1. One-Stage Femtosecond Laser-Assisted Deposition of Gold Micropatterns on Dielectric Substrate
- Author
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Tatiana Lipateva, Alexey Lipatiev, Sergey Lotarev, Georgiy Shakhgildyan, Sergey Fedotov, and Vladimir Sigaev
- Subjects
gold nanoparticles ,selective metallization ,gold electrodes ,direct laser writing ,laser-induced backside wet etching ,chemical liquid-phase deposition ,Technology ,Electrical engineering. Electronics. Nuclear engineering ,TK1-9971 ,Engineering (General). Civil engineering (General) ,TA1-2040 ,Microscopy ,QH201-278.5 ,Descriptive and experimental mechanics ,QC120-168.85 - Abstract
In this study, a simple one-stage laser-assisted metallization technique based on laser-induced backside wet etching and laser-induced chemical liquid-phase deposition is proposed. It allows for the fabrication of gold micropatterns inside the laser-written trace on a glass substrate. The reduction and deposition of gold inside and outside the laser-ablated channel were confirmed. The presence of Au nanoparticles on the surface of the laser-written micropattern is revealed by atomic force microscopy. The specific resistivity of the gold trace formed by ultrafast light-assisted metal micropatterning on a dielectric glass substrate is estimated as 0.04 ± 0.02 mΩ·cm. The obtained results empower the method of the selective laser-assisted deposition of metals on dielectrics and are of interest for the development of microelectronic components and catalysts, heaters, and sensors for lab-on-a-chip devices.
- Published
- 2022
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