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Lateral heat diffusion investigation of a layered structure: Application to the complete thermal characterization of a lithium phosphorous oxynitride film
- Source :
- Journal of Applied Physics, Journal of Applied Physics, American Institute of Physics, 2013, 113 (24), pp.244304. ⟨10.1063/1.4811520⟩, Journal of Applied Physics, 2013, 113 (24), pp.244304. ⟨10.1063/1.4811520⟩
- Publication Year :
- 2013
- Publisher :
- HAL CCSD, 2013.
-
Abstract
- International audience; We present a new method to measure without any calibration the thermal effusivity, conductivity, and diffusivity of an insulating layer deposited on a substrate, using lateral heat diffusion. The method is applied to Lithium phosphorous oxynitride, a thin film solid-state electrolyte used in micro-batteries. (C) 2013 AIP Publishing LLC.
- Subjects :
- 010302 applied physics
Materials science
Inorganic chemistry
General Physics and Astronomy
chemistry.chemical_element
02 engineering and technology
Substrate (electronics)
Conductivity
021001 nanoscience & nanotechnology
Thermal diffusivity
01 natural sciences
Thermal conductivity
chemistry
0103 physical sciences
Lithium
Thin film
Composite material
[PHYS.COND]Physics [physics]/Condensed Matter [cond-mat]
0210 nano-technology
Layer (electronics)
Thermal effusivity
Subjects
Details
- Language :
- English
- ISSN :
- 00218979 and 10897550
- Database :
- OpenAIRE
- Journal :
- Journal of Applied Physics, Journal of Applied Physics, American Institute of Physics, 2013, 113 (24), pp.244304. ⟨10.1063/1.4811520⟩, Journal of Applied Physics, 2013, 113 (24), pp.244304. ⟨10.1063/1.4811520⟩
- Accession number :
- edsair.doi.dedup.....f897b408300bb11adba0494e18917226
- Full Text :
- https://doi.org/10.1063/1.4811520⟩