1. Global High-Accuracy Intercomparison of Slope Measuring Instruments.
- Author
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Siewert, Frank, Assoufid, Lahsen, Cocco, Daniele, Hignette, Olivier, Irick, Steve, Lammert, Heiner, McKinney, Wayne, Ohashi, Haruhiko, Polack, Francois, Shinan Qian, Seungyu Rah, Rommeveaux, Amparo, Schönherr, Veit, Sostero, Giovani, Takacs, Peter, Thomasset, Muriel, Yamauchi, Kazuto, Yashchuk, Valeriy, and Zeschke, Thomas
- Subjects
SYNCHROTRON radiation ,ELECTROMAGNETIC waves ,PARTICLES (Nuclear physics) ,METROLOGY ,OPTICS - Abstract
The upcoming generation of high accuracy synchrotron radiation (SR) optics will be characterized by a slope deviation from ideal shape in the range of some 0.05μrad rms at a sampling interval of about 1mm. To certify and improve the measurement capabilities of metrology tools to inspect these stringent specifications, an essential step is a worldwide intercomparison of these measurements based on a set of transfer standards. It is the aim of these cross measurements to verify the “absolute” correctness and comparability of the measurement results obtained by the cooperating partners when measuring the topography of specific reference optics (ROs) using their latest metrology tools and methods. Organized by members of the SR-optics community, new national and international cross measurement comparisons of typical synchrotron radiation mirrors have been realized during the last few years: A round robin test by the European COST-program (BESSY, Elettra, ESRF, Soleil) during the years 2004–2005 and a similar cooperation realized by the APS, ESRF and Spring-8 have proceeded. The first results of both projects were presented at the “Optics & Photonics” conference in San Diego in August 2005. This work build upon earlier work. The participants of both groups and representatives of other SR-laboratories agreed to start a global cooperation bringing together the two round-robin projects and open these activities to other partners from the SR-community, optical manufacturers and other interested parties. This initiative is intended to start an extensive comparison of various measurement principles and tools and will help to push the frontiers in metrology, and hence production, to a precision well below the current state-of-the-art limit of 0.5μrad rms for slope errors. © 2007 American Institute of Physics [ABSTRACT FROM AUTHOR]
- Published
- 2007
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