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Molybdenum angular sputtering distribution under low energy xenon ion bombardment
- Source :
- Journal of Applied Physics. Sept 15, 2006, Vol. 100 Issue 6, 063301-1-063301-6
- Publication Year :
- 2006
-
Abstract
- Measurement of the molybdenum angular sputtering distribution during xenon ion bombardment from a plasma is presented, with incident ion energy [E.sub. Xe] ranging between 75 and 225 eV. Results are in agreement with the experiments showing an under-cosine distribution for the lower energies, which involves towards a cosine distribution as the incident ion energy increases.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 100
- Issue :
- 6
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.154827017