1. Effect of annealing conditions on the structural, electrical and optical properties of Li-doped NiO thin films.
- Author
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Chu, Xianwei, Leng, Jiyan, Liu, Jia, Shi, Zhifeng, Li, Wancheng, Zhuang, Shiwei, Yang, Hang, Du, Guotong, and Yin, Jingzhi
- Subjects
CERAMICS ,MAGNETRON sputtering ,OPTICAL properties ,THIN films ,OXYGEN - Abstract
Transparent conductive oxide (TCO) p-type Li-doped NiO thin films were deposited on the (0001) sapphire substrates by magnetron sputtering technique with a high purity NiO:LiO ceramic target. We systematically investigated the structural, electrical and optical properties of NiO:Li thin films annealed in different conditions. We found that annealing in different conditions greatly affects the physical properties of NiO:Li thin films. Compared with the NiO:Li thin film annealed in oxygen, the hole concentration of NiO:Li thin film annealed in nitrogen at the same processing temperature is obviously lower. Annealed in oxygen at 500 °C, NiO:Li films show excellent crystal quality with single (111) orientation, high hole concentrations. When the annealing temperature increased, the transmittance of NiO:Li thin films become better for wavelength range from ultraviolet (UV) to visible with a significant absorption edge near 350 nm. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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