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A novel induction heater for chemical vapor deposition.
- Source :
- Review of Scientific Instruments; Jun89, Vol. 60 Issue 6, p1174, 3p
- Publication Year :
- 1989
-
Abstract
- We report how an induction cooker for household use can be modified for heating substrate or heating gases to high temperature in a chemical vapor deposition system. Only minor changes of the cooker are necessary. Stable substrate temperature as high as 900 °C was achieved with input power of about 1150 W. [ABSTRACT FROM AUTHOR]
- Subjects :
- INDUCTION furnaces
HOUSEHOLD electronics
CHEMICAL vapor deposition
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 60
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 9784596
- Full Text :
- https://doi.org/10.1063/1.1140281