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Phosphosilicate ceramic was doped with Tb 3+ using sol-gel technique to prepare thin films. The films were prepared by spin coating the phosphosilicate sols on SiO x /indium-tin-oxide/glass substrates. The photocurrent of the films at 355 nm laser excitation was observed. The photoresponse as a function of applied field and laser energy was linear and showed no sign of saturation. The films exhibited very stable photoresponse under a very high number of laser shots.

We will discuss our work to build, characterize, and scale- up a metallized plastic muscle-like actuator called a Spiral Wound Transducer (SWT). Prototype SWTs have been built using microelectronics fabrication methods. The prototypes have demonstrated large amplitude motion and analog response. The prototypes, though small, have demonstrated forces equivalent to 12 grams for compressions of more than 15 percent at 30 Hz. The size of the SWTs is essentially unrestricted. Our work with commercially available metallized Mylar films to produce much larger, more powerful, and lower cost SWT devices will also be discussed.

I . The University of North Carolina at CharlotteDepartment of Electrical and Computer EngineeringCharlotte, NC 282232. Duke UniversityDepartment of Biomedical EngineeringDurham, NC 277063. MCNC, Electronic Technologies DivisionResearch Triangle Park, NC 277094. The University of North Carolina at CharlotteDepartment of ChemistryCharlotte, NC 282235. The University of North Carolina at CharlotteDepartment of Mechanical EngineeringCharlotte, NC 282236. Integrated Electronic Innovations Inc.Cary, NC 27513ABSTRACTA miniature ultrasound scanner has been constructed using a MEMS actuatorcalled an Integrated Force Array (IFA).1'2'3'4'5 A second type of actuator called aSpiral Wound Transducer (SWT) is under development and shows significantpromise for this application. Both the scanner and SWT will be discussed.1. MINIATURE ULTRASOUND SCANNERWe have previously discussed the miniature ultrasound scanner6 shown inFigure 1.

Integrated Force Arrays (IFAs) are thin film linear actuators which operate with substantial displacement and force. The methods of attachment of these devices to external systems are under development. Our current methods to incorporate IFAs in an scanning ultrasound imaging systems as well as a new material and method for attachment will be described.