sputtering, this is done by playing with the flows of N2 and O2, leading to variations of properties (e.g. color) in different directions. In this paper, zirconium is selected as transition metal due to combination of different characteristics (color, biocompatibility, mechanical properties, corrosion resistance). The literature about Zr-O-N films reveals a confinement of chemical composition. Therefore, the aim of this work is the exploration of the deposition parameter space in order to evaluate the stability of the Zr-O-N system, i.e. verify if the chemical composition of the films still falls in the same range after variation of different deposition parameters. To do that, a series of Zr-O-N films is deposited first at different reactive flows, maintaining the remaining deposition parameters constant. The obtained films can be classified in three different groups, based on their chemical composition, crystalline structure, and film growth. These groups can be successfully explained according to the sputtering characteristics, and correlated with the mechanical properties and color of the films measured by nanoindentation and spectrophotometry receptivity. The films deposited by variation of other parameters are introduced afterwards and their characteristics are compared with the reference series., The financial support of Portuguese Foundation of Science and Technology (FCT), under the project number IF/00671/2013 is gratefully acknowledged., info:eu-repo/semantics/acceptedVersion
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- 2018
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285. Ambiguous Role of Growth-Induced Defects on the Semiconductor-to-Metal Characteristics in Epitaxial VO2/TiO2 Thin Films
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Mihailescu, C. N., Symeou, E., Svoukis, E., Negrea, R. F., Ghica, C., Teodorescu, V., Tanase, L. C., Negrila, C., Giapintzakis, John, and Giapintzakis, John [0000-0002-7277-2662]
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Phase transition ,Materials science ,Thin films ,thermal and epitaxial strain ,02 engineering and technology ,Substrate (electronics) ,Semiconductor growth ,Electronic phase transition ,010402 general chemistry ,Epitaxy ,01 natural sciences ,Pulsed laser deposition ,thin film epitaxy ,Magnetic semiconductors ,semiconductor-metal phase transition ,Lattice constant ,Phase (matter) ,Interfaces (materials) ,General Materials Science ,Thin film ,Low substrate temperature ,pulsed laser deposition ,Epitaxial strain ,Oxide minerals ,Condensed matter physics ,Substrates ,Electrical characteristic ,Transition temperature ,Vanadium dioxide ,Growth temperature ,Intrinsic material response ,021001 nanoscience & nanotechnology ,interdiffusion between film and substrate ,0104 chemical sciences ,growth of VO2 films on TiO2 ,Film growth ,Titanium dioxide ,Defects ,Film preparation ,0210 nano-technology ,Semiconductor-to-metal transitions - Abstract
Controlling the semiconductor-to-metal transition temperature in epitaxial VO2 thin films remains an unresolved question both at the fundamental as well as the application level. Within the scope of this work, the effects of growth temperature on the structure, chemical composition, interface coherency and electrical characteristics of rutile VO2 epitaxial thin films grown on TiO2 substrates are investigated. It is hereby deduced that the transition temperature is lower than the bulk value of 340 K. However, it is found to approach this value as a function of increased growth temperature even though it is accompanied by a contraction along the V4+-V4+ bond direction, the crystallographic c-axis lattice parameter. Additionally, it is demonstrated that films grown at low substrate temperatures exhibit a relaxed state and a strongly reduced transition temperature. It is suggested that, besides thermal and epitaxial strain, growth-induced defects may strongly affect the electronic phase transition. The results of this work reveal the difficulty in extracting the intrinsic material response to strain, when the exact contribution of all strain sources cannot be effectively determined. The findings also bear implications on the limitations in obtaining the recently predicted novel semi-Dirac point phase in VO2/TiO2 multilayer structures. © 2018 American Chemical Society. 10 14132 14144 14132-14144
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- 2018
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286. Lateral growth of NiSi at the θ-Ni2Si/Si(100) interface: Experiments and modelling
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Federico Panciera, Thierry Epicier, M. El Kousseifi, Khalid Hoummada, Dominique Mangelinck, Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Matériaux, ingénierie et science [Villeurbanne] (MATEIS), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), and Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)
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Silicides ,Materials science ,Thin films ,Intermetallic ,Nucleation ,02 engineering and technology ,01 natural sciences ,Precipitates ,[SPI.MAT]Engineering Sciences [physics]/Materials ,Mechanical equilibrium ,chemistry.chemical_compound ,Microelectronics ,Models ,Phase (matter) ,0103 physical sciences ,Silicide ,Lateral growth ,Growth kinetics ,Kinetics parameter ,Large aspect ratio ,Nickel compounds ,Electrical and Electronic Engineering ,Thin film ,010302 applied physics ,Condensed matter physics ,business.industry ,Contact formation ,Enzyme kinetics ,Film thickness ,Large diameter ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Aspect ratio (image) ,Aspect ratio ,Atomic and Molecular Physics, and Optics ,Surface energy ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Triple lines ,chemistry ,Interfacial energy ,Film growth ,0210 nano-technology ,business - Abstract
cited By 0; International audience; The nucleation and lateral growth are more and more important steps for the thin film growth of a phase (silicide, intermetallic…) when the thin film thickness is in the range or below 10 nm. It might become crucial for contact in microelectronics that are in this range of thickness for actual devices and affect the properties of contacts in different parts of the devices. For reaction between 10 nm Ni(10%Pt) and (100)Si, it was shown that NiSi grows by nucleation and lateral growth at the epitaxial θ-Ni2Si/Si interface and forms precipitates having a large aspect ratio (large diameter and small thickness) were observed. In this work, the precipitate shape as well as the shape of the different interfaces close to the triple line are reproduced by using the model of Pasichnyy and Gusak for θ-Ni2Si/Si interfaces that are either curved or straight. The deduced interfacial energies and kinetics parameters enabling to obtain the characteristics of the precipitates are discussed and compared to the ones obtained by the model of El Kousseifi et al. The conditions for mechanical equilibrium and the implication for the contact formation are discussed. © 2018 Elsevier B.V.
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- 2018
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287. TiOx deposited by magnetron sputtering
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Tonneau, R., Moskovkin, P., Pflug, A., Lucas, S., and Publica
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reactive magnetron sputtering ,plasma modelling ,film growth ,thin film ,titanium oxide ,Monte Carlo simulation - Abstract
This paper presents a 3D multiscale simulation approach to model magnetron reactive sputter deposition of TiOx
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- 2018
288. Surface property detection apparatus and method
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Sorensen, Neil [Albuquerque, NM]
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- 1995
289. Fabrication and characterization of photo-responsive metal–organic framework membrane for gas sensing using planar optical waveguide sensor.
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Nizamidin, Patima, Yimit, Abliz, Turdi, Gulmira, Chen, Zi Jiao, Zhang, Fang, and Kutilike, Buayishamu
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METAL-organic frameworks , *PLANAR waveguides , *OPTICAL sensors , *HONEYCOMB structures , *GAS absorption & adsorption , *ADSORPTION kinetics - Abstract
A facile, novel fabrication approach using UV light irradiation was proposed to fabricate a photo-responsive metal–organic framework (PR-MOF-1, [Zn 2 -(bdc) 2 -(dpNDI)] n , where bdc = benzene-1,4-dicarboxylic acid; dpNDI = N , N ′-di(4-pyridyl)-1,4,5,8-naphthalenetetracarboxy diimide) membrane. The morphology of the PR-MOF-1 framework evolved from a honeycomb porous structure to a densified ladder-layered structure after 60 min of UV-light illumination. The as-grown film was optically transparent and exhibited a greater sensing response to ethylenediamine (EDA) gas in the presence of interfering substances such as ammonia and dimethylamine as well as benzene, toluene, xylene, and styrene gases, as measured using an asymmetric planar optical waveguide gas sensor. When the EDA gas molecule was adsorbed on the surface of the membrane, charge transfer between them preferably occurred, leading to a change in the membrane surface conformation. As an ideal sensing material for EDA gas detection, the PR-MOF-1 membrane showed a relatively high surface sensitivity (11,000 times cm-1) after 60 min of growth, and it could quickly (in less than 2 s) detect 1 ppb of EDA gas with a significant response (S/N = 3.45). During the static gas adsorption process, the EDA gas adsorption kinetics fit well with pseudo-second-order (PSO) model, and the adsorption capacity (q e) on a unit surface showed a high value of 33.91 μg cm−2 at 283 K. The high selectivity and sensitivity of the PR-MOF-1 membrane for EDA gas indicate the effectiveness of the light irradiation method for alteration of the metal– organic framework membrane structure and control of the gas sensing properties. A facile, green, novel fabrication approach using UV light irradiation was proposed to fabricate a photo-responsive metal–organic framework (PR-MOF-1, [Zn2-(bdc)2-(dpNDI)]n) membrane. The PR-MOF-1 membrane morphology evolved from a honeycomb porous structure to a densified ladder-layered structure after 60 min of UV-light illumination. During the growth period, the film thickness increased with increasing irradiation time, and the refractive index fluctuated between 1.804 and 1.844. In the gas sensing performance, as measured using an asymmetric planar optical waveguide gas sensor, PR-MOF-1 membrane exhibited a greater sensing response to ethylenediamine (EDA) gas in the presence of interfering substances such as ammonia and dimethylamine as well as benzene, toluene, xylene, and styrene gases. In further detection, it was founded that the PR-MOF-1 membrane could quickly detect 1 ppb of EDA gas with a significant response and adsorption capacity (qe), which has great implications for environmental monitoring or control. [Display omitted] • A novel approach using UV light irradiation was proposed to fabricate PR-MOF-1 membrane. • The PR-MOF-1 membrane conform a ladder-layered structure after 60 min of irradiation. • The PR-MOF-1 membranes are optically transparent and highly sensitive to EDA gas. • When the PR-MOF-1 membrane exposed to EDA gas, charge transfer preferably occurred. • The EDA gas sensing kinetics fit well with pseudo-second-order (PSO) model. [ABSTRACT FROM AUTHOR]
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- 2021
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290. Fabrication of Single-Phase Manganese Oxide Films by Metal-Organic Decomposition.
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Kim, Kyung-Hwan, Lee, Do Kyung, Choi, Yun-Hyuk, and Calvillo, Laura
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OXIDE coating , *CRYSTALLINITY , *ATMOSPHERE - Abstract
Here, single-phase Mn2O3 and Mn3O4 films are successfully fabricated by a facile solution process based on metal-organic decomposition (MOD), for the first time. A formulated manganese 2-ethylhexanoate solution was used as an MOD precursor for the preparation of manganese oxide films. The difference in thermal decomposition behavior of precursor solution in air and inert atmospheres was observed, indicating that the calcination atmosphere is the main factor for controlling the valence of manganese oxide films. Significantly, the solution-coated films on substrates are found to be transformed into single-phase Mn2O3 and Mn3O4 films when they are calcinated under air and inert atmosphere, respectively. The film crystallinity was improved with increasing calcination temperature for both Mn2O3 and Mn3O4 films. In particular, it is noted that the grains of Mn2O3 film were somewhat linearly grown in air, while those of Mn3O4 film exhibited the drastic growth in Ar with an increase of calcination temperature. [ABSTRACT FROM AUTHOR]
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- 2021
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291. Diffusion-based modeling of film growth of hydrates on gas-liquid interfaces.
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Kar, Aritra, Bhati, Awan, Acharya, Palash V., Mhadeshwar, Ashish, Venkataraman, Pradeep, Barckholtz, Timothy A., and Bahadur, Vaibhav
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GAS-liquid interfaces , *DIFFUSION , *GAS hydrates , *HYDRATES , *HEAT transfer - Abstract
Formation of gas hydrates occurs in three stages: nucleation, film growth, and bulk growth. As per past literature, the rate of film growth (on gas-liquid interface) depends on heat transfer from the vicinity of the film front to the surrounding medium. We present analyses to show that heat transfer is not a significant factor in film growth, as previously believed. We then present an alternative theory for film growth, which considers film growth as gas diffusion limited. We note that gas diffusion through hydrates is a limiting phenomena for bulk growth; we presently show that diffusion from the gas phase is the limiting phenomena for film growth as well. This fundamentals-based analytical model does not need the significant assumptions invoked in previous studies and relies on only one fitting parameter. Importantly, the model shows excellent agreement with experimental results on film growth of hydrates from pure gases and mixtures of gases. [ABSTRACT FROM AUTHOR]
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- 2021
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292. Epitaxial lateral overgrowth of AlN on self-assembled patterned nanorods
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Vitaly Z. Zubialevich, Haoning Li, Nikolay Petkov, Michele Conroy, Justin D. Holmes, and Peter J. Parbrook
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Metallorganic vapor phase epitaxy ,Self assembled monolayers ,Lithography ,Sapphire ,Materials science ,Epitaxy ,Crystal ,Situ reflectance measurements ,Monolayer ,Materials Chemistry ,Epitaxial growth ,Wafer ,Epitaxial lateral overgrowth ,Metalorganic vapour phase epitaxy ,In-situ measurement ,Tensile strain ,business.industry ,Threading dislocation ,Organometallics ,Nanoscale patterning ,General Chemistry ,Metal-organic vapour phase epitaxy ,Orders of magnitude ,Crystallography ,Film growth ,Optoelectronics ,Nanorods ,Nanorod ,Threading dislocation densities ,Edge dislocations ,Dislocation ,Inductively coupled plasma ,business - Abstract
We report an inexpensive nanoscale patterning process for epitaxial lateral overgrowth (ELOG) in AlN layers grown by metal organic vapour phase epitaxy (MOVPE) on sapphire. The pattern was produced by an inductively coupled plasma etch using a self-assembled monolayer of silica spheres on AlN as the lithographic mask. The resulting uniform 1 [small mu ]m length rod structure across a wafer showed a massive reduction in threading dislocations (TDs) when annealed at 1100 [degree]C. Overgrowing homoepitaxial AlN on top of the nanorods, at a temperature of 1100 [degree]C, produced a crack free coalesced film with approximately 4 [small mu ]m of growth, which is formed at a much lower temperature compared to that typically required for microscale ELOG. The improved crystal quality, in terms of TD reduction, of the AlN above the rods was determined by detailed weak beam (WB) electron microscopy studies and showed that the threading dislocation density (TDD) was greatly reduced, by approximately two orders of magnitude in the case for edge-type dislocations. In situ reflectance measurements during the overgrowth allowed for thickness coalescence to be estimated along with wafer curvature changes. The in situ measurements also confirmed that tensile strain built up at a much slower rate in the ELOG AlN layer compared to that of AlN prepared directly on sapphire.
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- 2015
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293. Chloromethyl chlorosulfate as a voltage delay inhibitor in lithium cells
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Delnick, Frank [Albuquerque, NM]
- Published
- 1993
294. Hot filament CVD of boron nitride films
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Rye, Robert [Albuquerque, NM]
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- 1992
295. Growth and characterization of pyrochlore-type (Ca,Ti)2(Nb,Ti)2O7 thin films.
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Yin, Jing-Wei, Wang, Yan, Chen, Yue-Hua, Wu, Sheng-Qiang, Cheng, Shao-Dong, Mi, Shao-Bo, Lu, Lu, Jin, Lei, and Wang, Hong
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- *
PYROCHLORE , *THIN films , *ELECTRON microscope techniques , *INTERFACE structures , *MAGNETRON sputtering , *UNIT cell - Abstract
• Pyrochlore-type (Ca,Ti)2(Nb,Ti)2O7 (CNTO) films have been obtained. • Cube-on-cube epitaxy occurs for the CNTO/yttria-stabilized zirconia system. • An interlayer of Ca1-□(Ti,Nb)O3 forms between CNTO film and LaAlO3 substrate. • The cation reconstruction appears at the CNTO/Ca1-□(Ti,Nb)O3 interface. Pyrochlore-type (Ca,Ti) 2 (Nb,Ti) 2 O 7 thin films have been grown on single-crystalline LaAlO 3 and yttria-stabilized zirconia substrates by a magnetron sputtering system. Atomic-scale interface structure and growth mode of the (Ca,Ti) 2 (Nb,Ti) 2 O 7 films on the substrates with different crystal structures have been investigated by advanced electron microscopy techniques. In both heterosystems, the film/substrate orientation relationship of [100](001) film //[100](001) substrate has been determined. In the heterosystem of (Ca,Ti) 2 (Nb,Ti) 2 O 7 /yttria-stabilized zirconia, the films directly grow on the substrates. In contrast, in the (Ca,Ti) 2 (Nb,Ti) 2 O 7 /LaAlO 3 heterosystem, a perovskite-type Ca 1-□ (Ti,Nb)O 3 interlayer with a few unit cells in thickness forms at the interface and interfacial reconstruction occurs at the (Ca,Ti) 2 (Nb,Ti) 2 O 7 /Ca 1-□ (Ti,Nb)O 3 interface. Our findings indicate that the formation of the interlayer and the (Ca,Ti) 2 (Nb,Ti) 2 O 7 /Ca 1-□ (Ti,Nb)O 3 interface reconstruction can accommodate the film/substrate dissimilarities in the crystal structures and facilitate the growth of single-crystalline pyrochlore-type films on the perovskite-type substrates. [ABSTRACT FROM AUTHOR]
- Published
- 2021
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296. UV absorption control of thin film growth
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Zuhoski, Steven [Hopewell Junction, NY]
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- 1991
297. Influence of growth temperature, working gas ratio, and buffer layer in ZnO films grown on (001) Si substrates by using rf-sputtering
- Author
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Kim, Kang-Bok, Lee, Soo-Man, Oh, Dong-Cheol, and Ko, Hang-Ju
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- 2015
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298. Modeling of plasma dynamics during pulsed electron beam ablation of graphite.
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Ali, Muddassir and Ali, Muddassir
- Abstract
Recent advances in the field of plasma nanofabrication suggest that plasma-based technologies may replace many of the conventional chemical and thermal routes in the synthesis of nanomaterials (with at least one dimension below 100 nm) and thin films. In contrast to the conventional processing routes, where only neutral species are involved, a plasma is made up of energetic species including ions, electrons, and excited molecules in addition to neutrals. Due to the highly energetic nature of interactions among these species and with other surfaces (substrates), a plasma allows for the formation of materials at higher rates even though their concentrations might be low as compared with those of neutral species in non-plasma based methods. While the mechanisms of the various interactions in a plasma are undoubtedly complex and require a fundamental understanding, they offer new opportunities for material nanofabrication. Pulsed electron beam ablation (PEBA) has recently emerged as a novel and promising technique for high quality thin films growth. Pulsed electron beam film deposition consists of many physical processes including target material heating, target ablation, plasma plume expansion, and film growth on a substrate. Electron beam ablation is a complex process, which comprises heating, phase change, and removal of a fine fraction from the target surface. Ablation strongly affects the space distribution, composition, mass transfer processes, which in turn has a critical bearing on the structure, stoichiometry and properties of thin films. Plasma plume expansion into an ambient gas is a fundamental issue in PEBA as the quality of thin films deposited onto the substrate depends on the composition, energy and density of particles ejected from the target. A one-dimensional heat conduction model is presented to investigate the heating and ablation of a graphite target upon interaction with a polyenergetic electron beam. The effect of electron beam efficiency, power
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- 2017
299. Croissance des composés Metallorganiques (MOFs) sur des surfaces de silicium fonctionnalisées
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Yuan, Hongye, Laboratoire de physique de la matière condensée (LPMC), École polytechnique (X)-Centre National de la Recherche Scientifique (CNRS), Université Paris Saclay (COmUE), Philippe Allongue, and STAR, ABES
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[CHIM.MATE] Chemical Sciences/Material chemistry ,Monocouche ,Croissance du film ,Monolayer ,Fonctionnalisation ,Film growth ,Metallorganiques ,[CHIM.COOR]Chemical Sciences/Coordination chemistry ,[CHIM.MATE]Chemical Sciences/Material chemistry ,[CHIM.COOR] Chemical Sciences/Coordination chemistry ,Functionalization ,Metal-Organic frameworks - Abstract
Within this work we investigate synthesis conditions for the direct growth of Fe3+/H2BDC and Fe3+/H2NDC MOFs onto functionalized silicon (111) surfaces exhibiting well-defined structure and whose surface chemistry can be tailored in order to favor/direct the heterogeneous nucleation and growth of the MOFs. Growth mechanism of relevant MOFs at chosen conditions and flexible properties of MIL-88B and MIL-88C frameworks are presented as well with the assistance of post-synthesis treatment results.Regarding the system of Fe3+/H2BDC morphologies and structures of obtained layers strongly depend both on surface chemistry of grafted monolayers and also on the synthesis conditions (temperature, solution composition and reaction time). Oriented MIL-88B crystals along [001] direction is only observed onto COOH-functionalized surfaces and was found to be favored in presence of ligand excess in solution. The formation of textured MIL-101 phase along [111] direction on pyridyl and hydroxyl terminated Si surfaces is observed irrespective of the synthesis condition. Isolated MIL-101crystals with preferred orientation along [111] direction was also found on acid terminated surface at excess of metal, whereas randomly oriented MIL-101 islands are observed at ratio R≧1. In contrary, no film growth happened on methyl terminated Si surfaces. Introduction of HCl, H2O and organic weak base-triethylamine into the precursor solutions also affects the formation of MOF films with various morphologies and coverage between MIL-101 and MIL-88B on carboxylic terminated Si surfaces. Time dependence of film growth at excess of ligand (R=2) and at excess of metal (R=0.5) without and with addition of HCl indicates clearly that both of MIL-88B and MIL-101 follows a Volmer-Weber growth mode, during which, isolated three-dimensional crystals or clusters formed at initial stage and grew both laterally and vertically on the surface.As to the system of Fe3+/H2NDC, depending on the synthesis conditions including temperature, ratio of ligand to [Fe3+] and [Fe3+] concentration only one phase-MIL-88C with variable surface coverage ranging from separated hexagonal crystals to layers composed of isolated bundles of hexagonal crystallites all with preferential orientation along [001] direction was observed. Evolution of MIL-88C crystals along with crystallization time also suggests a Volmer-Weber mode.Ex-situ XRD measurements of post-treatment towards the as-synthesized layers comprised of MIL-88B and MIL-88C respectively demonstrate their flexibility during molecule desorption. Tentative in-situ XRD measurements also show the reversibility of MIL-88C framework upon ethanol uptake and release., Dans ce travail, nous étudions les conditions de synthèse pour la croissance directe des MOF Fe3 + / H2BDC et Fe3 + / H2NDC sur des surfaces de silicium fonctionnalisées (111) présentant une structure bien définie et dont la chimie de surface peut être adaptée pour favoriser / diriger la nucléation et la croissance hétérogènes Des MOF. Le mécanisme de croissance des MOF pertinents aux conditions choisies et les propriétés flexibles des cadres MIL-88B et MIL-88C sont également présentés avec l'aide des résultats du traitement post-synthèse.En ce qui concerne le système de morphologies et structures Fe3 + / H2BDC, les structures des couches obtenues dépendent fortement de la chimie de surface des monocouches greffées et aussi des conditions de synthèse (température, composition de la solution et temps de réaction). Les cristaux MIL-88B orientés sur la direction [001] sont seulement observés sur des surfaces fonctionnalisées par COOH et se sont révélés être favorisés en présence d'un excès de ligand en solution. La formation de la phase MIL-101 texturée le long de la direction [111] sur les surfaces de Si pyridyl et hydroxy-terminé est observée indépendamment de la condition de synthèse. Des cristaux MIL-101 isolés avec une orientation préférée le long de la direction [111] ont également été trouvés sur une surface terminée par acide à un excès de métal, alors que les îlots MIL-101 orientés au hasard sont observés au rapport R ≧ 1. Au contraire, aucune croissance du film ne s'est produite sur les surfaces de Si à terminaison méthyle. L'introduction de HCl, de H2O et de base faible organique -triéthylamine dans les solutions précurseurs affecte également la formation de films MOF avec différentes morphologies et couverture entre MIL-101 et MIL-88B sur des surfaces de Si à terminaison carboxylique. La dépendance temporelle de la croissance du film à un excès de ligand (R = 2) et d'un excès de métal (R = 0,5) sans et avec addition de HCl indique clairement que les deux MIL-88B et MIL-101 suivent un mode de croissance Volmer-Weber, Au cours de laquelle, des cristaux ou des grappes tridimensionnels isolés se sont formés à l'étape initiale et se sont développés latéralement et verticalement à la surface.En ce qui concerne le système de Fe3 + / H2NDC, en fonction des conditions de synthèse, y compris la température, le rapport du ligand à la concentration [Fe3 +] et [Fe3 +] seulement une phase-MIL-88C avec une couverture de surface variable allant des cristaux hexagonaux séparés aux couches composées d'isolés On a observé des faisceaux de cristallites hexagonales tous avec une orientation préférentielle le long de la direction. L'évolution des cristaux de MIL-88C avec le temps de cristallisation suggère également un mode Volmer-Weber.Les mesures ex-situ XRD du post-traitement vers les couches synthétisées constituées de MIL-88B et MIL-88C démontrent respectivement leur flexibilité lors de la désorption des molécules. Les mesures provisoires de la XRD in situ montrent également la réversibilité du cadre MIL-88C lors de l'absorption et de la libération de l'éthanol.
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- 2017
300. Scaling of the surface vasculature on the human placenta
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Alexander S. Leonard, Craig J. Newschaffer, C. M. Salafia, M. D. Fallin, D. Schubert, J. Lee, Simon Morgan, Lisa A. Croen, Dimitri D. Vvedensky, and Cheryl K. Walker
- Subjects
Risk ,Pathology ,medicine.medical_specialty ,Autism Spectrum Disorder ,Autistic spectrum disorder ,Placenta ,Veins ,Chorionic plate ,Cohort Studies ,Physics, Fluids & Plasmas ,Pregnancy ,medicine ,Humans ,DISTRIBUTIONS ,Genetic Predisposition to Disease ,Science & Technology ,Physics ,Infant, Newborn ,Models, Cardiovascular ,Human placenta ,Arteries ,Population cohort ,BIRTH-WEIGHT ,United States ,FILM GROWTH ,Physics, Mathematical ,ORIGINS ,Cohort ,embryonic structures ,Physical Sciences ,CELLS ,PATTERNS ,Female ,Voronoi diagram - Abstract
The networks of veins and arteries on the chorionic plate of the human placenta are analyzed in terms of Voronoi cells derived from these networks. Two groups of placentas from the United States are studied: a population cohort with no prescreening, and a cohort from newborns with an elevated risk of developing autistic spectrum disorder. Scaled distributions of the Voronoi cell areas in the two cohorts collapse onto a single distribution, indicating common mechanisms for the formation of the complete vasculatures, but which have different levels of activity in the two cohorts.
- Published
- 2017
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