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Your search keyword '"Kolawa, E."' showing total 2 results
Start Over Author "Kolawa, E." Topic oxidation
2 results on '"Kolawa, E."'

1. Thermal oxidation of reactively sputtered amorphous W80N20 films.

Author

Vu, Q. T., Pokela, P. J., Garden, C. L., Kolawa, E., Raud, S., and Nicolet, M-A.

Subjects
OXIDATION, TUNGSTEN compounds, THIN films
Abstract

Presents a study that investigated the oxidation behavior of reactively sputtered amorphous tungsten nitride thin films. Properties of tungsten nitride thin films; Details on the experimental procedures; Discussion on the results of the study.

Published
1990
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2. Thermal oxidation of amorphous ternary Ta36Si14N50 thin films.

Author

Pokela, P. J., Reid, J. S., Kwok, C.-K., Kolawa, E., and Nicolet, M.-A.

Subjects
OXIDATION, RADIO frequency, SPUTTERING (Physics), AMORPHOUS substances
Abstract

Presents information on a study which examined the oxidation behavior of reactively radio-frequency sputtered amorphous tantalum silicon nitrogen films for dry and wet oxidation. Methods; Results; Discussion.

Published
1991
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