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54. Stable pull-in electrodes for narrow gap actuation

Author

Ng, Eldwin J., primary, Yang, Yushi, additional, Hong, Vu A., additional, Ahn, Chae Hyuck, additional, Christensen, David L., additional, Gibson, Brian A., additional, Qalandar, Kamala R., additional, Turner, Kimberly L., additional, and Kenny, Thomas W., additional

Published
2014
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62. Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application.

Author

Bo Woon Soon, Ng, Eldwin J., Hong, Vu A., Yushi Yang, Chae Hyuck Ahn, You Qian, Kenny, Thomas W., and Chengkuo Lee

Subjects
*MICROFABRICATION, *CURVED beams, *ELECTRODES, *ACTUATORS, *CONTACT resistance (Materials science)
Abstract

A vacuum-encapsulated silicon switch with a curved electrode is characterized for operation in harsh environments. An ultraclean vacuum encapsulation process (episeal) seals the switch after release, providing a pristine operating environment for switching operations. In these devices, the curved beam of the actuator enhances the overdrive voltage tolerance to be more than 100 V. The ON/OFF cycle tests were carried out up to 105 cycles at room temperature, and at least 104 cycles under an elevated temperature of 300°C. Throughout the 300°C tests, an average contact resistance of ~ 28 kΩ is measured, demonstrating the stability of the contact. Finally, high speed pulse I-V monitoring unit was used to observe 13-μs switching speed. [ABSTRACT FROM AUTHOR]

Published
2014
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