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Start Over Author "Sin, K. S." Topic household electronics
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1. A novel induction heater for chemical vapor deposition.

Author

Ong, C. W., Wong, H. K., Sin, K. S., Yip, S. T., and Chik, K. P.

Subjects
INDUCTION furnaces, HOUSEHOLD electronics, CHEMICAL vapor deposition
Abstract

We report how an induction cooker for household use can be modified for heating substrate or heating gases to high temperature in a chemical vapor deposition system. Only minor changes of the cooker are necessary. Stable substrate temperature as high as 900 °C was achieved with input power of about 1150 W. [ABSTRACT FROM AUTHOR]

Published
1989
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