1. Modeling a grating coupler-based interferometer for far-field-sensing of nanoscale displacements
- Author
-
Federico Galeotti and Andrea Fiore
- Subjects
Materials science ,business.industry ,Dynamic range ,Detector ,Physics::Optics ,Near and far field ,02 engineering and technology ,Grating ,021001 nanoscience & nanotechnology ,Laser ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,Displacement (vector) ,Metrology ,law.invention ,010309 optics ,Interferometry ,Optics ,law ,0103 physical sciences ,0210 nano-technology ,business - Abstract
Sensing displacements at the nanoscale is the basis for many metrology applications, in particular atomic-force microscopy. Displacement sensing with nano-optomechanical structures provides interesting opportunities for integration, but it typically features a small dynamic range due to the near-field nature of the sensor-sample interaction. Here, a far-field sensing approach based on a grating coupler is considered and an analytical model used to tune its performance is introduced. The proposed model allows exploiting the full range of design parameters and thereby optimizing resolution and dynamic range. The compact size of the sensor and the possibility of integrating it with an on-chip laser and detector make it very promising for fully-integrated optical sensing systems.
- Published
- 2021