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1. Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition.

Author

Matsuoka, M., Isotani, S., Miyake, S., Setsuhara, Y., Ogata, K., and Kuratani, N.

Subjects
IONS, ZIRCONIUM oxide, ION bombardment
Abstract

Studies the effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition. Experimental procedures; Results and discussion; Conclusion.

Published
1996
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