1. Microfabrication of DC microarcjets with UV lasers
- Author
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Kosuke Onodera, Itsuro Kimura, Tsuyoshi Noda, and Hideyuki Horisawa
- Subjects
Materials science ,business.industry ,Nozzle ,Metals and Alloys ,Analytical chemistry ,Surfaces and Interfaces ,Plasma ,Laser ,Plasma acceleration ,Cathode ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,Anode ,law ,Materials Chemistry ,High harmonic generation ,Optoelectronics ,business ,Microfabrication - Abstract
Microfabrication of a microarcjet with Fifth-harmonic generation Nd:YAG pulses (wavelength 213 nm) and its plasma acceleration characteristics was investigated. The microarcjet with a rectangular exit of 0.44 mm in height was machined in a 1.2 mm thick quartz plate. For electrodes, Au films of 100 nm in thickness were coated on a divergent part of the nozzle for anode and an inner wall surface for cathode. In operational tests, a stable discharge was observed for mass flow of 1.0 mg/s, discharge current of 6 mA, discharge voltage of 600 V, or 3.6 W input power. With the 3.6 W input power, plasma speed of 1441 m/s and an energy efficiency of 7% were obtained.
- Published
- 2007
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