Micro-electro-mechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner

I . The University of North Carolina at CharlotteDepartment of Electrical and Computer EngineeringCharlotte, NC 282232. Duke UniversityDepartment of Biomedical EngineeringDurham, NC 277063. MCNC, Electronic Technologies DivisionResearch Triangle Park, NC 277094. The University of North Carolina at CharlotteDepartment of ChemistryCharlotte, NC 282235. The University of North Carolina at CharlotteDepartment of Mechanical EngineeringCharlotte, NC 282236. Integrated Electronic Innovations Inc.Cary, NC 27513ABSTRACTA miniature ultrasound scanner has been constructed using a MEMS actuatorcalled an Integrated Force Array (IFA).1'2'3'4'5 A second type of actuator called aSpiral Wound Transducer (SWT) is under development and shows significantpromise for this application. Both the scanner and SWT will be discussed.1. MINIATURE ULTRASOUND SCANNERWe have previously discussed the miniature ultrasound scanner6 shown inFigure 1.