201. LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
- Author
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Kazim Gorgulu, Ali Kemal Okyay, Zulkarneyn Sisman, Mahmud Yusuf Tanrikulu, Muhammet Poyraz, and Okyay, Ali Kemal
- Subjects
Atoms ,Absorption co-efficient ,Micro-bolometers ,Materials science ,Infrared imaging ,Noise-equivalent temperature ,Long-wave infrared regimes ,01 natural sciences ,law.invention ,Atomic layer deposition ,Time constants ,law ,Zinc oxide ,Temperature sensors ,Uncooled infrared imaging ,Deposition ,Absorption (electromagnetic radiation) ,Infrared radiation ,Thermal simulations ,business.industry ,Bilayer ,010401 analytical chemistry ,Bolometer ,General Engineering ,Microbolometer ,Molar absorptivity ,Microbolometers ,Bolometers ,Atomic and Molecular Physics, and Optics ,Bi-layer structure ,0104 chemical sciences ,Single-layer structure ,Thermography (imaging) ,Optoelectronics ,business ,Layer (electronics) - Abstract
We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
- Published
- 2017
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