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Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition.
- Source :
- Journal of Applied Physics; 7/15/1996, Vol. 80 Issue 2, p1177, 5p, 1 Chart, 4 Graphs
- Publication Year :
- 1996
-
Abstract
- Studies the effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition. Experimental procedures; Results and discussion; Conclusion.
- Subjects :
- IONS
ZIRCONIUM oxide
ION bombardment
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 80
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7662476
- Full Text :
- https://doi.org/10.1063/1.362855