Author: "Thierry Camps" / Topic: law.invention - Searchworks@Jio Institute Digital Library Search Results

Your search keyword '"Thierry Camps"' showing total 44 results

Start Over Author "Thierry Camps" Topic law.invention

44 results on '"Thierry Camps"'

1. Thermal characterization of a nematic liquid crystal suited for the fabrication of NIR spectrally-tunable vertical cavity surface emitting lasers

Author: Benjamin Boisnard, Andrea Simaz, Julien Lumeau, Pierluigi Debernardi, Thomas Begou, Véronique Bardinal, Benjamin Reig, Alberto Tibaldi, Thierry Camps, Jean Baptiste Doucet, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), RCMO (RCMO), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Department of Electronics and Telecommunications = DET Dipartimento di Elettronica e Telecomunicazioni [Politecnico di Torino] (DET), Politecnico di Torino = Polytechnic of Turin (Polito), Istituto di Elettronica e di Ingegneria dell'Informazione e delle Telecomunicazioni (IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), and ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015)
Subjects: Fabrication, Materials science, business.industry, Laser, Electronic, Optical and Magnetic Materials, Characterization (materials science), law.invention, Liquid crystal, law, Thermal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, [PHYS.COND.CM-SCM]Physics [physics]/Condensed Matter [cond-mat]/Soft Condensed Matter [cond-mat.soft]
Abstract: International audience; In this work, the thermo-optical properties of a nematic liquid crystal are determined through reflectance measurements performed on a high finesse tunable filter fabricated using a polymer-based microcell technology. The final aim is to insert such material in the optical cavity of a 850 nm tunable VCSEL device, in which local self-heating due to CW pumping must be taken into account. These localized interferometric experiments are performed in the near-infra-red range and at temperatures up to 115 °C. A thermal model is derived from the acquired data. Finally, we demonstrate that the birefringence of QYPDLC-36 liquid crystal remains higher than 0.18 at 60 °C, feature well suited to real device operation.
Published: 2022

2. Anisotropic Transverse Confinement Design for Electrically Pumped 850 nm VCSELs Tuned by an Intra Cavity Liquid-Crystal Cell

Author: Francesco Bertazzi, Benjamin Boisnard, Thierry Camps, Jean-Baptiste Doucet, Benjamin Reig, Véronique Bardinal, Andrea Simaz, Alberto Tibaldi, Pierluigi Debernardi, Michele Goano, CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Department of Electronics and Telecommunications [Torino] (DET), Politecnico di Torino = Polytechnic of Turin (Polito), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: Materials science, Multiphysics, Physics::Optics, Optical power, 02 engineering and technology, semiconductor lasers, Grating, 01 natural sciences, 7. Clean energy, law.invention, Vertical-cavity surface-emitting laser, Semiconductor laser theory, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, Liquid crystal, law, 0103 physical sciences, Vertical cavity surface emitting lasers, liquid crystal devices, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, 021001 nanoscience & nanotechnology, Laser, simulation, Atomic and Molecular Physics, and Optics, [SPI.TRON]Engineering Sciences [physics]/Electronics, Transverse plane, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Liquid crystal devices, Semiconductor lasers, Simulation, 0210 nano-technology, business
Abstract: International audience; Relying on preliminary experiments, in this work we design a tunable 850 nm laser based on a hybrid combination of a liquid crystal micro-cell with nanoimprinted grating and an electrically-pumped GaAs half-VCSEL. The optical design is challenging due to the inherent tolerances of this hybrid technology, the presence of metals in the cavity and the need for single fundamental extraordinary mode emission over the whole tuning range. To ensure proper operation, we introduce for the first time the new concept of anisotropic transverse confinement design. The overall performance is verified by our multiphysics VCSEL suite. Beyond tuning features, we predict side mode suppression ratio and optical power under all working conditions, comparing the performance of liquid crystals with different clearing temperatures. The results qualifies these lasers as viable tunable sources with interesting performance and complementary features compared to other technologies.
Published: 2021

3. Near infrared photopolymer for micro‐optics applications

Author: Carole Ecoffet, Ihab Dika, Jean-Baptiste Doucet, Benjamin Reig, Jean-Pierre Malval, Olivier Soppera, Frédéric Diot, Thierry Camps, Aurélien Bruyant, David Barat, Véronique Bardinal, Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace, Centre National de la Recherche Scientifique (CNRS)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Strasbourg (UNISTRA)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Université de Strasbourg (UNISTRA), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Université Fédérale Toulouse Midi-Pyrénées, Lumière, nanomatériaux et nanotechnologies (L2n), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), and Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM)
Subjects: optical fiber, Optical fiber, Materials science, Fabrication, Polymers and Plastics, 02 engineering and technology, waveguide, 010402 general chemistry, 01 natural sciences, law.invention, Photopolymer, Optics, microlenses, law, Materials Chemistry, Physical and Theoretical Chemistry, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, Near-infrared spectroscopy, NIR, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Core (optical fiber), [CHIM.POLY]Chemical Sciences/Polymers, Single-core, Photonics, 0210 nano-technology, business, Waveguide, Microfabrication
Abstract: International audience; Near infrared (NIR) activable photopolymers suitable for versatile fabrication of micro-optical elements were developed. The first main objective of this paper is to show that these new photopolymers can be used for microfabrication and investigate the parameters governing the microfabrication process. The impact of photonic, physico-chemical and chemical parameters is discussed. High quality microstructures with a good control over their size and shape are demonstrated. The second main objective is to show practical examples of microlenses and waveguides implemented on single core and multiple core optical fibers, VCSELs, and glass slides are then presented. The NIR photosensitivity of this negative tone photoresists allows using the device source itself as to start the crosslinking process, which constitutes a convenient approach for micro-optics self-positioning on NIR sources and justifies the interest of such NIR photopolymer for the fabrication micro-optical elements and optical interconnects. 2
Published: 2020

4. Multi-instrumentation monitoring for the curing process of a composite structure

Author: Jérôme Lubin, Xavier Jacob, Laurent Crouzeix, Yves-Henri Grunevald, Mauricio Torres, Thierry Camps, Geert Luyckx, Francis Collombet, Kuo-Ting Wu, Bernard Douchin, Institut Clément Ader (ICA), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-IMT École nationale supérieure des Mines d'Albi-Carmaux (IMT Mines Albi), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-Institut Supérieur de l'Aéronautique et de l'Espace (ISAE-SUPAERO), National Center for Aeronautics Technologies (CONACYT – CIDESI), Composites Expertise & Solutions - CES (Castanet-Tolosan, France), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Toulouse III - Paul Sabatier (UT3), Universiteit Gent = Ghent University [Belgium] (UGENT), Industrial Materials Institute (NRCC), National Research Council of Canada (NRC), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Laboratoire Physique de l'Homme Appliquée à Son Environnement (PHASE), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées, Ghent University [Belgium] (UGENT), Institut Supérieur de l'Aéronautique et de l'Espace (ISAE-SUPAERO)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-IMT École nationale supérieure des Mines d'Albi-Carmaux (IMT Mines Albi), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Universiteit Gent = Ghent University (UGENT)
Subjects: carbon-epoxy plate, Optical fiber, Materials science, optical fibres, Mechanical engineering, 02 engineering and technology, 01 natural sciences, law.invention, curing process, Composite structure, law, Composite plate, 0202 electrical engineering, electronic engineering, information engineering, [SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering, Electrical and Electronic Engineering, Instrumentation, Quantum tunnelling, Curing (chemistry), tunnelling junction sensor, Applied Mathematics, 020208 electrical & electronic engineering, 010401 analytical chemistry, Condensed Matter Physics, 0104 chemical sciences, Structure design, flexible ultrasonic transducers, Ultrasonic sensor
Abstract: International audience; The phenomena occurring during curing process is one of the major issues to deal in order to improve the physical properties of a composite structure. In this work, a multi-instrumentation setup is conceived in order to have a better understanding of composites curing using different devices (tunnelling junction sensors, optical fibres and flexible ultrasonic transducers). The sensors are simultaneously embedded or placed on the surface of a thick carbon-epoxy plate for monitoring its autoclave cycle. By means of all signals, an evolution of temperature, internal strains and physical state changes is described. A qualitative statement from all measurements is provided to have a first approach of the initial state of the composite plate. With this methodology, the initial state after composite manufacturing can be considered in the structure design procedure to improve its mechanical performance.
Published: 2020

5. CW Operation of a Tunable 1550-nm VCSEL Integrating Liquid-Crystal Microcells

Author: Cyril Paranthoen, S. Pes, Pierluigi Debernardi, Thierry Camps, Véronique Bardinal, K. Tavernier, Sophie Bouchoule, Christophe Levallois, Laurent Dupont, Benjamin Boisnard, B. Sadani, Mehdi Alouini, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Direction Générale de l’Armement (DGA), French National Research Agency (ANR), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), and Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR)
Subjects: Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optical pumping, 020210 optoelectronics & photonics, Liquid crystal, law, 0202 electrical engineering, electronic engineering, information engineering, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, Birefringence, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Vertical-cavity surface-emitting lasers, Liquid crystal devices, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, business, Lasing threshold, Refractive index
Abstract: International audience; An InP-based Vertical-Cavity Surface-Emitting 1 Laser (VCSEL) with a liquid crystal (LC) microcell monolithically integrated on its surface for spectral tuning is investigated. Unlike tunable VCSELs integrating a movable membrane, here the physical length of the cavity remains unchanged and only the voltage applied on the LC ensures a refractive index modification for a particular polarization emitted by the VCSEL. This tunable VCSEL operates in CW at room temperature and exhibits more than 23 nm wavelength tuning around 1.55 µm at a maximum applied voltage of 20 V. The measured laser threshold around 6.5 mW is still comparable to VCSEL without LC microcell, a clear indication that the optical losses related to the LC are very low. On the other hand, for this first optically pumped device, the lasing characteristics suggest that the LC birefringence is lower than expected. To assess this hypothesis, thermo-optical simulations have been conducted.
Published: 2020

6. Optical Design Issues in Electrically Pumped Tunable Liquid-Crystal VCSELs

Author: Jean-Baptiste Doucet, Alberto Tibaldi, B. Reig, Véronique Bardinal, Francesco Bertazzi, Michele Goano, Thierry Camps, Benjamin Boisnard, Andrea Simaz, Pierluigi Debernardi, Politecnico di Torino = Polytechnic of Turin (Polito), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse III - Paul Sabatier (UT3), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: Liquid crystal devices, Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 03 medical and health sciences, 020210 optoelectronics & photonics, 0302 clinical medicine, Optical coherence tomography, Liquid crystal, law, Vertical cavity surface emitting lasers, Liquid crystal devices, Semiconductor lasers, Simulation, Vertical cavity surface emitting lasers, 0202 electrical engineering, electronic engineering, information engineering, medicine, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, medicine.diagnostic_test, business.industry, Solver, Laser, [SPI.TRON]Engineering Sciences [physics]/Electronics, 030221 ophthalmology & optometry, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, Lasing threshold, Simulation
Abstract: International audience; In this work we investigate a tunable 850nm laser based on a hybrid combination of a liquid crystal micro-cell and a half GaAs VCSEL. The target application is optical coherence tomography. The inherent tolerances of the hybrid technology, the presence of metals in the cavity and the need for a pure extraordinary mode lasing make challenging the optical design of this laser. Hence, VELM, a full 3D and vectorial VCSEL optical solver, is utilized to understand loss mechanisms and provide an optimized design.
Published: 2020

7. Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Author: Jean-Baptiste Doucet, Benjamin Reig, Yu Zhao, Qingyue Li, Julien Perchoux, Fabien Mesnilgrente, Véronique Bardinal, Clément Tronche, Pierre-François Calmon, Thierry Camps, Beijing University of Technology, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Service Instrumentation Conception Caractérisation (LAAS-I2C), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Equipe Capteurs optiques et systèmes intégrés intelligents (LAAS-OASIS), Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: Materials science, laser beam shaping, Microfluidics, microfluidic, 02 engineering and technology, 01 natural sciences, VCSEL, Collimated light, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Vertical-cavity surface-emitting laser, doppler, 010309 optics, law, 0103 physical sciences, General Materials Science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, laser sensing, Fluid Flow and Transfer Processes, micro-nano, business.industry, Process Chemistry and Technology, General Engineering, 021001 nanoscience & nanotechnology, Laser, Chip, [SPI.TRON]Engineering Sciences [physics]/Electronics, Computer Science Applications, Lens (optics), Interferometry, Resist, technology, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, integrated microoptics, 0210 nano-technology, business
Abstract: Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 &micro, m &times, 200 &micro, 150 &micro, m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.
Published: 2019
Full Text: View/download PDF

8. InP-based devices integrating liquid crystals microcells for a tunable laser emission or a wavelength selective photodetection

Author: B. Sadani, Laurent Dupont, Sophie Bouchoule, Cyril Paranthoen, Thierry Camps, Mehdi Alouini, Benjamin Boisnard, Christophe Levallois, Véronique Bardinal, S. Pes, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Centre de Nanosciences et Nanotechnologies (C2N (UMR_9001)), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and IMT Atlantique (IMT Atlantique)
Subjects: [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Optical communication, Photodetection, 7. Clean energy, Vertical-cavity surface-emitting laser, Photodiode, law.invention, Wavelength, law, Liquid crystal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Photonics, business, Tunable laser
Abstract: International audience; Photonic devices with wavelength tuning capabilities are investigated with the use of liquid crystal microcells monolithically integrated onto the surfaces of photodiodes or VCSEL fabricated on InP based materials. For these two devices, we demonstrated that the detected or emitted wavelength can be selected on a tuning range of more than 70 nm in the case of the photodiode, and of more than 20 nm in the case of VCSEL.
Published: 2019

9. Liquid crystal-based tunable photodetector operating in the telecom C-band

Author: Mehdi Alouini, Benjamin Boisnard, Christophe Levallois, Laurent Dupont, Sophie Bouchoule, Benattou Sadani, Véronique Bardinal, Salvatore Pes, Cyril Paranthoen, Thierry Camps, Jean-Baptiste Doucet, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-14-ASTR-0007-01, Agence Nationale de la Recherche, ARED-VELOCE 8917, Conseil Régional de Bretagne, Direction Générale de l’Armement, ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)
Subjects: Photocurrent, Amplified spontaneous emission, Materials science, business.industry, Photodetector, 02 engineering and technology, LC circuit, 01 natural sciences, Atomic and Molecular Physics, and Optics, Photodiode, law.invention, 010309 optics, Laser linewidth, 020210 optoelectronics & photonics, Optics, Liquid crystal, law, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business, Tunable laser
Abstract: International audience; Liquid crystal (LC) microcells monolithically integrated on the surface of InGaAs based photodiodes (PDs) are demonstrated. These LC microcells acting as tunable Fabry-Perot filters exhibit a wavelength tunability of more than 100 nm around 1550 nm with less than 10V applied voltage. Using a tunable laser operating in the S and C bands, photocurrent measurements are performed. On a 70 nm tuning range covered with a driving voltage lower than 7V, the average sensitivity for the PD is 0.4 A/W and the spectral linewidth of the LC filter remains constant, showing a FWHM of 1.5 nm. Finally, the emission spectrum from an Er-doped fiber is acquired by using this tunable PD as a micro-spectrometer.
Published: 2018

10. Liquid crystal based tunable PIN-photodiodes for detection around 1.55-µm

Author: Laurent Dupont, Véronique Bardinal, Benattou Sadani, Benjamin Boisnard, Christophe Levallois, Jean-Baptiste Doucet, Mehdi Alouini, Thierry Camps, Sophie Bouchoule, Cyril Paranthoen, Salvatore Pes, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), DGA-MRIS and Région Bretagne (grant ARED-VELOCE 8917), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)
Subjects: Materials science, Photodetector, 02 engineering and technology, Photodetection, 01 natural sciences, law.invention, 010309 optics, 020210 optoelectronics & photonics, WDM, law, Liquid crystal, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Photodiodes, business.industry, Optical communications, Photodetectors, Integrated optics, Laser, Photodiode, Full width at half maximum, Wavelength, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Liquid-crystal, business, Tunable laser
Abstract: International audience; In this work, we report InGaAs based photodiodes integrating liquid crystal (LC) microcells resonant microcavity on their surface. The LC microcavities monolithically integrated on the photodiodes act as a wavelength selective filter for the device. Photodetection measurements performed with a tunable laser operating in the telecom S and C bands demonstrated a wavelength sweep for the photodiode from 1480 nm to 1560 nm limited by the tuning range of the laser. This spectral window is covered with a LC driving voltage of 7V only, corresponding to extremely low power consumption. The average sensitivity over the whole spectral range is 0.4 A/W, slightly lower than 0.6 A/W for similar photodiodes that do not integrate such a LC tunable filter. The quality of the filter integrated onto the surfaces of the photodiodes is constant over a large tuning range (70 nm), showing a FWHM of 1.5 nm.
Published: 2018

11. Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices

Author: Jean-Baptiste Doucet, Laurent Dupont, Christophe Levallois, B. Sadani, Emmanuelle Daran, Véronique Bardinal, Cyril Paranthoen, Sophie Bouchoule, B. Boisnard, X. Lafosse, Thierry Camps, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), ANR-15-CE19-0012 DOCT VCSEL, Agence Nationale de la Recherche, ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS)-Université de Rennes 1 (UR1), and Université de Rennes (UNIV-RENNES)
Subjects: dry thick resist, Materials science, Fabrication, 02 engineering and technology, Grating, nanoimprint, film, 01 natural sciences, VCSEL, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, 020210 optoelectronics & photonics, grating, law, 0103 physical sciences, soft transfer, 0202 electrical engineering, electronic engineering, information engineering, Wafer, liquid crystal devices, Electrical and Electronic Engineering, tunable optical filter, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Resist, Optical cavity, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, wafer-scale fabrication, Photonics, business
Abstract: A simple technology is demonstrated for the wafer-scale fabrication of liquid-crystal (LC) microcells that can be integrated in active optoelectronic devices. Fabrication of 1.55- $\mu \text{m}$ tunable Fabry–Perot optical micro-filter arrays is achieved owing to the insertion of a single nanoimprinted polymer grating dedicated to LC alignment and to the soft thermal transfer of a dry thick resist film between two highly reflective mirrors. The filter exhibits a spectral tuning range of 102 nm with only 18 V applied, as well as negligible internal loss, which makes it suitable for being inserted in a laser cavity. This constitutes a key step toward the large-scale integration of widely tunable photonic devices such as vertical-cavity surface-emitting lasers using LC technology.
Published: 2018

12. Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples

Author: Emmanuelle Daran, Véronique Bardinal, Rémi Courson, Laurène Salvi, Thierry Camps, Jean-Baptiste Doucet, Benjamin Reig, Sami Abada, Équipe MICrosystèmes d'Analyse ( LAAS-MICA ), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] ( LAAS ), Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ) -Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ), Service Techniques et Équipements Appliqués à la Microélectronique ( LAAS-TEAM ), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: Materials science, Fabrication, [ SPI.MAT ] Engineering Sciences [physics]/Materials, 02 engineering and technology, 01 natural sciences, thickness uniformity, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, law, Lamination, lamination, Electrical and Electronic Engineering, Composite material, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Deposition (law), Thermal printing, chemistry.chemical_classification, Mechanical Engineering, 010401 analytical chemistry, Epoxy, Polymer, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, SU-8, [ SPI.TRON ] Engineering Sciences [physics]/Electronics, MOEMS, micro-optics, Surface coating, Resist, chemistry, Mechanics of Materials, visual_art, visual_art.visual_art_medium, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, dry thick resist film, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, wafer-scale fabrication, [ SPI.OPTI ] Engineering Sciences [physics]/Optics / Photonic, 0210 nano-technology
Abstract: International audience; A method called " soft thermal printing " (STP) was developed to ensure the optimal transfer of 50-µm-thick dry epoxy resist films (DF-1050) on small-sized samples. The aim was the uniform fabrication of high aspect ratio polymer-based MOEMS (micro-optical-electrical-mechanical system) on small and/or fragile samples, such as GaAs. The printing conditions were optimized, and the resulting thickness uniformity profiles were compared to those obtained via lamination and SU-8 standard spin-coating. Under the best conditions tested, STP and lamination produced similar results, with a maximum deviation to the central thickness of 3% along the sample surface, compared to greater than 40% for SU-8 spin-coating. Both methods were successfully applied to the collective fabrication of DF1050-based MOEMS designed for the dynamic focusing of VCSELs (vertical-cavity surface-emitting lasers). Similar, efficient electro-thermo-mechanical behaviour was obtained in both cases. 2
Published: 2017

13. Lateral Waveguiding Properties of VCSELs for Integrated Optical Monitoring

Author: C. Amat, Chantal Fontaine, Guilhem Almuneau, Véronique Bardinal, Emmanuelle Daran, Charlotte Bringer, Thierry Camps, and M. Suleiman
Subjects: Materials science, business.industry, Physics::Optics, Optical power, Laser, Waveguide (optics), Signal, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, Optics, Transmission (telecommunications), law, Optoelectronics, Spontaneous emission, Electrical and Electronic Engineering, business
Abstract: We have investigated experimentally the optical behaviour of a Vertical-Cavity Surface-Emitting Lasers (VCSEL) when it is used as a lateral waveguide. This provides a better understanding of the mechanisms involved in VCSEL optical power monitoring by integrated lateral detection. The lateral optical spectra as well as the waveguide transmission spectrum have been measured. Their analysis and comparison demonstrate that the lateral signal is mostly coming from the spontaneous emission escaping laterally from the VCSEL and that light is filtered during the propagation and detection processes. This allows us to explain previous results obtained in two different configurations of lateral detection. These results are useful to optimize the lateral detection performances for concrete applications in monitoring or telemetry systems.
Published: 2006

14. Matrix of 10×10 addressed solid propellant microthrusters: Review of the technologies

Author: Phuong Quyên Pham, Carole Rossi, Thierry Camps, Nicolaas F. de Rooij, Danick Briand, and Maxime Dumonteuil
Subjects: Microelectromechanical systems, Propellant, Engineering, Fabrication, business.industry, Nozzle, Metals and Alloys, Electrical engineering, Condensed Matter Physics, Combustion, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Ignition system, Matrix (mathematics), law, Electrical and Electronic Engineering, Aerospace engineering, business, Instrumentation, Microfabrication
Abstract: An EC funded MicroPyros project has permitted to develop the technologies to fabricate, assemble and command solid propellant microthrusters arrays for thrusts of a few of milli Newtons The prototype built for space application has 100 individually addressed ∅ 1.5 mm × 1.5 mm thrusters on 576 mm2. Nozzles’ throats are 250 μm and 500 μm. This paper reviews the prototype structure and details the final processes for the fabrication and assembling. This paper presents also a new addressing technology based on polysilicon threshold elements used for the addressing and heating of each thruster in the array. With polysilicon threshold element, ignition success is of 100% with an input power of 250 mW using a zirconium perchlorate potassium (ZPP) material. Then, the combustion of a glycidyle azide polymer (GAP) is sustained in the chamber and generate thrusts in the range of 0.3–2.3 mN depending of the micronozzle dimension.
Published: 2006

15. Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping

Author: Jean-Baptiste Doucet, Sami Abada, Véronique Bardinal, Benjamin Reig, Thierry Camps, Emmanuelle Daran, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), RENATECH (French Network of Major Technology Centers) within LAAS-CNRS for technological support and Region Midi-Pyrénées (FIAB SU-8 project), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: Fabrication, Materials science, polymer, 02 engineering and technology, VCSEL, law.invention, Vertical-cavity surface-emitting laser, [SPI.MAT]Engineering Sciences [physics]/Materials, 020210 optoelectronics & photonics, collective fabrication, law, Microsystem, self-alignment, 0202 electrical engineering, electronic engineering, information engineering, Micro-Opto-Electro-Mechanical Systems, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, microlens fabrication, Microelectromechanical systems, Multi-mode optical fiber, business.industry, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Lens (optics), MOEMS, MEMS, microoptics, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, electro-thermal actuation
Abstract: In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III–V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.
Published: 2014

16. Uniform fabrication of thick SU-8 patterns on small-sized wafers for micro-optics applications

Author: Jean-Baptiste Doucet, Benjamin Reig, Stéphane Charlot, Thierry Camps, Emmanuelle Daran, Véronique Bardinal, and Sami Abada
Subjects: Fabrication, Materials science, business.industry, engineering.material, Nanoimprint lithography, law.invention, Optics, Coating, Resist, law, Thermal, engineering, Wafer, Photolithography, Air gap (plumbing), business
Abstract: This paper reports on an alternative method for precise and uniform fabrication of 100μm-thick SU-8 microstructures on small-sized or non-circular samples. Standard spin-coating of high-viscosity resists is indeed known to induce large edge beads, leading to an air gap between the mask and the SU-8 photo-resist surface during UV photolithography. This results in a non uniform thickness deposition and in a poor pattern definition. This problem becomes highly critical in the case of small-sized samples. To overcome it, we have developed a soft thermal imprint method based on the use of a nano-imprint equipment and applicable whatever sample fragility, shape and size (from 2cm to 6 inches). After final photolithography, the SU8 pattern thickness variation profile is measured. Thickness uniformity is improved from 30% to 5% with a 5μm maximal deviation to the target value over 2cm-long samples.
Published: 2014

17. Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

Author: Aurélien Bruyant, M. Renault, Anna Rumyantseva, Thierry Camps, David Barat, Ihab Dika, Emmanuelle Daran, Véronique Bardinal, Jean-Baptiste Doucet, Benjamin Reig, Olivier Soppera, Jean-Pierre Malval, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Institut de Science des Matériaux de Mulhouse (IS2M), Matériaux et nanosciences d'Alsace, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Université Toulouse Capitole (UT Capitole), Institut National des Sciences Appliquées (INSA)-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse Capitole (UT Capitole), Université Fédérale Toulouse Midi-Pyrénées, Équipe Photonique (LAAS-PHOTO), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), Bardinal, Véronique, Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)
Subjects: Fabrication, Materials science, [SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Physics::Optics, 02 engineering and technology, [SPI.MAT] Engineering Sciences [physics]/Materials, Micro-optics, 01 natural sciences, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, Optics, law, 0103 physical sciences, Sensitivity (control systems), Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Diode, 010302 applied physics, Microlens, Quenching, business.industry, Laser writing, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, [SPI.TRON] Engineering Sciences [physics]/Electronics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Semiconductor, Polymerization, Photo-polymerization, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Maskless fabrication, 0210 nano-technology, business, Optical probing
Abstract: International audience; We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.
Published: 2013

18. Spontaneous emission and lateral photo-detection in 'vertical' micro-cavities

Author: Thierry Camps, Emmanuelle Daran, Véronique Bardinal, and Yann G. Boucher
Subjects: Physics, business.industry, Physics::Optics, General Physics and Astronomy, Micro cavities, Laser, law.invention, Vertical-cavity surface-emitting laser, Transverse plane, law, Optoelectronics, Spontaneous emission, Atomic physics, business
Abstract: Transverse guiding mechanisms enable one to monitor the laser behaviour of a VCSEL by measuring the photo-current in the neighbouring cavity. They are described by extended (3 x 3) transfer matrices including sources of spontaneous emission.
Published: 2007

19. Miniaturized Scanning Near-Field Microscope Sensor Based on Optical Feedback Inside a Single-Mode Oxide-Confined Vertical-Cavity Surface-Emitting Laser

Author: Thierry Camps, P. Dubreuil, Jean-Baptiste Doucet, Christophe Gorecki, Charlotte Bringer, Chantal Fontaine, Véronique Bardinal, and Dominique Heinis
Subjects: Optical amplifier, Distributed feedback laser, Materials science, Microscope, Physics and Astronomy (miscellaneous), business.industry, General Engineering, Single-mode optical fiber, Physics::Optics, General Physics and Astronomy, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optical cavity, Optoelectronics, Near-field scanning optical microscope, business
Abstract: We propose and demonstrate an original concept of a near-field sensor using the optical feedback properties of a vertical cavity surface-emitting laser (VCSEL) as the detection principle. This is based on the monitoring perturbation induced in the laser cavity by the backscattered light coming from the specimen. Test images confirm the efficiency of the proposed scanning near-field optical microscopy (SNOM) and a solution for the integration of the proposed architecture is given.
Published: 2003

20. A miniaturized VCSEL-based system for optical sensing in a microfluidic channel

Author: Véronique Bardinal, Emmanuelle Daran, Benjamin Reig, Jean-Baptiste Doucet, and Thierry Camps
Subjects: Microlens, Fabrication, Materials science, business.industry, Microfluidics, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optoelectronics, Micro-Opto-Electro-Mechanical Systems, business, Biosensor, Microfabrication
Abstract: We report on design and fabrication of a VCSEL-based Micro-Optical-Electrical-Mechanical-System (MOEMS) suited for portable optical biosensors. It is based on a tunable polymer microlens directly integrated on the surface of the VCSEL laser device. We demonstrate that this method leads to a VCSEL focusing at a working distance of ∼300μm suitable for optical analysis in a microfluidic channel. Moreover, as the microlens can be vertically moved up to 8μm with an applied power of only 43 mW (3V), a dynamic scan of the laser spot is possible over 100μm. This integrated approach opens new insights for the use of VCSEL arrays in miniaturized optical sensors.
Published: 2012

21. Photo-chemical study and optical properties of microtips self- written on vertical laser diodes using NIR photo-polymerization

Author: Olivier Soppera, Thierry Camps, Ihab Dika, D. Barat, Jean-Baptiste Doucet, Jean-Pierre Malval, Aurélien Bruyant, Pierluigi Debernardi, M. Renault, Emmanuelle Daran, Véronique Bardinal, Beatriu Reig, Anna Rumyantseva, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)
Subjects: Fabrication, Materials science, Optical fiber, Infrared Rays, Polymers, Surface Properties, High numerical aperture optics, Physics::Optics, Context (language use), 02 engineering and technology, 01 natural sciences, law.invention, Vertical-cavity surface-emitting laser, Molecular Imprinting, Optics, law, 0103 physical sciences, Vertical cavity surface emitting lasers, Wafer, Optical feedback, Diode, 010302 applied physics, business.industry, Single-mode optical fiber, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Refractometry, Scanning probe microscopy, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Lasers, Semiconductor, 0210 nano-technology, business, Scanning electron microscopy, Diode lasers
Abstract: International audience; Near infra-red (NIR) self-guided photo-polymerization is investigated in the context of micro-optics photo-fabrication on VCSELs (Vertical-Cavity Surface Emitting Lasers). We present the optimized process we have developed to allow for a collective fabrication on III-V devices wafers under real-time optical monitoring. The influence of photo-chemical parameters on final micro-elements dimensions is studied for two types of single mode 760nm VCSELs. The difference of the resulting tip shape between the two lasers is due to the strong differences of their emissions, as they are nicely reproduced by the computed near-field profiles. The tip shapes are also compared to those produced by the light emitted by an optical fiber and differences with VCSEL tips are discussed. Also the VCSEL characteristics with fabricated tips are discussed and found in good agreement with optical modeling.
Published: 2012

22. Polymer tunable microlens arrays suitable for VCSEL beam control

Author: Thierry Camps, Christophe Levallois, Véronique Bardinal, Jean-Baptiste Doucet, Jérôme Launay, Emmanuelle Daran, Benjamin Reig, David Bourrier, Yann G. Boucher, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Rennes (UR)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS)
Subjects: Materials science, Fabrication, polymer, 02 engineering and technology, 01 natural sciences, VCSEL, law.invention, Vertical-cavity surface-emitting laser, Optics, ABCD formalism, law, 0103 physical sciences, tunable lens, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010302 applied physics, Ray transfer matrix analysis, Microlens, business.industry, 021001 nanoscience & nanotechnology, Laser, SU-8, Lens (optics), micro-optics, MOEMS, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, wafer-scale integration, Refractive index
Abstract: We report on a simple method for the collective fabrication of polymer tunable microlens arrays suitable for VCSEL active beam shaping. Its principle is based on a SU-8 suspended membrane, surmounted by a polymer microlens, and thermally actuated to achieve a vertical displacement of lens plane. SU-8 resist presents many advantages for MOEMS fabrication, as this resist allows for high aspect ratio patterns and high transparency. In addition, it exhibits a thermal expansion coefficient suitable for thermal actuation. Moreover, this kind of polymer MOEMS can be fabricated on VCSEL arrays with footprints as low as 5 00x500µm² enabling a rapid, low co st and wafer-scale integration technology. We have successfully fabricated this MOEMS on a glass substrate by means of a SU-8 double exposure method and we report on a vertical di splacement of 8µm under an applied power of 43mW (3V). A good agreement with the theoretical thermo-mechanical behavi or is found. Moreover, optical measurem ents of microlens focus displacement under actuation are presented. We evaluate analytically the focus properties of the system under coherent laser illumination, using the classical ABCD matrix formalism of Gaussian transformation optics. The same approach enables one to assess its tolerance to opto-geometrical parameters, such as refractive index or dioptre curvature. As a wide range of initial gaps between the membrane and the substrate can be chosen, this MOEMS technology opens new insights for dynamic control of VCSEL beam or for tunable VCSELs fabrication. Keywords: VCSEL, micro-optics, tunable lens, polymer, SU-8, MOEMS, wafer-scale integration, ABCD formalism
Published: 2012

23. VCSEL beam control with collective and self-aligned polymer technologies

Author: Thierry Camps, Emmanuelle Daran, Jean-Baptiste Doucet, Benjamin Reig, Olivier Soppera, Véronique Bardinal, Pierluigi Debernardi, and D. Barat
Subjects: Microelectromechanical systems, Microlens, Fabrication, Materials science, business.industry, Single-mode optical fiber, Laser, law.invention, Vertical-cavity surface-emitting laser, Lens (optics), Optics, law, Optical cavity, Optoelectronics, business
Abstract: We present recent results on the integration of polymer microlenses on single mode Vertical-Cavity Surface-Emitting Lasers (VCSELs) to achieve output beam control. We describe in particular low cost and collective fabrication methods developed to allow for a self-alignment of the lens with the laser source. These approaches are based either on surface tension effects or on a self-writing process using novel Near Infra-Red (NIR) photopolymers. Results on beam collimation at 850nm are presented and compared to a fully vectorial and three-dimensional optical model that takes into account the complete geometry of laser resonator is used. Results on short distance focusing using self-aligned microtips are presented. Considerations to achieve an active beam control by means of polymer-based MEMS (Micro-electro-mechanical System) are also discussed. Potential applications may concern the improvement of VCSEL insertion in optical interconnects or sensing systems, as well as the fabrication of optical micro-probes for near-field microscopy.
Published: 2012

24. Polymer MEMS for the active control of VCSEL beam

Author: Thierry Camps, Jean-Baptiste Doucet, Véronique Bardinal, Emmanuelle Daran, Beatriu Reig, and D. Barat
Subjects: Microlens, Microelectromechanical systems, Materials science, business.industry, Physics::Optics, Laser, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optics, law, Physics::Accelerator Physics, Optoelectronics, Vertical displacement, business, Actuator, Beam (structure)
Abstract: Beam control of VCSELs (Vertical Cavity Surface Emitting Lasers) is a key topic to integrate these laser diodes in microsystems for instrumentation or biomedical application [1]. We report here on a simple method to control dynamically the beam shape of VCSELs devices. Our approach is based on an electro-thermal actuator including a polymer membrane, a heating electrode and a polymer microlens (fig.1 a). The operation principle is the following: the laser beam waist position can be tune thanks to the membrane vertical displacement induced by varying the applied current. Optical and thermo-mechanical optimizations of membrane geometry have been carried out. These studies point out that a vertical deflection of 2µm should be obtained with a thermal gradient of 100°C [2], leading to a corresponding waist displacement of few hundred microns.
Published: 2011

25. Spotted Custom Lenses to Tailor the Divergence of Vertical-Cavity Surface-Emitting Lasers

Author: Christophe Levallois, Véronique Bardinal, Thierry Leichle, Guilhem Almuneau, Emmanuelle Daran, Corinne Vergnenègre, Thierry Camps, Benjamin Reig, Jean-Baptiste Doucet, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS)
Subjects: Materials science, Cantilever, Fabrication, lens, polymer, Physics::Optics, 02 engineering and technology, Collimated light, law.invention, Semiconductor laser theory, 020210 optoelectronics & photonics, Optics, law, 0202 electrical engineering, electronic engineering, information engineering, vertical-cavity surface-emitting laser (VCSEL), Electrical and Electronic Engineering, business.industry, collimation, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, SU-8, Lens (optics), micro-optics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, 0210 nano-technology, business, Lasing threshold, Beam divergence
Abstract: International audience; We demonstrate the output beam collimation of GaAs-based vertical-cavity surface-emitting lasers by means of self-aligned polymer microlenses deposited on SU-8 pedestals using a cantilever-based spotter. We show that this fabrication technique ensures a reproducible lens shape because the contact angle and the deposited volume are constant for a given surface. Device properties are presented and compared to optical beam propagation modeling results. We demonstrate that the final beam divergence is only controlled by pedestal design parameters and can be reduced with this method by a factor 10 (to 1.2° for single-mode devices) with no significant lasing performance modification.
Published: 2010

26. Design of active lens for VCSEL collimation

Author: David Bourrier, Corinne Vergnenègre, Emmanuelle Daran, Thierry Camps, B. Reig, and Véronique Bardinal
Subjects: Microlens, Materials science, business.industry, Physics::Optics, Collimated light, Displacement (vector), Vertical-cavity surface-emitting laser, Semiconductor laser theory, law.invention, Lens (optics), Optics, law, Optoelectronics, Actuator, business, Beam (structure)
Abstract: Active control of VCSELs beam properties is a key issue to improve their integration in microsystems. We have designed a micro-optical system that allows for a dynamic displacement of the VCSEL beam. It consists of a polymer microlens associated to a SU-8 membrane vertically moved by means of a thermal actuator. This approach is suitable with laser sources arrays. We present results on optical design demonstrating that a small deflection of the membrane (2μm) could lead to a large displacement of the beam waist vertical position (in the millimetric range). Thermomechanical modelling is performed to evaluate the maximum membrane displacement achievable with this system. Finally, first feasibility results are presented.
Published: 2010

27. Micro-optics on VCSELs using NIR photopolymers

Author: Thierry Camps, Colette Turck, Emmanuelle Daran, Véronique Bardinal, D. Barat, Jean-Pierre Malval, Daniel Lougnot, Benjamin Reig, Jean-Baptiste Doucet, Olivier Soppera, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Composants à Nanostructure pour le moyen infrarouge (NANOMIR), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Photomatériaux pour l'Optique et les Nanotechnologies (PHOTON LRC 7228), and Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))
Subjects: Materials science, Fabrication, business.industry, Optical communication, Physics::Optics, [CHIM.MATE]Chemical Sciences/Material chemistry, Laser, law.invention, Vertical-cavity surface-emitting laser, Semiconductor laser theory, Lens (optics), Optics, [CHIM.POLY]Chemical Sciences/Polymers, law, Optoelectronics, Photolithography, Photonics, business, ComputingMilieux_MISCELLANEOUS
Abstract: Laser beam shaping is a key issue for the photonic integration of VCSEL sources. Most of the techniques proposed to integrate micro-optics elements onto VCSEL devices imply either a hybrid assembly or a photolithography step, whose precision limits the accuracy of lens alignment relatively to the VCSEL source. We present here a new method for self-fabrication of microtips on Vertical-Cavity Surface-Emitting Lasers (VCSELs) by means of Near Infra- Red (NIR) photo-polymerization. This approach is based on a single fabrication step, implementing novel photopolymers sensitive at the lasing wavelength. Consequently the process is triggered by the laser source itself and can be applied easily to VCSEL devices during their electro-optic characterization. The method we have developed for tips fabrication is detailed as well as corresponding optical properties. The applications of this new and simple method concern laser light focusing and collimation for integrated micro-systems, coupling to fibers for optical communications as well as novel micro-probes fabrication for near-field optical microscopy.
Published: 2010

28. Study, simulation and manufacturing of new Geiger-APD for applications in astrophysics and biology

Author: Daniel Esteve, K. Jradi, A. Le Padellec, A.R. Bazer-Bachi, Thierry Camps, and Denis Pellion
Subjects: Physics, Photomultiplier, Photon, business.industry, Dark count rate, Avalanche photodiode, law.invention, Luminous flux, Optics, law, Geiger counter, Optoelectronics, Photonics, business, Image resolution
Abstract: Nowadays, there are two types of sensors to detect the low luminous flux, PMT (PhotoMultiplier Tube) and Geiger-APD (Geiger Avalanche PhotoDiode). The Geiger-APD is a component on Silicon that was developed in the early 90s to detect very low light flux, as is currently the PMT. The main advantages of these devices on the PMT are a very high sensitivity to light (single photon), a very high time resolution (
Published: 2010

29. VCSEL collimation using self-aligned integrated polymer microlenses

Author: Thierry Leichle, Emmanuelle Daran, Thierry Camps, Christophe Levallois, Corinne Vergnenègre, Jean-Baptiste Doucet, Véronique Bardinal, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université de Toulouse (UT)
Subjects: Materials science, Fabrication, semiconductor laser arrays, optical design techniques, 02 engineering and technology, optical fabrication, Photoresist, 01 natural sciences, surface topography measurement, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, 010309 optics, surface emitting lasers, 020210 optoelectronics & photonics, Optics, microlenses, law, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, laser cavity resonators, optical collimators, micromechanical devices, Microlens, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], optical polymers, business.industry, laser beams, Laser, Lens (optics), integrated optics, photoresists, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Photolithography, business
Abstract: International audience; We report on the design and fabrication of polymer microlenses fabricated on patterned SU-8 layers in view of integrating microlenses on VCSEL arrays for laser beam shaping. For a standard top-emitting VCSEL, the lens has to be fabricated on a thick intermediate layer (pedestal) whose optimal thickness can be modelled as a function of the initial and of the aimed optical properties of the VCSEL beam. In this work, pedestals are fabricated with SU-8, which is a negative-tone photoresist transparent at the lasing wavelength. Lens deposition is realized using a robotized silicon microcantilever spotter technique after a simple SU-8 photolithography step in order to define high aspect ratio cylindrical pedestals with wide range diameters [30-140 μm]. The effect of pedestal diameter on the final contact angle and curvature radius has been investigated using non contact optical profilometry and scanning electron microscopy. We show that this technique leads to a complete delimitation of the polymer droplets and to a better control of the final lens size. Moreover, lens positioning is fully ensured by the self-alignment of the droplet with the pillar center and consequently with the VCSEL source, and allows for meeting the stringent requirements on alignments.
Published: 2008

30. Fabrication and characterization of microlens arrays using a cantilever-based spotter

Author: Heidi Ottevaere, Véronique Bardinal, Christophe Levallois, Hugo Thienpont, Corinne Vergnenègre, Emmanuelle Daran, Thierry Camps, Thierry Leichle, Jean-Baptiste Doucet, Véronique Conédéra, Franck Carcenac, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Department of Applied Physics and Photonics [Brussels] (TONA), Vrije Universiteit Brussel (VUB), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), and Applied Physics and Photonics
Subjects: Fabrication, Cantilever, Materials science, Scanning electron microscope, 02 engineering and technology, OCIS: 160.5470, 220.3630, 220.4000, 350.3950, Micro-optics, Optical polymers and other organic optical materials, 01 natural sciences, law.invention, 010309 optics, Optics, Optical microscope, law, 0103 physical sciences, Surface roughness, Focal length, Micro-optical devices and technology, Lenses, Microlens, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, Integrated optics, Optical Design and Fabrication, 021001 nanoscience & nanotechnology, MICROSYSTEM, LENSES, GLASS, Atomic and Molecular Physics, and Optics, Interferometry, Polymer reactions and polymerization, Optical materials, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, 0210 nano-technology, business
Abstract: We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25-130 mu m] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181 mu m] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than lambda/14. (C) 2007 Optical Society of America.
Published: 2007

31. Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever based microsystem

Author: Yvan Segui, Véronique Conédéra, Emmanuelle Daran, Léonard Gavin-Djidina, Jean-Bernard Pourciel, Thierry Camps, Thierry Leichle, Mathieu Guirardel, Corinne Vergnenègre, and Véronique Bardinal
Subjects: Microelectromechanical systems, Microlens, Fabrication, Materials science, Cantilever, business.industry, law.invention, Vertical-cavity surface-emitting laser, Lens (optics), Optics, law, Microsystem, Optoelectronics, Deposition (phase transition), business
Abstract: We report on the design and the fabrication of refractive microlenses using a polymer droplet deposition microsystem. The principle of this original technique consists in monomer droplets deposition using a robotized silicon-microcantilevers array. The advantages of this technique rely on the control of droplets dimensions and the positioning accuracy. Microlenses have been first modelled to optimize their geometrical parameters for VCSEL collimation. Results of lens optimization as well as the influence of the fabrication parameters fluctuations on the final divergence are detailed. First results on droplets deposition are presented, demonstrating the technique feasibility. Finally, the possibility of the modification of the surface energy to obtain the most suited contact angle before deposition is also discussed.
Published: 2006

32. Electrical spin injection into p-doped quantum dots through a tunnel barrier

Author: H. Jaffrès, Xavier Marie, Pascal Gallo, Cyrile Deranlot, Thierry Camps, Thierry Amand, P. H. Binh, Richard Mattana, Laurent Lombez, Hélène Carrère, J. L. Gauffier, Alexandre Arnoult, P. F. Braun, Chantal Fontaine, Pierre Renucci, Bernhard Urbaszek, and J.-M. George
Subjects: Photoluminescence, Materials science, Physics and Astronomy (miscellaneous), business.industry, Condensed Matter::Other, Physics::Optics, FOS: Physical sciences, Electron, Electroluminescence, Polarization (waves), Condensed Matter::Mesoscopic Systems and Quantum Hall Effect, law.invention, Magnetic field, Condensed Matter - Other Condensed Matter, Condensed Matter::Materials Science, law, Quantum dot, Condensed Matter::Superconductivity, Optoelectronics, business, Circular polarization, Light-emitting diode, Other Condensed Matter (cond-mat.other)
Abstract: We have demonstrated by electroluminescence the injection of spin polarized electrons through Co/Al2O3/GaAs tunnel barrier into p-doped InAs/GaAs quantum dots embedded in a PIN GaAs light emitting diode. The spin relaxation processes in the p-doped quantum dots are characterized independently by optical measurements (time and polarization resolved photoluminescence). The measured electroluminescence circular polarization is about 15 % at low temperature in a 2T magnetic field, leading to an estimation of the electrical spin injection yield of 35%. Moreover, this electroluminescence circular polarization is stable up to 70 K., Comment: 6 pages, 4 figures
Published: 2006
Full Text: View/download PDF

33. Integrated optical detection subsystem for functional genomic analysis biosensor

Author: Charlotte Bringer, Corinne Vergnenègre, Chantal Fontaine, Véronique Bardinal, Thierry Camps, and A. Muñoz-Yagüe
Subjects: Cantilever, Fabrication, Materials science, genetic structures, business.industry, Surface stress, Nanotechnology, Laser, eye diseases, law.invention, law, Deflection (engineering), Microsystem, Nucleic acid, Optoelectronics, sense organs, business, Biosensor
Abstract: We present an optical microsystem aimed to be integrated into a nanomechanical biosensor for functional genomic analysis. The operation principle is based on a sub-nanometer resolution optical measurement of a cantilever deflection caused by a surface stress when the target nucleic acid sample hybridises to the nucleic acid probe on the active side of the cantilever. The resulting deflection, of the order of nanometers, is measured by an optical system, in which a laser beam reflects off the back of the cantilever to a position sensitive photo-detector. We report in this paper on the design, fabrication and test of the optical head associated with an optical coupling system which enables detection of the presence of target nucleic acid on the cantilever by amplifying the deflection caused by the stress.
Published: 2005

34. Detection of lateral spontaneous emission for VCSEL monitoring

Author: Guilhem Almuneau, Emmanuelle Daran, Jean-Baptiste Doucet, Véronique Bardinal, Charlotte Bringer, Chantal Fontaine, P. Dubreuil, Yann G. Boucher, Olivier Gauthier-Lafaye, and Thierry Camps
Subjects: Microlens, Materials science, business.industry, Physics::Optics, Photodetector, Photodetection, Laser, Vertical-cavity surface-emitting laser, law.invention, Nonlinear Sciences::Adaptation and Self-Organizing Systems, Optics, law, Optoelectronics, Spontaneous emission, business, Lasing threshold, Quantum well
Abstract: VCSELs (Vertical Cavity Surface Emitting Lasers) are nowadays more and more exploited in optoelectronic applications, monitoring their lasing power in a compact and low cost manner becomes crucial. To collect and control the output light, an external photodetector associated with an optical microlens array can be used. Integrated solutions based on the use of a bulk or QW photodetection section added in single-or double-cavity structures have also been proposed. Here, we have investigated a simpler solution based on a standard VCSEL array. Light emitted by a VCSEL has been electrically detected by adjacent VCSELs located in the same array, using in plane optical waveguiding of spontaneous emission in the intrinsic central zone of the devices. We show that the detected photocurrent can be related to the power of the emitting VCSEL. Signal intensity has been studied as a function of VCSELs distance. This method could lead to a more efficient way to monitor VCSEL emission.
Published: 2004

35. Integrated optical coupling element for functional genomic analysis biosensor

Author: Corinne Vergnenègre, Véronique Bardinal, A. Muñoz-Yagüe, Thierry Camps, Chantal Fontaine, and Charlotte Bringer
Subjects: chemistry.chemical_classification, Cantilever, Materials science, business.industry, Surface stress, Nanotechnology, Polymer, Laser, law.invention, chemistry, law, Deflection (engineering), Microsystem, Nucleic acid, Optoelectronics, business, Biosensor
Abstract: We present here a design of a coupling element aimed to be integrated into a nanomechanical biosensor for functional genomic analysis. The operation principle is based on a sub-nanometer resolution optical measurement of a cantilever deflection caused by a surface stress when the target nucleic acid sample hybridizes to the nucleic acid probe on the active side of the cantilever. The resulting deflection, of the order of nanometers, is measured by an optical system, in which a laser beam reflects off the back of the cantilever to a position sensitive photo-detector. We study in this paper three polymer optical coupling systems which could allow to detect the presence of target nucleic acid on the cantilever by amplifying the deflection caused by the stress.
Published: 2004

36. Electronic circuitry development in a micropyrotechnic system for micropropulsion applications

Author: Josep Samitier, Jaime X. Lopez, P. Miribel, Thierry Camps, Jose M. Lopez-Villegas, Manuel Puig-Vidal, Maxime Dumonteuil, Carole Rossi, and E. Montane
Subjects: Propellant, Materials science, Nozzle, Contact resistance, Mechanical engineering, law.invention, Ignition system, law, visual_art, Electronic component, visual_art.visual_art_medium, Electronics, Electric power, Resistor
Abstract: An electronic circuitry is proposed and implemented to optimize the ignition process and the robustness of a microthruster. The principle is based on the integration of propellant material within a micromachined system. The operational concept is simply based on the combustion of an energetic propellant stored in a micromachined chamber. Each thruster contains three parts (heater, chamber, nozzle). Due to the one shot characteristic, microthrusters are fabricated in 2D array configuration. For the functioning of this kind of system, one critical point is the optimization of the ignition process as a function of the power schedule delivered by electronic devices. One particular attention has been paid on the design and implementation of an electronic chip to control and optimize the system ignition. Ignition process is triggered by electrical power delivered to a polysilicon resistance in contact with the propellant. The resistance is used to sense the temperature on the propellant which is in contact. Temperature of the microthruster node before the ignition is monitored via the electronic circuitry. A pre-heating process before ignition seems to be a good methodology to optimize the ignition process. Pre-heating temperature and pre-heating time are critical parameters to be adjusted. Simulation and experimental results will deeply contribute to improve the micropyrotechnic system. This paper will discuss all these point.
Published: 2003

37. Dual-purpose single-cavity oxide-confined VCSEL photodetector

Author: Charlotte Bringer, Chantal Fontaine, Thierry Camps, Laurent Averseng, A. Muñoz-Yagüe, Véronique Bardinal, and P. Dubreuil
Subjects: Photocurrent, Materials science, business.industry, Single-mode optical fiber, Photodetector, Photodetection, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, Optical path, law, Optoelectronics, business, Refractive index
Abstract: The increasing interest for high-speed, compact and low cost devices for optoelectronic applications such as bi-directional optical interconnects, optical imaging or telemetry has recently led to focus on the ability for the vertical-cavity surface-emitting lasers to be used as resonant cavity enhanced photodetectors for dual-purpose applications. Here we present results on design, fabrication and characterization of an oxide-confined 830nm top-emitting laser for self-aligned emission and photodetection. In this single-cavity GaAs-based device, submitted alternatively to forward and reverse bias, the oxide layer is not only used to obtain a single mode emission but also to enable decoupling between a small surface emission and a large surface detection. However the optical path is observed to change because of the refractive index difference between the oxidized and non-oxidized zones of the structure. This leads to a detrimental blue-shift on the wavelength of the Fabry-Perot cavity mode. In this work, we demonstrate this effect in photodetection by the means of spatially localized photocurrent and reflectance spectra measurements. These results show that the photocurrent is correctly collected in the whole device despite of the presence of an oxide layer. The results obtained on selective etching for optimisation of this dual-purpose device are presented.
Published: 2003

38. Experimental demonstration of oxide-mode influence in a dual-purpose oxide-confined vertical-cavity surface-emitting laser resonant detector

Author: Véronique Bardinal, Thierry Camps, Jérôme Polesel-Maris, Eléna Bedel-Pereira, P. Dubreuil, Chantal Fontaine, Laurent Averseng, Charlotte Bringer, Corinne Vergnenègre, A. Muñoz-Yagüe, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Équipe Photonique (LAAS-PHOTO), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), and Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole)
Subjects: Materials science, Physics and Astronomy (miscellaneous), Physics::Optics, 02 engineering and technology, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, [SPI.MAT]Engineering Sciences [physics]/Materials, VCSELs Lasers à Cavité Verticale à Emission par la Surface, Optics, law, 0202 electrical engineering, electronic engineering, information engineering, Laser power scaling, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Distributed feedback laser, business.industry, 020208 electrical & electronic engineering, Far-infrared laser, 021001 nanoscience & nanotechnology, Laser, [SPI.TRON]Engineering Sciences [physics]/Electronics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, oxide, 0210 nano-technology, business, Laser Doppler vibrometer, Tunable laser, Photodetection
Abstract: International audience; We report on design, fabrication, and characterization of a vertical-cavity surface-emitting laser ͑VCSEL͒ used as a resonant-cavity-enhanced detector for dual-purpose application. The geometry of this oxide-confined VCSEL takes advantage of the properties of the buried oxide layer to allow both single-mode laser emission and detection on a large surface. Here, we demonstrate the presence and the influence of oxide modes in the optical sensitivity spectrum of the device through spatially localized detection measurements. The wavelength of these modes has been correlated to the dip on the reflectivity spectrum measured at the same area of the device surface. The increasing need for high-speed, efficient, compact, and low-cost devices for optoelectronic applications such as bidirectional optical interconnects, optical imaging, or telem-etry has recently led to focus on the optimization of dual-purpose vertical-cavity surface-emitting lasers ͑VCSELs͒ used as resonant cavity enhanced ͑RCE͒ photodetectors.
Published: 2002

39. Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

Author: Maëlenn Aufray, Claire Tendero, Thierry Camps, Benjamin Reig, Alain Lamure, Véronique Bardinal, Emmanuelle Daran, Jean-Baptiste Doucet, Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Université Toulouse - Jean Jaurès - UT2J (FRANCE), Université Toulouse 1 Capitole - UT1 (FRANCE), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC), Institut National Polytechnique de Toulouse - INPT (FRANCE), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université Toulouse III - Paul Sabatier (UT3), and Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP)
Subjects: VCSELs, Materials science, Physics and Astronomy (miscellaneous), Matériaux, General Physics and Astronomy, Temperature cycling, Micro-optics, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Optics, Reliability (semiconductor), law, Thermal, Wafer, Microlens, business.industry, General Engineering, [CHIM.MATE]Chemical Sciences/Material chemistry, Epoxy, Laser, SU-8, Resist, Wet thermal, visual_art, visual_art.visual_art_medium, business
Abstract: International audience; We present experimental data on the reliability of SU-8 polymer when used as a core material for the integration of microlenses on vertical-cavity surface-emitting lasers (VCSELs). The respective effects of a hot and humid environment on structural, mechanical and optical properties of this epoxy resist are investigated. High aspect-ratio SU-8 micropillars are found to keep a good surface morphology and a stable optical transmission, as well as a good adherence on the wafer. Thermal cycling is also studied to check material stability under electro-thermal actuation in SU-8 micro-opto-electro-mechanical system (MOEMS). These results are of great importance for the collective integration of low-cost SU-8-based passive or active microlens arrays onto VCSELs wafers for optical interconnects and optical sensing applications.
Published: 2014

40. Study of the photodetection behaviour of oxide-confined vertical-cavity surface-emitting lasers (VCSELs)

Author: P. Dubreuil, Thierry Camps, Corinne Vergnenègre, Charlotte Bringer, Chantal Fontaine, Eléna Bedel-Pereira, L. Averseng, Véronique Bardinal, and Jérôme Polesel-Maris
Subjects: Physics, Surface (mathematics), business.industry, Detector, Oxide, Photodetection, Condensed Matter Physics, Laser, Reflectivity, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Vertical-cavity surface-emitting laser, Condensed Matter::Materials Science, chemistry.chemical_compound, Optics, chemistry, law, Optoelectronics, Physics::Chemical Physics, business
Abstract: We present a theoretical and experimental study of oxide-confined top-emitting VCSELs used as resonant detectors. Oxide-mode influence on the detection spectrum is discussed.
Published: 2003

41. Fabrication of polymer-based optical microsystem arrays suited for the active focusing of vertical laser diodes

Author: Emmanuelle Daran, Jean-Yves Fourniols, Thierry Camps, Véronique Bardinal, David Bourrier, Jean-Baptiste Doucet, B. Reig, and Jérôme Launay
Subjects: Materials science, Fabrication, business.industry, Mechanical Engineering, Laser, Electronic, Optical and Magnetic Materials, law.invention, Vertical-cavity surface-emitting laser, Optics, Mechanics of Materials, law, Microsystem, Thermal, Optoelectronics, Vertical displacement, Electrical and Electronic Engineering, business, Beam (structure), Diode
Abstract: We present a low-cost fabrication technique of a polymer-based micro-optical-electrical-mechanical systems (MOEMS) suited for the dynamic focusing of VCSELs (vertical-cavity surface-emitting lasers). A simple method based on an SU(8) double exposure is proposed for the collective integration of small footprint transparent suspended membrane arrays on vertical laser diodes. We demonstrate that this kind of MOEMS can provide under thermal actuation a vertical displacement of around 0.2 ?m W?1?over a maximal range of 8??m. As a wide range of initial gaps between the membrane and the laser source can be chosen, this approach opens new insights into the dynamic control of the VCSEL beam waist position as well as for tunable VCSEL fabrication.
Published: 2012

42. Free engineering of buried oxide patterns in GaAs/AlAs epitaxial structures

Author: C. Amat, Guilhem Almuneau, E. Havard, P. Gallo, Thierry Camps, Chantal Fontaine, S. Moumdji, Jean-Baptiste Doucet, Laurent Jalabert, Pascal Dubreuil, Véronique Bardinal, A. Muñoz-Yagüe, Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM)
Subjects: Thermal oxidation, Materials science, business.industry, Electroluminescence, Epitaxy, Buried oxide, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Gallium arsenide, chemistry.chemical_compound, chemistry, law, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Aluminium oxide, Optoelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Electrical and Electronic Engineering, Photolithography, business, Light-emitting diode
Abstract: International audience; The formation of a buried aluminium oxide from the surface of a GaAs/AlAs epitaxial structure is presented and validated through the localised electroluminescence in a light emitting diode device. This oxidation method relies on photolithography, plasma treatment and wet thermal oxidation. This enables localised buried oxide areas to be formed by a vertical oxidation process applied from the surface. Because of this new technology, the shape of the oxidised areas can be freely designed, unlike when using the standard lateral oxidation technology.
Published: 2007

43. High sensitivity integrated lateral detection in VCSELs

Author: Chantal Fontaine, Charlotte Bringer, Jean-Baptiste Doucet, Thierry Camps, P. Dubreuil, Emmanuelle Daran, Guilhem Almuneau, Véronique Bardinal, and C. Amat
Subjects: Photocurrent, Materials science, business.industry, Schottky barrier, Photodetector, Schottky diode, Semiconductor laser theory, Vertical-cavity surface-emitting laser, Photodiode, law.invention, Optics, law, Optoelectronics, Electrical and Electronic Engineering, business, Sensitivity (electronics)
Abstract: A simple and novel design for power monitoring, integrated in a VCSEL, is presented. A Schottky photodiode, placed close to the VCSEL, enables delivery of a photocurrent of several hundred µA from the lateral emitted light, throughout the whole light-current characteristics. It is shown that the Schottky contact significantly reduces the parasitic current in the cavity.
Published: 2005

44. Réalisation de transistors bipolaires à double hétérojonction (DHBT) GaAlAs/GaAs pour circuits intégrés I2L

Author: G. Rey, A. Martins, A. Cazarré, J.P. Bailbe, J. Jamai, J.P. Vannel, A. Marty, J. Tasselli, and Thierry Camps
Subjects: heterojunction bipolar transistors, Semiconductor technology, fabrication, 02 engineering and technology, 01 natural sciences, Gallium arsenide, law.invention, integrated injection logic, chemistry.chemical_compound, offset voltage, law, 0103 physical sciences, I sup 2 L high speed integrated circuits, bipolar integrated circuits, 010302 applied physics, Physics, GaAlAs GaAs, business.industry, DC characteristics, Transistor, aluminium compounds, semiconductor, 021001 nanoscience & nanotechnology, current gain, gallium arsenide, implanted DHBT, Integrated injection logic, chemistry, [PHYS.HIST]Physics [physics]/Physics archives, III V semiconductors, 3 mV, Optoelectronics, 0210 nano-technology, business, semiconductor technology, double heterojunction bipolar transistor
Abstract: Dans cet article, nous montrons l'intérêt du transistor bipolaire à double hétérojonction (DHBT) pour la filière logique rapide I2L (logique à injection). En effet l'interchangeabilité entre l'émetteur et le collecteur et la liberté de conception résultant de l'utilisation de deux hétérojonctions donnent aux DHBT un grand intérêt dans le domaine des circuits intégrés rapides à grande intégration tels que la logique à injection I2L. L'accent est mis sur le comportement en régime statique de dispositifs d'étude, réalisés par les techniques d'épitaxie par jets moléculaires et d'implantation ionique de magnésium. Les résultats les plus intéressants sont l'obtention de dispositifs symétriques présentant un gain en courant en régime de fonctionnement inverse de 40 pour un gain de 280 en régime normal et de tensions de saturation très faibles de l'ordre de 3 mV.
Published: 1989

Catalog

Books, media, physical & digital resources

See catalog results

Searchworks

Select search scope, currently: Articles Catalog books, media & more in Jio Institute collections Articles journal articles & other e-resources

Search

Search Constraints

Refine your results

Search Limiters

Topic

Publication Year Range

Language

Journal

Database

Publisher

44 results on '"Thierry Camps"'

Search Results

Catalog

Select search scope, currently: Articles

Catalog

books, media & more in Jio Institute collections

Articles

journal articles & other e-resources