1. Heteroepitaxial selective growth of InxGa1-xAs on SiO2-patterned GaAs(001) by molecular beam epitaxy.
- Author
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Lee, S. C., Dawson, L. R., Brueck, S. R. J., and Stintz, A.
- Subjects
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GALLIUM arsenide semiconductors , *CRYSTAL growth , *QUANTUM wells , *MOLECULAR beam epitaxy , *EPITAXY , *QUANTUM chemistry - Abstract
Selective growth of InxGa1-xAs on a SiO2-mask patterned GaAs(001) substrate by molecular beam epitaxy (MBE) is reported. A simple model for selective growth is derived from the general rate equation of thin film growth. Based on this model, heteroepitaxial selective growth of InxGa1-xAs with x up to 0.07 is demonstrated at 595 °C, which is within the range of typical MBE growth temperatures for GaAs but is above the desorption temperature of In atoms from a GaAs surface. An incorporation rate of In atoms of about 0.22% for a Ga flux of 2.0×1013 atoms/cm2 s was measured at this temperature. The concentration of In atoms effectively incorporated into the InxGa1-xAs layer is linearly proportional to the supplied In flux in the range 0.7–9.2×1014 atoms/cm2 s. The extremely low, but finite, In incorporation is utilized for the growth of 5 nm thick InxGa1-xAs/GaAs quantum wells and ∼300 nm thick InxGa1-xAs layers. Together with selective growth, the surface morphology and optical properties of high-temperature grown InxGa1-xAs are characterized. [ABSTRACT FROM AUTHOR]
- Published
- 2004
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