51. Latent Reliability Degradation of Ultrathin Amorphous HfO2 Dielectric After Heavy Ion Irradiation: The Impact of Nano-Crystallization
- Author
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Z. F. Li, Shengxia Zhang, Jian Zeng, Pengfei Zhai, Jie Liu, Tianqi Liu, Peipei Hu, Lijun Xu, Zhenxing Zhang, Jinshun Bi, and Youmei Sun
- Subjects
010302 applied physics ,Materials science ,Analytical chemistry ,Dielectric ,Microstructure ,01 natural sciences ,Electronic, Optical and Magnetic Materials ,Amorphous solid ,Ion ,law.invention ,Condensed Matter::Materials Science ,law ,Phase (matter) ,0103 physical sciences ,Nano ,Irradiation ,Electrical and Electronic Engineering ,Crystallization - Abstract
The reliability degradation of HfO2-based devices under heavy ion irradiation is still an open question. In this letter, the ultrathin amorphous HfO2 gate stacks were irradiated by different types of swift heavy ions (SHIs). The fine structure of latent track in amorphous HfO2 is crystalline phase along the particle trajectory. The effects of latent track on the electrical properties were characterized by the high frequency capacitance-voltage (C-V) and the leakage current density-voltage (J-V) measurements. The quantitative relationship between microstructure changes and electrical properties provides a new method to estimate the threshold of the electronic energy loss ( ${(}\textit {dE}/\textit {dx}{)}_{\textsf {e}}$ ) for crystallization and allows for prediction of device sensitivity to SHIs irradiation.
- Published
- 2019
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