Molybdenum angular sputtering distribution under low energy xenon ion bombardment

Measurement of the molybdenum angular sputtering distribution during xenon ion bombardment from a plasma is presented, with incident ion energy [E.sub. Xe] ranging between 75 and 225 eV. Results are in agreement with the experiments showing an under-cosine distribution for the lower energies, which involves towards a cosine distribution as the incident ion energy increases.