151. Reversible and Precisely Controllable p/n‐Type Doping of MoTe 2 Transistors through Electrothermal Doping
- Author
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Keiji Ueno, Wen-Bin Jian, Yen-Fu Lin, Kazuhito Tsukagoshi, Yuan-Ming Chang, Shih-Hsien Yang, Yuen Wuu Suen, Che Yi Lin, Chenhsin Lien, and Chang Hung Chen
- Subjects
Materials science ,chemistry.chemical_element ,02 engineering and technology ,010402 general chemistry ,01 natural sciences ,law.invention ,Condensed Matter::Materials Science ,Computer Science::Emerging Technologies ,law ,Condensed Matter::Superconductivity ,General Materials Science ,Electronics ,Electronic circuit ,Dopant ,business.industry ,Mechanical Engineering ,Doping ,Transistor ,021001 nanoscience & nanotechnology ,0104 chemical sciences ,chemistry ,Mechanics of Materials ,Logic gate ,Optoelectronics ,Condensed Matter::Strongly Correlated Electrons ,Vacuum chamber ,0210 nano-technology ,business ,Tellurium - Abstract
Precisely controllable and reversible p/n-type electronic doping of molybdenum ditelluride (MoTe2 ) transistors is achieved by electrothermal doping (E-doping) processes. E-doping includes electrothermal annealing induced by an electric field in a vacuum chamber, which results in electron (n-type) doping and exposure to air, which induces hole (p-type) doping. The doping arises from the interaction between oxygen molecules or water vapor and defects of tellurium at the MoTe2 surface, and allows the accurate manipulation of p/n-type electrical doping of MoTe2 transistors. Because no dopant or special gas is used in the E-doping processes of MoTe2 , E-doping is a simple and efficient method. Moreover, through exact manipulation of p/n-type doping of MoTe2 transistors, quasi-complementary metal oxide semiconductor adaptive logic circuits, such as an inverter, not or gate, and not and gate, are successfully fabricated. The simple method, E-doping, adopted in obtaining p/n-type doping of MoTe2 transistors undoubtedly has provided an approach to create the electronic devices with desired performance.
- Published
- 2018
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