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Diamond is a hopeful candidate for power switching device which can operate at high temperature as a “Cooling system free” device, yet at a high current. Recently we have developed a 3D diamond CVD growth method coupled with a sophisticated “direct wafer fabrication technique” to fabricate diamond wafer without slicing. Currently, half inch size single crystal diamond substrates are available for R&D of diamond device. Using this technique, we have increased the device fabrication size from 3x3mm2 to half inch wafer. In this paper, we present the results of measurements on the first device fabricated on a half inch size CVD substrate. We have carried out the first device characteristics mapping for diamond, and have observed the influence of substrate characteristics on the SBD characteristics.

Objective: The effects of dose-escalation of 5-fluorouracil (5-FU) on the clinical outcome and pharmacokinetics of 5-FU were investigated in Japanese patients with Stage III/IVa esophageal squamous cell carcinoma. Methods: Thirty-five patients with Stage III/IVa were enrolled, who were treated with a definitive 5-FU/cisplatin-based chemoradiotherapy. A course consisted of continuous infusion of 5-FU at 400 mg/m 2 /day (the standard dose group, N=27) or 500-550 mg/m 2 /day (the high dose group, N=8) for days 1-5 and 8-12, infusion of cisplatin at 40 mg/m 2 /day on days 1 and 8, and radiation at 2 Gy/day on days 1 to 5, 8 to 12, and 15 to 19, with a second course repeated after a 2-week interval. Plasma concentrations of 5-FU were determined by high performance liquid chromatography at 5:00 PM on days 3, 10, 38 and 45, and at 5:00 AM on days 4, 11, 39 and 46. Results and conclusions: No patient with Stage IVa achieved a complete response in the standard dose group, whereas a complete response was observed at a rate of 50% in the high dose group, and this can be explained by a higher plasma concentration of 5-FU. The circadian rhythm in the concentrations found at the standard dose was not observed for a higher dose.

Objective: The effects of replacing cisplatin (CDDP) with cis-diammineglycolatoplatinum (nedaplatin, NDP), a second-generation platinum complex, on the pharmacokinetics of 5-fluorouracil (5-FU) were investigated in Japanese patients with esophageal squamous cell carcinoma, who were treated with a definitive 5-FU/CDDP-based chemoradiotherapy. Methods: Fifty-six patients were enrolled, 49 treated with CDDP and 7 treated with NDP. A course consisted of continuous infusion of 5-FU at 400 mg/m2/day for days 1-5 and 8-12, infusion of CDDP or NDP at 40 mg/m2/day on days 1 and 8, and radiation at 2 Gy/day on days 1 to 5, 8 to 12, and 15 to 19, with a second course repeated after a 2-week interval. Plasma concentrations of 5-FU were determined by high performance liquid chromatography at 5 PM on days 3, 10, 38 and45, and at 5 AM on days 4, 11, 39 and 46. Results and conclusions: The circadian rhythm in plasma concentrations of 5-FU observed in the case of CDDP was altered when NDP was used instead. The clinical response can be predicted by monitoring plasma concentrations of 5-FU in the CDDP group, but not in the NDP group.

Recent developments in producing large single crystal CVD diamond plates are reviewed. The developments consist of synthesis of large single crystal diamond and production of single crystal diamond plates from the bulk diamond by the lift-off process. Combining these developments, half-inch single crystal CVD diamond plates have been successfully produced.

Objectives: FOLFIRI is one of the current standard first-line regimens for advanced colorectal cancer, but its administration is onerous. Because the replacement of 2-day-infusional 5-fluorouracil (5-FU) of FOLFIRI with oral tegafur-uracil/leucovorin (UFT/LV) would be highly beneficial for clinical management, we performed a phase I trial using oral UFT/LV and a pharmacokinetic evaluation. Methods: Treatment consisted of infusional irinotecan (100 mg/m 2 )/l-LV (15 mg/m 2 ) and a bolus injection of 5-FU (500 mg/m 2 ) on day 1, and oral UFT (300 mg as tegafur/m 2 /d)/LV (75 mg/d) on days 1-5 (level 1), days 1-7 (level 2), or days 1-10 (level 3). Cycles were repeated every 14 days. After determination of the recommended UFT/LV administration period, irinotecan was dose-escalated (level 4: 125 mg/m 2 ; level 5: 150 mg/m 2 ). Results: Nineteen patients were enrolled. One dose-limiting toxicity (DLT), grade 4 neutropenia lasting for ≥4 days was observed at level 2. At level 3, one DLT of treatment delay of ≥8 days occurred due to prolonged neutropenia, and 2 patients refused to continue the treatment because of prolonged grade 2 anorexia. Therefore, a 7-day administration of UFT/LV was recommended. No DLT was observed at levels 4 and 5. Pharmacokinetic evaluation suggested continuous exposure to 5-FU by means of oral UFT/LV administration in this combination. Conclusions: The recommended administration period was 7 days for oral UFT/LV, and the recommended dose of irinotecan was 150 mg/m 2 . A phase II study is ongoing to validate the clinical outcome.

Multiple P or S hot ion implantation to diamond substrates was performed at 800°C. Optical absorption spectra indicated that instantaneous annealing during hot ion implantation occurs. Temperature dependence of resistance demonstrated that a P as-implanted sample using a homoepitaxial diamond film substrate emerges a weak doping effect. Also on S implantation, a presence of a weak doping effect was observed in an as-implanted sample, but it was suggested that the dopant is not S itself but S and defect complex. However, post-implantation annealing resulted in high resistance of the samples and missing of such weak doping effects.

Background and Aim: Metallothionein (MT) has a proven relationship with various kinds of cancer and reduces tissue damage. Helicobacter pylori (H. pylori) infection is associated with the alteration of gastric epithelial cell cycle events, a condition implicated in the initiation and development of gastric cancer. This study investigates the role of MT in H. pylori-induced gastritis with or without early gastric cancer (ECG) and evaluates the effect on MT expression after eradication therapy. Methods: Gastric biopsy samples were immunohistochemically examined for MT expression in 36 H. pylori-negative patients without ECG and 98 positive patients with or without ECG. Real time polymerase chain reaction was performed in 14 antral biopsy samples with or without H. pylori. The severity of gastritis was also evaluated according to the updated Sydney System. In 31 successfully eradicated patients, the above assessment was repeated for two consecutive years. Results: MT expression was higher in H. pylori-negative patients than in positive patients (P

This study was conducted to evaluate the association between systemic exposure to 5-fluorouracil (5-FU) and genetic polymorphisms of vascular endothelial growth factor (VEGF) with clinical outcomes to a 5-FU/cisplatin-based chemoradiotherapy in Japanese patients with esophageal squamous cell carcinoma (ESCC). Forty-nine patients with ESCC (I/II/III/IVa = 11/9/17/7, with 5 postoperative recurrences) were enrolled into this study. One course of treatment consisted of protracted venous infusions of 5-FU (400 mg/m 2 /24 hr for day 1-5 and 8-12) and cisplatin (40 mg/m 2 /3 hr on day 1 and 8), and radiation (2 Gy/day on day 1-5, 8-12, and 15-19); a second course was repeated after a 2 week interval. A total of eight measurements of the plasma concentration of 5-FU were made per patient to evaluate its systemic exposure as area under the concentration time curve for 480 hours (AUC 480h ), and VEGF genotypes of T-1498C, G-1154A, C-634G, C-7T, C936T, and G1612A were evaluated. The mean value of AUC 480h in the patients with a complete response was 58.7 ± 16.8 mg*h/L, which was higher than that in the others, 49.0 ± 10.9 mg*h/L (P = 0.029), whereas no such association was found for severe acute toxicities. VEGF genotype was not associated with the clinical response, whereas VEGF G-1154A resulted in severe acute leukopenia (P = 0.042) and severe acute cheilitis (P = 0.025). In conclusion, VEGF G-1154A was a predictor of severe acute toxicities during 5-FU/cisplatin-based chemoradiotherapy in Japanese ESCC patients, whereas the AUC 480h value of 5-FU was predictive of the clinical response.

The association of disease stage and response with survival following treatment with 5-fluorouracil/cisplatin-based chemoradiotherapy (CRT) was evaluated in 51 Japanese patients with esophageal squamous cell carcinoma (ESCC).One course of treatment consisted of protracted venous infusions of 5-fluorouracil (400 mg/m2/24 h for days 1-5 and 8-citation=12)and cisplatin (40 mg/m2/3 h on day 1 and 8),and radiation (2 Gy/day on days 1-5,8-12 and 15-19),and a 2 nd course was given after a 2-week interval.The response was assessed about 4 weeks after the CRT by endoscopy,and chest and ab- dominal CT scans.The CR+PR rate was 80%,which was consistent with other institutions,and we confirmed that this CRT procedure was effective even for Stage III ESCC.The 2-year survival rate was 52%,which was comparable with or better than other institutions.Our results also showed that survival depended on the disease stage (p=0.027,Log-rank test).The response (CR or non-CR) was also associated with survival (p

This study was performed to find the genetic factors predictive of clinical outcome to a 5-fluorouracil (5-FU)/cisplatin (CDDP)-based chemoradiotherapy (CRT) in Japanese patients with locally advanced esophageal squamous cell carcinoma (ESCC).Thirty-one patients with stage I-IVa ESCC (I/II/III/IVa = 7/7/14/3) were enrolled in this study. One course of treatment consisted of protracted venous infusions (PVIs) of 5-FU (400 mg/m2/24 hours for days 1-5 and 8-12), CDDP (40 mg/m2/3 hours on days 1 and 8) and radiation (2 Gy/d on days 1-5, 8-12, and 15-19), and a 2nd course was successively repeated after a 2-week interval. A total of 8 measurements of the plasma concentration of 5-FU were made using high performance liquid chromatography. Genetic polymorphisms examined herein included those in the genes coding thymidylate synthase (TS), glutathione S-transferase P1 (GSTP1), multidrug resistant transporter MDR1/P-glycoprotein, and intercellular adhesion molecule-1, and in a circadian rhythm-relating gene, CLOCK.The CR rate depended on stage (P = 0.001), but the analysis was not sufficiently powered to reach a level of statistical significance for the 2-year survival rate (P = 0.061). For stage II/III patients, to have 2 or 3 polymorphisms of 3R/3R of 5'-TSER, a 6 bp of 3'-TSUTR, and GSTP1-Ile105Val resulted in an extensively longer survival (P = 0.020), although no difference was found between 2 groups, with respect to the plasma concentrations of 5-FU and clinicopathologic characteristics.The prognostic index may allow predictions of the clinical outcome of a 5-FU/CDDP-based CRT in stage II/III ESCC patients.

資料番号: SA8000081000

We present here a case report of a 69-year-old female patient with T granular lymphocyte proliferative disorder (T-GLPD) expressing the gamma/delta T-cell receptor. The patient had been treated for rheumatoid arthritis for 25 years, and presented with mild anaemia. Cell-surface marker analysis was carried out using flow cytometry and natural killer function was determined using a chromium release assay. The case report is followed by a summary of the 21 other gamma/delta T-GLPD cases reported in the literature and a comparison of their clinical characteristics with those of T-GLPD cases expressing the alpha/beta T-cell receptor. The clinical symptoms and the frequency of association with rheumatoid arthritis are similar in gamma/delta and alpha/beta T-GLPD, but a prevalence of the CD8- cell-surface marker and enhanced natural killer function appear to be characteristics of gamma/delta T-GLPD.

資料番号: AA0045916001

The chemical state of implanted Mg atoms has been studied in 2.48 ×1017 Mg+ ions cm-2-implanted silica glass by X-ray photoelectron spectroscopy. It was found that Mg atoms were coordinated with oxygen atoms, irrespective of the heat treatment at 900°C in an argon gas atmosphere. Mg ion implantation caused oxygen deficient species (SiOx) and increased the refractive index by about 5%. The oxygen deficient species and the refractive index change were stable against the heat treatment.

Background The development of rashes is the most common adverse event observed in cancer patients treated with epidermal growth factor receptor-targeted tyrosine kinase inhibitors (EGFR-TKI) such as erlotinib. A significant relationship exists between the severity of a rash and survival in various cancers. However, whether erlotinib becomes distributed to the skin and whether its concentration is higher in a rash than in normal skin of treated cancer patients remains unknown. Here, using quantitative mass spectrometry imaging (qMSI), we successfully visualized the distribution of erlotinib in rashes and normal skin of patients with advanced pancreatic cancer receiving this drug. Methods We studied five patients with advanced pancreatic cancer who developed rashes after treatment with gemcitabine (1000 mg/m² by intravenous infusion for 30 minutes on days 1, 8, and 15 every 4 weeks) and erlotinib (given orally at 100 mg/day). We biopsied both rashes and normal skin, and compared the distribution of erlotinib using matrix-assisted laser desorption ionization mass spectrometry imaging (MALDI-MSI). The plasma concentration of erlotinib was measured by liquid chromatography-tandem mass spectrometry (LC-MS/MS). Results Erlotinib concentrations in five patients were 2.55 ± 1.46 ng/mm3 in normal skin and 3.18 ± 1.53 ng/mm3 (mean ± SD) in rashes (p=0.123). In four out of five patients, the erlotinib concentration in rashes was higher than that in normal skin. The epidermis showed the strongest expression of EGFR in skin as judged by immunohistological staining. Erlotinib showed a greater tendency for distribution to the epidermis than subcutaneous tissue. There was no correlation between erlotinib plasma concentrations vs. concentrations in rashes or normal skin. Conclusions Using qMSI, we, for the first time, visualized the distribution of erlotinib in skin tissue of pancreatic cancer patients receiving erlotinib. We found a tendency for a higher concentration of erlotinib in rashes than in normal skin. A greater distribution of erlotinib to the epidermis than subcutaneous tissue suggests erlotinib may directly bind EGFR expressed in the epidermis. Citation Format: Meiko Nishimura, Hiroaki Aikawa, Mitsuhiro Hayashi, Yu Mizutani, Kei Takenaka, Yoshinori Imamura, Naoko Chayahara, Masanori Toyoda, Naomi Kiyota, Toru Mukohara, Akinobu Hamada, Hironobu Minami. Quantitative mass spectrometry imaging of erlotinib in skin rashes of cancer patients receiving erlotinib [abstract]. In: Proceedings of the American Association for Cancer Research Annual Meeting 2017; 2017 Apr 1-5; Washington, DC. Philadelphia (PA): AACR; Cancer Res 2017;77(13 Suppl):Abstract nr 2872. doi:10.1158/1538-7445.AM2017-2872

We previously established acquired resistant models for MET-tyrosine kinase inhibitors (TKIs) by continuously exposing the MET-amplified gastric cancer cell line MKN45 to MET-TKIs, PHA665752 (MKN45-PR), or GSK1363089 (MKN45-GR). We found resistant mechanisms caused by increased copy number of MET in both lines and Y1230H mutation in MKN45-PR. We also found that excessive MET signaling caused by these MET alterations resulted in intra-S-phase arrest in the absence of MET-TKIs, so that cells grew faster in the presence of MET-TKIs, a phenomenon referred to as “addiction.” In this study, to investigate reversibility of the acquired resistance and “addiction” to MET-TKIs and their causative MET alterations, we sequentially cultured MKN45-PR and MKN45-GR in decreasing concentrations of MET-TKIs until they were able to grow in a drug-free condition. These “revertant” cell lines (designated MKN45-PR-RE and MKN45-GR-RE) were comparatively analyzed. Growth assay showed that both MKN45-PR-RE and MKN45-GR-RE partially lost the property of “addiction” to MET-TKIs. MKN45-GR-RE lost the property of resistance to GSK1363089, but MKN45-PR-RE retained resistance to PHA665752. Copy numbers and expression and phosphorylation of MET protein reduced in both MKN45-PR-RE and MKN45-GR-RE compared with MKN45-PR and MKN45-GR, respectively, but Y1230H mutation and biochemical resistance to PHA665752 remained in MKN45-PR-RE. The “addiction” to MET-TKIs appeared attributable to increased copy number, and the property and the MET alteration were reversible. The Y1230H mutation appeared enough in itself to keep cells resistant to MET-TKIs and was irreversible.

Purpose Oxycodone is a µ-opioid receptor agonist widely used in the treatment of cancer pain. The predominant metabolic pathway of oxycodone is CYP3A4-mediated N-demethylation to noroxycodone, while a minor proportion undergoes 3-O-demethylation to oxymorphone by CYP2D6. The aim of this study was to investigate the effects of the mild CYP3A4 inhibitor aprepitant on the pharmacokinetics of orally administered controlled-release (CR) oxycodone. Method This study design was an open-label, single-sequence with two phases in cancer patients with pain who continued to be administered orally with multiple doses of CR oxycodone every 8 or 12 hours. Plasma concentration of oxycodone and its metabolites were measured up to 8 hours after administration as follows: on day 1, CR oxycodone was administered alone; on day 2, CR oxycodone was administered with aprepitant (125 mg, at the same time of oxycodone dosing in the morning). The steady-state trough concentrations (Css) were measured from day 1 to day 3. Results Aprepitant increased the area under the plasma concentration-time curve (AUC0–8) of oxycodone by 25% (p

We evaluated the potential of TYRO3 as a therapeutic target in various types of breast cancer cell lines.The effects of TYRO3-knockdown by small interfering RNA (siRNA) on proliferation, cell-cycle distribution, and cell signaling in four estrogen receptor (ER)-positive/HER2-non-amplified (luminal-type), two ER-negative/HER2-amplified (HER2-type), and two ER-negative/HER2-non-amplified (triple negative [TN]-type) cell lines were compared.Whereas TYRO3 knockdown induced the greatest proliferation suppression in luminal-type cells, and to a lesser extent in HER2-type cells, no proliferation inhibition was observed in TN-type cells. The TYRO3 siRNA-induced proliferation inhibition in luminal-type cells was observed in both estradiol (E2)-rich and -null conditions. The proliferation suppression was correlated with G0-G1/S cell-cycle arrest. Western blot analysis showed a decrease in phosphorylation of ERK1/2 or STAT3, and in cyclin D1 only in cell lines sensitive to TYRO3-knockdown.TYRO3 is a potential therapeutic target in breast cancer, particularly in luminal-type cells.

A novel carbonization process for 3C–SiC heteroepitaxial growth on Si (100) with mass-separated ion beams (e.g., C−, C2−, C+, and CH3+ ions) was carried out by in situ monitoring with reflection high-energy electron diffraction measurements. The kinetic energies of ions and substrate temperatures were in the range of E=10–700 eV and T= 400–700 °C, respectively. This ion-beam induced carbonization process was investigated as a function of various irradiation parameters; i.e., ion kinetic energy, substrate temperatures, charge and mass of ions, ion species, ion irradiation modes, etc. and was compared to conventional carbonization processes with thermal species; e.g., hydrocarbon gases. As a result, the use of energetic ion species allows successful carbonization and provides lower process temperatures by 150–600 °C, compared to the conventional processes reported previously. The mechanisms of carbonization reaction with energetic ions are compared to using thermal species.

Discrete track media were successfully fabricated by Cr ion implantation. The saturation magnetization of the CoCrPt-SiO2 perpendicular recording layer was decreased down to 6% by implanting Cr ions with a dosage of 1 × 1017 ions/cm and an ion energy of 20 keV. A resist mask with a discrete track pattern was prepared by e-beam lithography and the pattern was transferred to the recording layer by Cr ion implantation. A clear magnetic contrast of the tracks was observed and the average surface roughness was maintained less than 1 nm. A clear servo signal was obtained by spin-stand measurement using a flying head. Feasibility of discrete track media fabrication by Cr ion implantation was confirmed.

Thin optical protective coatings of boron nitride, ~1 µm thick, were deposited at low substrate temperature on polycarbonate (PC) and fused silica substrates by r.f. magnetron sputtering using a mixture of Ar + N2 as the sputtering gas. The structure and composition of the deposited layers were studied by Fourier transform infrared spectroscopy (FTIR) and Rutherford backscattering spectroscopy (RBS). The optical characterization of the coated sample was carried out by measuring the ultraviolet-visible transmittance at different wavelengths and the strength of adhesion of the deposited layers to the plastic substrate was analysed by a scratch test. The deposited layers grow with hexagonal structure, the resulting layers being nearly stoichiometric, and are highly transparent in the visible range on both substrates examined; the measured optical band-gap of the coating was 4.6±0.1 eV. The strength of adhesion to the polycarbonate was found to be dependent on the substrate pre-deposition treatment: ion etching of the PC surface before coating deposition gives rise to films with good adherence as a consequence of the formation of a mixed interface layer where C≡N chemical bonds were observed by FTIR.

The coordination structure of Cu atoms has been studied in Cu + -ion-implanted glasses and (O + + Cu + )-ion-implanted glasses at doses from 1 × 10 16 to 1 × 10 17 Cu + ions/cm 2 and from 5 × 10 15 to 5 × 10 16 O + ions/cm 2 . It was found that Cu atoms were present as Cu(I) and their coordination geometry depended on dose through the concentration of oxygen deficiency per silicon atom.

Carbon and carbon nitride (CN) films were prepared under ultrahigh vacuum condition by ion beam deposition using isotopically mass-separated, energetic (50–400 eV) negative 12C2− and 12C14N− ions, respectively. The optical properties as well as structures and chemical composition of the films have been characterized and discussed as a function of the kinetic energy of C2− and CN− ions. The structures of carbon and CN films in this study were hydrogen-free amorphous carbon (a-C) like. The N/C composition ratio of the CN films was N/C∼0.4, although the arrival ratio of N/C was N/C=1. The CN film properties depended weakly on kinetic energy of CN− ions, while on a-C films there were kinetic energy dependence of C2− ions of optical constant observed.

Performance of a micro WDX-PIXE system that consists of position sensitive x-ray spectrometer and the heavy ion microbeam line is described. The influence of the position resolution of the position sensitive proportional counter (PSPC) used in the spectrometer on system energy resolution is discussed based on the measured values for C and O K x-rays. The system has successfully been used for chemical state analysis of various compound materials and small area of the materials (< 3 × 10-3 mm 2) can be analyzed.

In Plasma Based Ion Implantation (PBII) using a titanium arc of DC 70 A with a pulse voltage of −10 to −40 kV/20 μs, titanium nitride (TiN) films were coated on a silicon substrate (p-type, (100)) and titanium ions were simultaneously implanted. XPS results indicate that the implanted layer is formed inside the silicon substrate. The thickness of the implanted layer remains constant regardless of the tilt angle of the substrate, whereas deposition thickness varies as the angle is changed. XRD patterns show that the crystal orientation of the film produced by PBII differs from that produced using DC bias. A pulse voltage of −20 to −40 kV with a nitrogen pressure of 0.27 Pa forms a film of strongly (200) preferred orientation, while a DC bias of −500 V (111) and (220) preferred orientation.

By using a titanium dc arc of 70 A with a pulse modulator with specifications of 60 kV/2.5 A/30 μs, titanium nitride (TiN) films were prepared on a silicon substrate (n-n+, [111], 400 μm in thickness) and titanium ions were simultaneously implanted by applying voltages of 20–50 kV of negative polarity to the substrate. The crystal orientation of the film produced by pulsed voltage application in plasma-based ion implantation (PBII) is different from that prepared by applying dc bias of −500 V. It is strongly (200) preferred orientation for PBII, while it is (111) and (220) preferred orientations for the dc bias. The film hardness increases with increasing pulse voltage, and the hardness for the application of −40 kV pulse is almost equal to that for the dc bias. Thus, the hardness maintains the same value while the crystal orientation differs from that for the dc bias.

Coordination state of gold atoms implanted in silica glass to an energy of 1.5 MeV and a dose of 1 × 1017 ions/cm2 has been studied by x-ray absorption fine structure spectroscopy. It was found that most of the gold atoms form gold clusters in which the nearest neighboring Au–Au interatomic distance is shorter by 0.05 °A than that in bulk gold. The contraction of Au–Au interatomic distance of gold clusters in silica glass is less than that reported in the previous studies on gold clusters within the other substrates. Gold atoms are coordinated by about four gold atoms in average. In addition, it was found that Au–O bonds are formed at the gold clusters/silica glass interface. It was deduced that the formation of Au–O bond at the gold clusters/silica glass interface depresses the contraction of Au–Au interatomic distance.

The chemical state and coordination state of copper ions have been studied in 2 MeV, 1 × 10 17 Cu + ions/cm 2 -implanted silica glass by X-ray absorption fine structure spectroscopy. It was found that the implanted Cu atoms are mainly present as Cu(I) state in the glass from the comparison of X-ray absorption near edge structure spectrum of the glass with those of CuO, Cu 2 O, CuAlO 2 , CuFeO 2 , Ca 2 CuO 3 and MgCu 2 O 3 crystals. We inferred from the extended X-ray absorption fine structure spectra that the implanted Cu atoms are coordinated by two oxygen atoms and the Cu–O interatomic distance is 0.188 nm in the glass.

We have carried out preliminary studies of a plasma-based ion implantation technique which utilizes a vacuum arc produced metal plasma. Depth profiles of titanium implanted into silicon have been analysed by XPS and RBS. Titanium concentration in the silicon substrate increased proportionally to the repetition frequency. As the applied pulse voltage increased, the depth of titanium implantation increased. The titanium was found to a depth of up to 1.0×10 18 atoms cm −2 in the silicon substrate, and the dose was estimated to be about 10 16 ~ 10 17 cm −2 . A mixed layer of titanium and silicon was produced. RBS analysis indicated a possibility for titanium and silicon in the mixed layer to form a silicide structure upon heating of the substrate.

The microstructure of electrically conducting and transparent titanium nitride (TiN) films, produced by the dynamic ion beam mixing technique, have been studied. These films consist of small grains of TiN and an amorphous layer. The film is continuous and does not react with the substrate. This paper discusses the morphology and properties of TiN films and their nucleation process.