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Making Rectangular Apertures In Silicon
- Source :
- Laser Tech. Brief.. 2(1)
- Publication Year :
- 1994
- Publisher :
- United States: NASA Center for Aerospace Information (CASI), 1994.
-
Abstract
- Conventional silicon micromachining techniques produce micrometer-sized rectangular apertures. Used to define source and detector openings for measurements of images and scattered light in visible, ultraviolet, and soft x-ray wavelength regions, and as general-purpose optical slits or slit arrays. Rectangular microscopic apertures replace circular pinholes made by puncturing foils with needles or by drilling foils with intense, highly-focused laser beams. Precise photolithography yields apertures of superior geometry.
- Subjects :
- Fabrication Technology
Subjects
Details
- Language :
- English
- Volume :
- 2
- Issue :
- 1
- Database :
- NASA Technical Reports
- Journal :
- Laser Tech. Brief.
- Publication Type :
- Report
- Accession number :
- edsnas.19940000119
- Document Type :
- Report