1. Complete elastic characterization of lithium phosphorous oxynitride films using picosecond ultrasonics
- Author
-
C. Secouard, Eric Charron, Bernard Perrin, Danièle Fournier, Laurent Belliard, F. Xu, Jean-Yves Duquesne, S. Martin, Institut des Nanosciences de Paris (INSP), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Acoustique pour les nanosciences (INSP-E3), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), and French National Research Agency
- Subjects
Materials science ,Analytical chemistry ,Lithium phosphorous oxynitride (LiPON) film ,chemistry.chemical_element ,Young's modulus ,02 engineering and technology ,01 natural sciences ,Molecular physics ,Optical pump and probe method ,symbols.namesake ,0103 physical sciences ,Materials Chemistry ,Rayleigh scattering ,[PHYS.COND]Physics [physics]/Condensed Matter [cond-mat] ,010302 applied physics ,Metals and Alloys ,Transverse wave ,Surfaces and Interfaces ,Poisson's ratio ,021001 nanoscience & nanotechnology ,Elastic characterization ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Brillouin zone ,chemistry ,Surface wave ,symbols ,Picosecond ultrasonics ,Lithium ,0210 nano-technology - Abstract
International audience; We report on a complete elastic characterization by picosecond ultrasonics technique of lithium phosphorous oxynitride (LiPON) thin films, which are nowadays, considered as promising solid-state electrolytes for microbatteries technology. Longitudinal sound velocity is deduced from Brillouin oscillation detection at variable incidence angles. The density is estimated through an interfacial energy analysis related to the echo amplitude decay. Transverse wave velocity is obtained across the dispersion curve of Rayleigh surface waves. Combining these different approaches, Young's modulus and Poisson's ratio of LiPON are finally found to be 79 GPa and 0.27, respectively. (C) 2013 Elsevier B. V. All rights reserved.
- Published
- 2013
- Full Text
- View/download PDF