1. Making Rectangular Apertures In Silicon
- Author
-
Leviton, Douglas B, Jhabvala, Murzy D, Mott, Brent, and Manthripragada, Sridhar
- Subjects
Fabrication Technology - Abstract
Conventional silicon micromachining techniques produce micrometer-sized rectangular apertures. Used to define source and detector openings for measurements of images and scattered light in visible, ultraviolet, and soft x-ray wavelength regions, and as general-purpose optical slits or slit arrays. Rectangular microscopic apertures replace circular pinholes made by puncturing foils with needles or by drilling foils with intense, highly-focused laser beams. Precise photolithography yields apertures of superior geometry.
- Published
- 1994