Amalgamating nanomechanics with nanophotonics to achieve precise and large spectral shifts of resonance

We report in this paper a sub-wavelength 1D photonic crystal resonator tuned using a nanomechanical approach. This device demonstrated a compact and low power approach to achieve tunability of photonic crystal resonances. The device is tuned utilizing coupled cavity approach on an air suspended silicon waveguide with tapered etched holes. The etched holes are fine tuned to achieve a reasonably high-Q that is suitable for optical communications. Effects of wavelength detuning by longitudinal shifting and lateral shifting of the perturbing cavity are investigated. Finally a nano-electromechanical actuators are designed and optimized for low power consumption and yet achieving large displacement range for effective de-coupling of both cavities. Large resonance shift can be used in highly sensitive sensors, optical filters or an optical switch.