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1. 33 nm wavelength tuning of a 1550 nm VCSEL in CW operation based on the liquid crystal micro-cells technology

Author

Laurent Dupont, Véronique Bardinal, Mehdi Alouini, Jean Baptiste Doucet, Benjamin Boisnard, Sophie Bouchoule, Christophe Levallois, Nicolas Chevalier, Thierry Camps, Karine Tavernier, Cyril Paranthoen, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)

Subjects
photodetection, Liquid crystal devices, Materials science, business.industry, Photodetection, semiconductor lasers, VCSEL, Vertical-cavity surface-emitting laser, Semiconductor laser theory, Wavelength, Liquid crystal, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, tunable, liquid crystal devices, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business
Abstract

International audience; We present CW operation of a tunable InP based Vertical Cavity Surface Emitting Laser, integrating a liquid crystal (LC) micro-cell. In comparison with previous work, a larger 33 nm (vs 23 nm) tuning and stable operation are obtained, according to major improvements presented in this paper.

Published
2021

2. Anisotropic Transverse Confinement Design for Electrically Pumped 850 nm VCSELs Tuned by an Intra Cavity Liquid-Crystal Cell

Author

Francesco Bertazzi, Benjamin Boisnard, Thierry Camps, Jean-Baptiste Doucet, Benjamin Reig, Véronique Bardinal, Andrea Simaz, Alberto Tibaldi, Pierluigi Debernardi, Michele Goano, CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Department of Electronics and Telecommunications [Torino] (DET), Politecnico di Torino = Polytechnic of Turin (Polito), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
Materials science, Multiphysics, Physics::Optics, Optical power, 02 engineering and technology, semiconductor lasers, Grating, 01 natural sciences, 7. Clean energy, law.invention, Vertical-cavity surface-emitting laser, Semiconductor laser theory, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, Liquid crystal, law, 0103 physical sciences, Vertical cavity surface emitting lasers, liquid crystal devices, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, 021001 nanoscience & nanotechnology, Laser, simulation, Atomic and Molecular Physics, and Optics, [SPI.TRON]Engineering Sciences [physics]/Electronics, Transverse plane, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Liquid crystal devices, Semiconductor lasers, Simulation, 0210 nano-technology, business
Abstract

International audience; Relying on preliminary experiments, in this work we design a tunable 850 nm laser based on a hybrid combination of a liquid crystal micro-cell with nanoimprinted grating and an electrically-pumped GaAs half-VCSEL. The optical design is challenging due to the inherent tolerances of this hybrid technology, the presence of metals in the cavity and the need for single fundamental extraordinary mode emission over the whole tuning range. To ensure proper operation, we introduce for the first time the new concept of anisotropic transverse confinement design. The overall performance is verified by our multiphysics VCSEL suite. Beyond tuning features, we predict side mode suppression ratio and optical power under all working conditions, comparing the performance of liquid crystals with different clearing temperatures. The results qualifies these lasers as viable tunable sources with interesting performance and complementary features compared to other technologies.

Published
2021

3. CW Operation of a Tunable 1550-nm VCSEL Integrating Liquid-Crystal Microcells

Author

Cyril Paranthoen, S. Pes, Pierluigi Debernardi, Thierry Camps, Véronique Bardinal, K. Tavernier, Sophie Bouchoule, Christophe Levallois, Laurent Dupont, Benjamin Boisnard, B. Sadani, Mehdi Alouini, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Direction Générale de l’Armement (DGA), French National Research Agency (ANR), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), and Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR)

Subjects
Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optical pumping, 020210 optoelectronics & photonics, Liquid crystal, law, 0202 electrical engineering, electronic engineering, information engineering, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, Birefringence, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Vertical-cavity surface-emitting lasers, Liquid crystal devices, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, business, Lasing threshold, Refractive index
Abstract

International audience; An InP-based Vertical-Cavity Surface-Emitting 1 Laser (VCSEL) with a liquid crystal (LC) microcell monolithically integrated on its surface for spectral tuning is investigated. Unlike tunable VCSELs integrating a movable membrane, here the physical length of the cavity remains unchanged and only the voltage applied on the LC ensures a refractive index modification for a particular polarization emitted by the VCSEL. This tunable VCSEL operates in CW at room temperature and exhibits more than 23 nm wavelength tuning around 1.55 µm at a maximum applied voltage of 20 V. The measured laser threshold around 6.5 mW is still comparable to VCSEL without LC microcell, a clear indication that the optical losses related to the LC are very low. On the other hand, for this first optically pumped device, the lasing characteristics suggest that the LC birefringence is lower than expected. To assess this hypothesis, thermo-optical simulations have been conducted.

Published
2020

4. Thermal Characterization of the Birefringence of Nematic Liquid Crystals for the Design of Widely-tunable LC-VCSELs

Author

Jean-Baptiste Doucet, Alberto Tibaldi, Thierry Camps, Pierluigi Debernardi, Véronique Bardinal, Andrea Simaz, Benjamin Boisnard, B. Reig, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Politecnico di Torino = Polytechnic of Turin (Polito), Université Toulouse III - Paul Sabatier (UT3), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Birefringence, Materials science, business.industry, 02 engineering and technology, 01 natural sciences, Reflectivity, Spectral line, [SPI.MAT]Engineering Sciences [physics]/Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Vertical-cavity surface-emitting laser, Characterization (materials science), 010309 optics, 020210 optoelectronics & photonics, Operating temperature, Liquid crystal, 0103 physical sciences, Thermal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, 0202 electrical engineering, electronic engineering, information engineering, Optoelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business
Abstract

International audience; In this work, the thermo-optical properties of nematic liquid crystals are investigated through localized reflectance spectra measurements performed on a tunable LC-filter. The final aim is to insert such LC in the cavity of a tunable VCSEL device, in which local self-heating due to optical or electrical pumping must be taken into account. We demonstrate that, whereas standard LC E7 is not suited for real device operation, the maximal operating temperature of QYDPLC-36 LC is 95°C, with a birefringence at 1.55 μm higher than 0.18 at 60°C.

Published
2020

5. Optical Design Issues in Electrically Pumped Tunable Liquid-Crystal VCSELs

Author

Jean-Baptiste Doucet, Alberto Tibaldi, B. Reig, Véronique Bardinal, Francesco Bertazzi, Michele Goano, Thierry Camps, Benjamin Boisnard, Andrea Simaz, Pierluigi Debernardi, Politecnico di Torino = Polytechnic of Turin (Polito), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse III - Paul Sabatier (UT3), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Liquid crystal devices, Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 03 medical and health sciences, 020210 optoelectronics & photonics, 0302 clinical medicine, Optical coherence tomography, Liquid crystal, law, Vertical cavity surface emitting lasers, Liquid crystal devices, Semiconductor lasers, Simulation, Vertical cavity surface emitting lasers, 0202 electrical engineering, electronic engineering, information engineering, medicine, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, medicine.diagnostic_test, business.industry, Solver, Laser, [SPI.TRON]Engineering Sciences [physics]/Electronics, 030221 ophthalmology & optometry, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, Lasing threshold, Simulation
Abstract

International audience; In this work we investigate a tunable 850nm laser based on a hybrid combination of a liquid crystal micro-cell and a half GaAs VCSEL. The target application is optical coherence tomography. The inherent tolerances of the hybrid technology, the presence of metals in the cavity and the need for a pure extraordinary mode lasing make challenging the optical design of this laser. Hence, VELM, a full 3D and vectorial VCSEL optical solver, is utilized to understand loss mechanisms and provide an optimized design.

Published
2020

6. Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Author

Jean-Baptiste Doucet, Benjamin Reig, Yu Zhao, Qingyue Li, Julien Perchoux, Fabien Mesnilgrente, Véronique Bardinal, Clément Tronche, Pierre-François Calmon, Thierry Camps, Beijing University of Technology, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Service Instrumentation Conception Caractérisation (LAAS-I2C), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Equipe Capteurs optiques et systèmes intégrés intelligents (LAAS-OASIS), Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, laser beam shaping, Microfluidics, microfluidic, 02 engineering and technology, 01 natural sciences, VCSEL, Collimated light, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Vertical-cavity surface-emitting laser, doppler, 010309 optics, law, 0103 physical sciences, General Materials Science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, laser sensing, Fluid Flow and Transfer Processes, micro-nano, business.industry, Process Chemistry and Technology, General Engineering, 021001 nanoscience & nanotechnology, Laser, Chip, [SPI.TRON]Engineering Sciences [physics]/Electronics, Computer Science Applications, Lens (optics), Interferometry, Resist, technology, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, integrated microoptics, 0210 nano-technology, business
Abstract

Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 &micro, m &times, 200 &micro, 150 &micro, m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.

Published
2019
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7. InP-based devices integrating liquid crystals microcells for a tunable laser emission or a wavelength selective photodetection

Author

B. Sadani, Laurent Dupont, Sophie Bouchoule, Cyril Paranthoen, Thierry Camps, Mehdi Alouini, Benjamin Boisnard, Christophe Levallois, Véronique Bardinal, S. Pes, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Centre de Nanosciences et Nanotechnologies (C2N (UMR_9001)), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and IMT Atlantique (IMT Atlantique)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Optical communication, Photodetection, 7. Clean energy, Vertical-cavity surface-emitting laser, Photodiode, law.invention, Wavelength, law, Liquid crystal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Photonics, business, Tunable laser
Abstract

International audience; Photonic devices with wavelength tuning capabilities are investigated with the use of liquid crystal microcells monolithically integrated onto the surfaces of photodiodes or VCSEL fabricated on InP based materials. For these two devices, we demonstrated that the detected or emitted wavelength can be selected on a tuning range of more than 70 nm in the case of the photodiode, and of more than 20 nm in the case of VCSEL.

Published
2019

8. Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices

Author

Jean-Baptiste Doucet, Laurent Dupont, Christophe Levallois, B. Sadani, Emmanuelle Daran, Véronique Bardinal, Cyril Paranthoen, Sophie Bouchoule, B. Boisnard, X. Lafosse, Thierry Camps, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), ANR-15-CE19-0012 DOCT VCSEL, Agence Nationale de la Recherche, ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS)-Université de Rennes 1 (UR1), and Université de Rennes (UNIV-RENNES)

Subjects
dry thick resist, Materials science, Fabrication, 02 engineering and technology, Grating, nanoimprint, film, 01 natural sciences, VCSEL, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, 020210 optoelectronics & photonics, grating, law, 0103 physical sciences, soft transfer, 0202 electrical engineering, electronic engineering, information engineering, Wafer, liquid crystal devices, Electrical and Electronic Engineering, tunable optical filter, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Resist, Optical cavity, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, wafer-scale fabrication, Photonics, business
Abstract

A simple technology is demonstrated for the wafer-scale fabrication of liquid-crystal (LC) microcells that can be integrated in active optoelectronic devices. Fabrication of 1.55- $\mu \text{m}$ tunable Fabry–Perot optical micro-filter arrays is achieved owing to the insertion of a single nanoimprinted polymer grating dedicated to LC alignment and to the soft thermal transfer of a dry thick resist film between two highly reflective mirrors. The filter exhibits a spectral tuning range of 102 nm with only 18 V applied, as well as negligible internal loss, which makes it suitable for being inserted in a laser cavity. This constitutes a key step toward the large-scale integration of widely tunable photonic devices such as vertical-cavity surface-emitting lasers using LC technology.

Published
2018

9. Lateral Waveguiding Properties of VCSELs for Integrated Optical Monitoring

Author

C. Amat, Chantal Fontaine, Guilhem Almuneau, Véronique Bardinal, Emmanuelle Daran, Charlotte Bringer, Thierry Camps, and M. Suleiman

Subjects
Materials science, business.industry, Physics::Optics, Optical power, Laser, Waveguide (optics), Signal, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, Optics, Transmission (telecommunications), law, Optoelectronics, Spontaneous emission, Electrical and Electronic Engineering, business
Abstract

We have investigated experimentally the optical behaviour of a Vertical-Cavity Surface-Emitting Lasers (VCSEL) when it is used as a lateral waveguide. This provides a better understanding of the mechanisms involved in VCSEL optical power monitoring by integrated lateral detection. The lateral optical spectra as well as the waveguide transmission spectrum have been measured. Their analysis and comparison demonstrate that the lateral signal is mostly coming from the spontaneous emission escaping laterally from the VCSEL and that light is filtered during the propagation and detection processes. This allows us to explain previous results obtained in two different configurations of lateral detection. These results are useful to optimize the lateral detection performances for concrete applications in monitoring or telemetry systems.

Published
2006

10. Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping

Author

Jean-Baptiste Doucet, Sami Abada, Véronique Bardinal, Benjamin Reig, Thierry Camps, Emmanuelle Daran, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), RENATECH (French Network of Major Technology Centers) within LAAS-CNRS for technological support and Region Midi-Pyrénées (FIAB SU-8 project), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Fabrication, Materials science, polymer, 02 engineering and technology, VCSEL, law.invention, Vertical-cavity surface-emitting laser, [SPI.MAT]Engineering Sciences [physics]/Materials, 020210 optoelectronics & photonics, collective fabrication, law, Microsystem, self-alignment, 0202 electrical engineering, electronic engineering, information engineering, Micro-Opto-Electro-Mechanical Systems, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, microlens fabrication, Microelectromechanical systems, Multi-mode optical fiber, business.industry, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Lens (optics), MOEMS, MEMS, microoptics, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, electro-thermal actuation
Abstract

In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III–V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.

Published
2014

11. 3D optimization of a polymer MOEMS for active focusing of VCSEL beam

Author

Jean-Baptiste Doucet, Thierry Camps, Emmanuelle Daran, Benjamin Reig, S. Abada, and Véronique Bardinal

Subjects
Microlens, Optics, Materials science, Thermal conductivity, business.industry, Multiphysics, Joule effect, Optoelectronics, Vertical displacement, business, Actuator, Beam (structure), Vertical-cavity surface-emitting laser
Abstract

We report on the optimized design of a polymer-based actuator that can be directly integrated on a VCSEL for vertical beam scanning. Its operation principle is based on the vertical displacement of a SU-8 membrane including a polymer microlens. Under an applied thermal gradient, the membrane is shifted vertically due to thermal expansion in the actuation arms induced by Joule effect. This leads to a modification of microlens position and thus to a vertical scan of the laser beam. Membrane vertical displacements as high as 8μm for only 3V applied were recently experimentally obtained. To explain these performances, we developed a comprehensive tri-dimensional thermo-mechanical model that takes into account SU-8 material properties and precise MOEMS geometry. Out-of-plane mechanical coefficients and thermal conductivity were thus integrated in our 3D model (COMSOL Multiphysics). Vertical displacements extracted from these data for different actuation powers were successfully compared to experimental values, validating this modelling tool. Thereby, it was exploited to increase MOEMS electrothermal performance by a factor higher than 5.

Published
2014

12. Spontaneous emission and lateral photo-detection in 'vertical' micro-cavities

Author

Thierry Camps, Emmanuelle Daran, Véronique Bardinal, and Yann G. Boucher

Subjects
Physics, business.industry, Physics::Optics, General Physics and Astronomy, Micro cavities, Laser, law.invention, Vertical-cavity surface-emitting laser, Transverse plane, law, Optoelectronics, Spontaneous emission, Atomic physics, business
Abstract

Transverse guiding mechanisms enable one to monitor the laser behaviour of a VCSEL by measuring the photo-current in the neighbouring cavity. They are described by extended (3 x 3) transfer matrices including sources of spontaneous emission.

Published
2007

13. Miniaturized Scanning Near-Field Microscope Sensor Based on Optical Feedback Inside a Single-Mode Oxide-Confined Vertical-Cavity Surface-Emitting Laser

Author

Thierry Camps, P. Dubreuil, Jean-Baptiste Doucet, Christophe Gorecki, Charlotte Bringer, Chantal Fontaine, Véronique Bardinal, and Dominique Heinis

Subjects
Optical amplifier, Distributed feedback laser, Materials science, Microscope, Physics and Astronomy (miscellaneous), business.industry, General Engineering, Single-mode optical fiber, Physics::Optics, General Physics and Astronomy, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optical cavity, Optoelectronics, Near-field scanning optical microscope, business
Abstract

We propose and demonstrate an original concept of a near-field sensor using the optical feedback properties of a vertical cavity surface-emitting laser (VCSEL) as the detection principle. This is based on the monitoring perturbation induced in the laser cavity by the backscattered light coming from the specimen. Test images confirm the efficiency of the proposed scanning near-field optical microscopy (SNOM) and a solution for the integration of the proposed architecture is given.

Published
2003

14. A miniaturized VCSEL-based system for optical sensing in a microfluidic channel

Author

Véronique Bardinal, Emmanuelle Daran, Benjamin Reig, Jean-Baptiste Doucet, and Thierry Camps

Subjects
Microlens, Fabrication, Materials science, business.industry, Microfluidics, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optoelectronics, Micro-Opto-Electro-Mechanical Systems, business, Biosensor, Microfabrication
Abstract

We report on design and fabrication of a VCSEL-based Micro-Optical-Electrical-Mechanical-System (MOEMS) suited for portable optical biosensors. It is based on a tunable polymer microlens directly integrated on the surface of the VCSEL laser device. We demonstrate that this method leads to a VCSEL focusing at a working distance of ∼300μm suitable for optical analysis in a microfluidic channel. Moreover, as the microlens can be vertically moved up to 8μm with an applied power of only 43 mW (3V), a dynamic scan of the laser spot is possible over 100μm. This integrated approach opens new insights for the use of VCSEL arrays in miniaturized optical sensors.

Published
2012

15. Photo-chemical study and optical properties of microtips self- written on vertical laser diodes using NIR photo-polymerization

Author

Olivier Soppera, Thierry Camps, Ihab Dika, D. Barat, Jean-Baptiste Doucet, Jean-Pierre Malval, Aurélien Bruyant, Pierluigi Debernardi, M. Renault, Emmanuelle Daran, Véronique Bardinal, Beatriu Reig, Anna Rumyantseva, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Fabrication, Materials science, Optical fiber, Infrared Rays, Polymers, Surface Properties, High numerical aperture optics, Physics::Optics, Context (language use), 02 engineering and technology, 01 natural sciences, law.invention, Vertical-cavity surface-emitting laser, Molecular Imprinting, Optics, law, 0103 physical sciences, Vertical cavity surface emitting lasers, Wafer, Optical feedback, Diode, 010302 applied physics, business.industry, Single-mode optical fiber, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Refractometry, Scanning probe microscopy, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Lasers, Semiconductor, 0210 nano-technology, business, Scanning electron microscopy, Diode lasers
Abstract

International audience; Near infra-red (NIR) self-guided photo-polymerization is investigated in the context of micro-optics photo-fabrication on VCSELs (Vertical-Cavity Surface Emitting Lasers). We present the optimized process we have developed to allow for a collective fabrication on III-V devices wafers under real-time optical monitoring. The influence of photo-chemical parameters on final micro-elements dimensions is studied for two types of single mode 760nm VCSELs. The difference of the resulting tip shape between the two lasers is due to the strong differences of their emissions, as they are nicely reproduced by the computed near-field profiles. The tip shapes are also compared to those produced by the light emitted by an optical fiber and differences with VCSEL tips are discussed. Also the VCSEL characteristics with fabricated tips are discussed and found in good agreement with optical modeling.

Published
2012

16. Polymer tunable microlens arrays suitable for VCSEL beam control

Author

Thierry Camps, Christophe Levallois, Véronique Bardinal, Jean-Baptiste Doucet, Jérôme Launay, Emmanuelle Daran, Benjamin Reig, David Bourrier, Yann G. Boucher, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Rennes (UR)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Fabrication, polymer, 02 engineering and technology, 01 natural sciences, VCSEL, law.invention, Vertical-cavity surface-emitting laser, Optics, ABCD formalism, law, 0103 physical sciences, tunable lens, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010302 applied physics, Ray transfer matrix analysis, Microlens, business.industry, 021001 nanoscience & nanotechnology, Laser, SU-8, Lens (optics), micro-optics, MOEMS, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, wafer-scale integration, Refractive index
Abstract

We report on a simple method for the collective fabrication of polymer tunable microlens arrays suitable for VCSEL active beam shaping. Its principle is based on a SU-8 suspended membrane, surmounted by a polymer microlens, and thermally actuated to achieve a vertical displacement of lens plane. SU-8 resist presents many advantages for MOEMS fabrication, as this resist allows for high aspect ratio patterns and high transparency. In addition, it exhibits a thermal expansion coefficient suitable for thermal actuation. Moreover, this kind of polymer MOEMS can be fabricated on VCSEL arrays with footprints as low as 5 00x500µm² enabling a rapid, low co st and wafer-scale integration technology. We have successfully fabricated this MOEMS on a glass substrate by means of a SU-8 double exposure method and we report on a vertical di splacement of 8µm under an applied power of 43mW (3V). A good agreement with the theoretical thermo-mechanical behavi or is found. Moreover, optical measurem ents of microlens focus displacement under actuation are presented. We evaluate analytically the focus properties of the system under coherent laser illumination, using the classical ABCD matrix formalism of Gaussian transformation optics. The same approach enables one to assess its tolerance to opto-geometrical parameters, such as refractive index or dioptre curvature. As a wide range of initial gaps between the membrane and the substrate can be chosen, this MOEMS technology opens new insights for dynamic control of VCSEL beam or for tunable VCSELs fabrication. Keywords: VCSEL, micro-optics, tunable lens, polymer, SU-8, MOEMS, wafer-scale integration, ABCD formalism

Published
2012

17. VCSEL beam control with collective and self-aligned polymer technologies

Author

Thierry Camps, Emmanuelle Daran, Jean-Baptiste Doucet, Benjamin Reig, Olivier Soppera, Véronique Bardinal, Pierluigi Debernardi, and D. Barat

Subjects
Microelectromechanical systems, Microlens, Fabrication, Materials science, business.industry, Single-mode optical fiber, Laser, law.invention, Vertical-cavity surface-emitting laser, Lens (optics), Optics, law, Optical cavity, Optoelectronics, business
Abstract

We present recent results on the integration of polymer microlenses on single mode Vertical-Cavity Surface-Emitting Lasers (VCSELs) to achieve output beam control. We describe in particular low cost and collective fabrication methods developed to allow for a self-alignment of the lens with the laser source. These approaches are based either on surface tension effects or on a self-writing process using novel Near Infra-Red (NIR) photopolymers. Results on beam collimation at 850nm are presented and compared to a fully vectorial and three-dimensional optical model that takes into account the complete geometry of laser resonator is used. Results on short distance focusing using self-aligned microtips are presented. Considerations to achieve an active beam control by means of polymer-based MEMS (Micro-electro-mechanical System) are also discussed. Potential applications may concern the improvement of VCSEL insertion in optical interconnects or sensing systems, as well as the fabrication of optical micro-probes for near-field microscopy.

Published
2012

18. Polymer MEMS for the active control of VCSEL beam

Author

Thierry Camps, Jean-Baptiste Doucet, Véronique Bardinal, Emmanuelle Daran, Beatriu Reig, and D. Barat

Subjects
Microlens, Microelectromechanical systems, Materials science, business.industry, Physics::Optics, Laser, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optics, law, Physics::Accelerator Physics, Optoelectronics, Vertical displacement, business, Actuator, Beam (structure)
Abstract

Beam control of VCSELs (Vertical Cavity Surface Emitting Lasers) is a key topic to integrate these laser diodes in microsystems for instrumentation or biomedical application [1]. We report here on a simple method to control dynamically the beam shape of VCSELs devices. Our approach is based on an electro-thermal actuator including a polymer membrane, a heating electrode and a polymer microlens (fig.1 a). The operation principle is the following: the laser beam waist position can be tune thanks to the membrane vertical displacement induced by varying the applied current. Optical and thermo-mechanical optimizations of membrane geometry have been carried out. These studies point out that a vertical deflection of 2µm should be obtained with a thermal gradient of 100°C [2], leading to a corresponding waist displacement of few hundred microns.

Published
2011

19. Design of active lens for VCSEL collimation

Author

David Bourrier, Corinne Vergnenègre, Emmanuelle Daran, Thierry Camps, B. Reig, and Véronique Bardinal

Subjects
Microlens, Materials science, business.industry, Physics::Optics, Collimated light, Displacement (vector), Vertical-cavity surface-emitting laser, Semiconductor laser theory, law.invention, Lens (optics), Optics, law, Optoelectronics, Actuator, business, Beam (structure)
Abstract

Active control of VCSELs beam properties is a key issue to improve their integration in microsystems. We have designed a micro-optical system that allows for a dynamic displacement of the VCSEL beam. It consists of a polymer microlens associated to a SU-8 membrane vertically moved by means of a thermal actuator. This approach is suitable with laser sources arrays. We present results on optical design demonstrating that a small deflection of the membrane (2μm) could lead to a large displacement of the beam waist vertical position (in the millimetric range). Thermomechanical modelling is performed to evaluate the maximum membrane displacement achievable with this system. Finally, first feasibility results are presented.

Published
2010

20. Micro-optics on VCSELs using NIR photopolymers

Author

Thierry Camps, Colette Turck, Emmanuelle Daran, Véronique Bardinal, D. Barat, Jean-Pierre Malval, Daniel Lougnot, Benjamin Reig, Jean-Baptiste Doucet, Olivier Soppera, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Composants à Nanostructure pour le moyen infrarouge (NANOMIR), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Photomatériaux pour l'Optique et les Nanotechnologies (PHOTON LRC 7228), and Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))

Subjects
Materials science, Fabrication, business.industry, Optical communication, Physics::Optics, [CHIM.MATE]Chemical Sciences/Material chemistry, Laser, law.invention, Vertical-cavity surface-emitting laser, Semiconductor laser theory, Lens (optics), Optics, [CHIM.POLY]Chemical Sciences/Polymers, law, Optoelectronics, Photolithography, Photonics, business, ComputingMilieux_MISCELLANEOUS
Abstract

Laser beam shaping is a key issue for the photonic integration of VCSEL sources. Most of the techniques proposed to integrate micro-optics elements onto VCSEL devices imply either a hybrid assembly or a photolithography step, whose precision limits the accuracy of lens alignment relatively to the VCSEL source. We present here a new method for self-fabrication of microtips on Vertical-Cavity Surface-Emitting Lasers (VCSELs) by means of Near Infra- Red (NIR) photo-polymerization. This approach is based on a single fabrication step, implementing novel photopolymers sensitive at the lasing wavelength. Consequently the process is triggered by the laser source itself and can be applied easily to VCSEL devices during their electro-optic characterization. The method we have developed for tips fabrication is detailed as well as corresponding optical properties. The applications of this new and simple method concern laser light focusing and collimation for integrated micro-systems, coupling to fibers for optical communications as well as novel micro-probes fabrication for near-field optical microscopy.

Published
2010

21. VCSEL collimation using self-aligned integrated polymer microlenses

Author

Thierry Leichle, Emmanuelle Daran, Thierry Camps, Christophe Levallois, Corinne Vergnenègre, Jean-Baptiste Doucet, Véronique Bardinal, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université de Toulouse (UT)

Subjects
Materials science, Fabrication, semiconductor laser arrays, optical design techniques, 02 engineering and technology, optical fabrication, Photoresist, 01 natural sciences, surface topography measurement, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, 010309 optics, surface emitting lasers, 020210 optoelectronics & photonics, Optics, microlenses, law, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, laser cavity resonators, optical collimators, micromechanical devices, Microlens, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], optical polymers, business.industry, laser beams, Laser, Lens (optics), integrated optics, photoresists, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Photolithography, business
Abstract

International audience; We report on the design and fabrication of polymer microlenses fabricated on patterned SU-8 layers in view of integrating microlenses on VCSEL arrays for laser beam shaping. For a standard top-emitting VCSEL, the lens has to be fabricated on a thick intermediate layer (pedestal) whose optimal thickness can be modelled as a function of the initial and of the aimed optical properties of the VCSEL beam. In this work, pedestals are fabricated with SU-8, which is a negative-tone photoresist transparent at the lasing wavelength. Lens deposition is realized using a robotized silicon microcantilever spotter technique after a simple SU-8 photolithography step in order to define high aspect ratio cylindrical pedestals with wide range diameters [30-140 μm]. The effect of pedestal diameter on the final contact angle and curvature radius has been investigated using non contact optical profilometry and scanning electron microscopy. We show that this technique leads to a complete delimitation of the polymer droplets and to a better control of the final lens size. Moreover, lens positioning is fully ensured by the self-alignment of the droplet with the pillar center and consequently with the VCSEL source, and allows for meeting the stringent requirements on alignments.

Published
2008

22. Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever based microsystem

Author

Yvan Segui, Véronique Conédéra, Emmanuelle Daran, Léonard Gavin-Djidina, Jean-Bernard Pourciel, Thierry Camps, Thierry Leichle, Mathieu Guirardel, Corinne Vergnenègre, and Véronique Bardinal

Subjects
Microelectromechanical systems, Microlens, Fabrication, Materials science, Cantilever, business.industry, law.invention, Vertical-cavity surface-emitting laser, Lens (optics), Optics, law, Microsystem, Optoelectronics, Deposition (phase transition), business
Abstract

We report on the design and the fabrication of refractive microlenses using a polymer droplet deposition microsystem. The principle of this original technique consists in monomer droplets deposition using a robotized silicon-microcantilevers array. The advantages of this technique rely on the control of droplets dimensions and the positioning accuracy. Microlenses have been first modelled to optimize their geometrical parameters for VCSEL collimation. Results of lens optimization as well as the influence of the fabrication parameters fluctuations on the final divergence are detailed. First results on droplets deposition are presented, demonstrating the technique feasibility. Finally, the possibility of the modification of the surface energy to obtain the most suited contact angle before deposition is also discussed.

Published
2006

23. Integrated lateral detection in VCSELs for optical system monitoring

Author

Véronique Bardinal, Charlotte Bringer, C. Amat, Emmanuelle Daran, Guilhem Almuneau, Chantal Fontaine, and Thierry Camps

Subjects
Materials science, Optics, business.industry, Schottky barrier, Process (computing), Optoelectronics, Detection theory, Stimulated emission, System monitoring, business, Signal, Tunable laser, Vertical-cavity surface-emitting laser
Abstract

A new VCSEL design is proposed to combine emission and detection, based on a standard mesa process. Lateral guided optical signal is detected through a Schottky contact. Temperature, time-response and geometry-dependent characterizations are presented.

Published
2006

24. Detection of lateral spontaneous emission for VCSEL monitoring

Author

Guilhem Almuneau, Emmanuelle Daran, Jean-Baptiste Doucet, Véronique Bardinal, Charlotte Bringer, Chantal Fontaine, P. Dubreuil, Yann G. Boucher, Olivier Gauthier-Lafaye, and Thierry Camps

Subjects
Microlens, Materials science, business.industry, Physics::Optics, Photodetector, Photodetection, Laser, Vertical-cavity surface-emitting laser, law.invention, Nonlinear Sciences::Adaptation and Self-Organizing Systems, Optics, law, Optoelectronics, Spontaneous emission, business, Lasing threshold, Quantum well
Abstract

VCSELs (Vertical Cavity Surface Emitting Lasers) are nowadays more and more exploited in optoelectronic applications, monitoring their lasing power in a compact and low cost manner becomes crucial. To collect and control the output light, an external photodetector associated with an optical microlens array can be used. Integrated solutions based on the use of a bulk or QW photodetection section added in single-or double-cavity structures have also been proposed. Here, we have investigated a simpler solution based on a standard VCSEL array. Light emitted by a VCSEL has been electrically detected by adjacent VCSELs located in the same array, using in plane optical waveguiding of spontaneous emission in the intrinsic central zone of the devices. We show that the detected photocurrent can be related to the power of the emitting VCSEL. Signal intensity has been studied as a function of VCSELs distance. This method could lead to a more efficient way to monitor VCSEL emission.

Published
2004

25. Effects of selective wet etching on the spectral properties of a vertical-cavity surface-emitting laser/detector

Author

Thierry Camps, Charlotte Bringer, Chantal Fontaine, P. Dubreuil, and Véronique Bardinal

Subjects
Materials science, Fabrication, Optics, business.industry, Etching (microfabrication), Detector, Optoelectronics, Photodetector, Photodetection, Active surface, business, Electronic mail, Vertical-cavity surface-emitting laser
Abstract

In this paper, we present results on modelling, fabrication and characterization of oxide-confined VCSELs for short-distance alternative emission and photodetection at 820 nm. In the present designed single-cavity GaAs-based device, the buried oxide layer is not only used to obtain a single mode laser beam but also to enable decoupling between a small surface emission, limited by the aperture and a large surface detection, limited by the internal diameter of the top electrodes. The selective wet etching was found to improve simultaneously the detection sensitivity and the differential quantum efficiency without damaging the active surface.

Published
2004

26. Dual-purpose single-cavity oxide-confined VCSEL photodetector

Author

Charlotte Bringer, Chantal Fontaine, Thierry Camps, Laurent Averseng, A. Muñoz-Yagüe, Véronique Bardinal, and P. Dubreuil

Subjects
Photocurrent, Materials science, business.industry, Single-mode optical fiber, Photodetector, Photodetection, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, Optical path, law, Optoelectronics, business, Refractive index
Abstract

The increasing interest for high-speed, compact and low cost devices for optoelectronic applications such as bi-directional optical interconnects, optical imaging or telemetry has recently led to focus on the ability for the vertical-cavity surface-emitting lasers to be used as resonant cavity enhanced photodetectors for dual-purpose applications. Here we present results on design, fabrication and characterization of an oxide-confined 830nm top-emitting laser for self-aligned emission and photodetection. In this single-cavity GaAs-based device, submitted alternatively to forward and reverse bias, the oxide layer is not only used to obtain a single mode emission but also to enable decoupling between a small surface emission and a large surface detection. However the optical path is observed to change because of the refractive index difference between the oxidized and non-oxidized zones of the structure. This leads to a detrimental blue-shift on the wavelength of the Fabry-Perot cavity mode. In this work, we demonstrate this effect in photodetection by the means of spatially localized photocurrent and reflectance spectra measurements. These results show that the photocurrent is correctly collected in the whole device despite of the presence of an oxide layer. The results obtained on selective etching for optimisation of this dual-purpose device are presented.

Published
2003

27. Experimental demonstration of oxide-mode influence in a dual-purpose oxide-confined vertical-cavity surface-emitting laser resonant detector

Author

Véronique Bardinal, Thierry Camps, Jérôme Polesel-Maris, Eléna Bedel-Pereira, P. Dubreuil, Chantal Fontaine, Laurent Averseng, Charlotte Bringer, Corinne Vergnenègre, A. Muñoz-Yagüe, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Équipe Photonique (LAAS-PHOTO), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), and Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole)

Subjects
Materials science, Physics and Astronomy (miscellaneous), Physics::Optics, 02 engineering and technology, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, [SPI.MAT]Engineering Sciences [physics]/Materials, VCSELs Lasers à Cavité Verticale à Emission par la Surface, Optics, law, 0202 electrical engineering, electronic engineering, information engineering, Laser power scaling, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Distributed feedback laser, business.industry, 020208 electrical & electronic engineering, Far-infrared laser, 021001 nanoscience & nanotechnology, Laser, [SPI.TRON]Engineering Sciences [physics]/Electronics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, oxide, 0210 nano-technology, business, Laser Doppler vibrometer, Tunable laser, Photodetection
Abstract

International audience; We report on design, fabrication, and characterization of a vertical-cavity surface-emitting laser ͑VCSEL͒ used as a resonant-cavity-enhanced detector for dual-purpose application. The geometry of this oxide-confined VCSEL takes advantage of the properties of the buried oxide layer to allow both single-mode laser emission and detection on a large surface. Here, we demonstrate the presence and the influence of oxide modes in the optical sensitivity spectrum of the device through spatially localized detection measurements. The wavelength of these modes has been correlated to the dip on the reflectivity spectrum measured at the same area of the device surface. The increasing need for high-speed, efficient, compact, and low-cost devices for optoelectronic applications such as bidirectional optical interconnects, optical imaging, or telem-etry has recently led to focus on the optimization of dual-purpose vertical-cavity surface-emitting lasers ͑VCSELs͒ used as resonant cavity enhanced ͑RCE͒ photodetectors.

Published
2002

28. Study of the photodetection behaviour of oxide-confined vertical-cavity surface-emitting lasers (VCSELs)

Author

P. Dubreuil, Thierry Camps, Corinne Vergnenègre, Charlotte Bringer, Chantal Fontaine, Eléna Bedel-Pereira, L. Averseng, Véronique Bardinal, and Jérôme Polesel-Maris

Subjects
Physics, Surface (mathematics), business.industry, Detector, Oxide, Photodetection, Condensed Matter Physics, Laser, Reflectivity, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Vertical-cavity surface-emitting laser, Condensed Matter::Materials Science, chemistry.chemical_compound, Optics, chemistry, law, Optoelectronics, Physics::Chemical Physics, business
Abstract

We present a theoretical and experimental study of oxide-confined top-emitting VCSELs used as resonant detectors. Oxide-mode influence on the detection spectrum is discussed.

Published
2003

29. Fabrication of polymer-based optical microsystem arrays suited for the active focusing of vertical laser diodes

Author

Emmanuelle Daran, Jean-Yves Fourniols, Thierry Camps, Véronique Bardinal, David Bourrier, Jean-Baptiste Doucet, B. Reig, and Jérôme Launay

Subjects
Materials science, Fabrication, business.industry, Mechanical Engineering, Laser, Electronic, Optical and Magnetic Materials, law.invention, Vertical-cavity surface-emitting laser, Optics, Mechanics of Materials, law, Microsystem, Thermal, Optoelectronics, Vertical displacement, Electrical and Electronic Engineering, business, Beam (structure), Diode
Abstract

We present a low-cost fabrication technique of a polymer-based micro-optical-electrical-mechanical systems (MOEMS) suited for the dynamic focusing of VCSELs (vertical-cavity surface-emitting lasers). A simple method based on an SU(8) double exposure is proposed for the collective integration of small footprint transparent suspended membrane arrays on vertical laser diodes. We demonstrate that this kind of MOEMS can provide under thermal actuation a vertical displacement of around 0.2 ?m W?1?over a maximal range of 8??m. As a wide range of initial gaps between the membrane and the laser source can be chosen, this approach opens new insights into the dynamic control of the VCSEL beam waist position as well as for tunable VCSEL fabrication.

Published
2012

30. High sensitivity integrated lateral detection in VCSELs

Author

Chantal Fontaine, Charlotte Bringer, Jean-Baptiste Doucet, Thierry Camps, P. Dubreuil, Emmanuelle Daran, Guilhem Almuneau, Véronique Bardinal, and C. Amat

Subjects
Photocurrent, Materials science, business.industry, Schottky barrier, Photodetector, Schottky diode, Semiconductor laser theory, Vertical-cavity surface-emitting laser, Photodiode, law.invention, Optics, law, Optoelectronics, Electrical and Electronic Engineering, business, Sensitivity (electronics)
Abstract

A simple and novel design for power monitoring, integrated in a VCSEL, is presented. A Schottky photodiode, placed close to the VCSEL, enables delivery of a photocurrent of several hundred µA from the lateral emitted light, throughout the whole light-current characteristics. It is shown that the Schottky contact significantly reduces the parasitic current in the cavity.

Published
2005

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