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Radial neutral uniformity measurements in an HDP helicon are reported.

The angular sputtering distributions measured for carbon atom and cluster as C, [C.sub.2], and [C.sub.3] for low-energy normal incident ion bombardment of noble gas (Xe, Kr, Ar, Ne, and He), with the incident ion energy ranging from 75 to 225 eV are reported. The results obtained for the bombarding gases provide insight into the undercosine angular distributions of the sputtered atoms and clusters.

Measurement of the molybdenum angular sputtering distribution during xenon ion bombardment from a plasma is presented, with incident ion energy [E.sub. Xe] ranging between 75 and 225 eV. Results are in agreement with the experiments showing an under-cosine distribution for the lower energies, which involves towards a cosine distribution as the incident ion energy increases.

We create a model for H retention depth profiles in W and subsequently model how this profile changes after isotope exchange. This is accomplished by calculating how trapping defects in W accumulate D (or H) inventory as W is being exposed to plasma. Each trapping site is characterized by a trapping rate and a release rate, where the only free parameters are the distribution of these trapping sites in the material. The filled trap concentrations for each trap type are modeled as a diffusion process because post-mortem deuterium depth profiles indicate that traps are filled well beyond the ion implantation zone (2–5 nm). Using this retention model, an isotope exchange rate is formulated. The retention model and isotope exchange rate are compared to low temperature isotope exchange experiments in tungsten with good agreement. The limitations of the current model highlight important physics and motivate future work. [ABSTRACT FROM AUTHOR]