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A method to create impacting jets at the micrometer length scale by means of a collapsing cavitation bubble is presented. A focused shock wave from a lithotripter leads to the nucleation of a cavitation bubble below a hole of 25 $\ensuremath{\mu}$m diameter etched in a silicon plate. The plate is placed at an air-water interface. The expansion and collapse of the bubble leads to two separate jets---an initial slow jet of velocity $\ensuremath{\sim}$10 m/s and a later faster jet of velocity $\ensuremath{\sim}$50 m/s. The jets subsequently impact coaxially, resulting in a circular sheet of liquid in the plane perpendicular to their axis. The sheet is characterized by a ring of droplets at its rim and breaks up into a spray as the shock pressure is increased. The results demonstrate an approach to create a high-speed jet and fine spray on demand at the micrometer scale.

Control of photonic crystal resonances in conjunction with large spectral shifting is critical in achieving reconfigurable photonic crystal devices. We propose a simple approach to achieve nano-mechanical control of photonic crystal resonances within a compact integrated on-chip approach. Three different tip designs utilizing an in-plane nano-mechanical tuning approach are shown to achieve reversible and low-loss resonance control on a one-dimensional photonic crystal nanocavity. The proposed nano-mechanical approach driven by a sub-micron micro-electromechanical system integrated on low loss suspended feeding nanowire waveguide, achieved relatively large resonance spectral shifts of up to 18 nm at a driving voltage of 25 V. Such designs may potentially be used as tunable optical filters or switches.

We present dynamic tuning of optical resonance using microelectromechanical systems (MEMS)-driven coupled photonic crystal (PhC) nanocavities. The device consists of an air-suspended one-dimensional PhC nanocavity coupled to input and output waveguides and a perturbing nanocavity attached to a submicrometer MEMS comb drive. Resonance tuning is achieved through varying the gap between the two coupled cavities. We demonstrate experimentally that resonance can be tuned up to 8nm with no significant deterioration in the Q factor. The proposed mechanism potentially enables a new platform of on-chip photonic devices that can achieve a large tuning range with low power and small footprint and may find useful applications in tunable optical/photonic devices.

We report in this paper a sub-wavelength 1D photonic crystal resonator tuned using a nanomechanical approach. This device demonstrated a compact and low power approach to achieve tunability of photonic crystal resonances. The device is tuned utilizing coupled cavity approach on an air suspended silicon waveguide with tapered etched holes. The etched holes are fine tuned to achieve a reasonably high-Q that is suitable for optical communications. Effects of wavelength detuning by longitudinal shifting and lateral shifting of the perturbing cavity are investigated. Finally a nano-electromechanical actuators are designed and optimized for low power consumption and yet achieving large displacement range for effective de-coupling of both cavities. Large resonance shift can be used in highly sensitive sensors, optical filters or an optical switch.

A wide-range split-ladder photonic crystal cavity which is tuned by changing its intrinsic gap width is designed and experimentally verified. Different from the coupled cavities that feature resonance splitting into symmetric and anti-symmetric modes, the single split-ladder cavity has only the symmetric modes of fundamental resonance and second-order resonance in its band gap. Finite-difference time-domain simulations demonstrate that bipolar resonance tuning (red shift and blue shift respectively) can be achieved by shrinking and expanding the cavity's gap, and that there is a linear relationship between the resonance shifts and changes in gap width. Simulations also show that the split-ladder cavity can possess a high Q-factor when the total number of air holes in the cavity is increased. Experimentally, comb drive actuator is used to control the extent of the cavity's gap and the variation of its displacements with applied voltage is calibrated with a scanning electron microscope. The measured wavelength of the second-order resonance shifts linearly towards blue with increase in gap width. The maximum blue shift is 17 nm, corresponding to a cavity gap increase of 26 nm with no obvious degradation of Q-factor.