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One-Stage Femtosecond Laser-Assisted Deposition of Gold Micropatterns on Dielectric Substrate
- Source :
- Materials, Vol 15, Iss 19, p 6867 (2022)
- Publication Year :
- 2022
- Publisher :
- MDPI AG, 2022.
-
Abstract
- In this study, a simple one-stage laser-assisted metallization technique based on laser-induced backside wet etching and laser-induced chemical liquid-phase deposition is proposed. It allows for the fabrication of gold micropatterns inside the laser-written trace on a glass substrate. The reduction and deposition of gold inside and outside the laser-ablated channel were confirmed. The presence of Au nanoparticles on the surface of the laser-written micropattern is revealed by atomic force microscopy. The specific resistivity of the gold trace formed by ultrafast light-assisted metal micropatterning on a dielectric glass substrate is estimated as 0.04 ± 0.02 mΩ·cm. The obtained results empower the method of the selective laser-assisted deposition of metals on dielectrics and are of interest for the development of microelectronic components and catalysts, heaters, and sensors for lab-on-a-chip devices.
- Subjects :
- gold nanoparticles
selective metallization
gold electrodes
direct laser writing
laser-induced backside wet etching
chemical liquid-phase deposition
Technology
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Engineering (General). Civil engineering (General)
TA1-2040
Microscopy
QH201-278.5
Descriptive and experimental mechanics
QC120-168.85
Subjects
Details
- Language :
- English
- ISSN :
- 19961944
- Volume :
- 15
- Issue :
- 19
- Database :
- Directory of Open Access Journals
- Journal :
- Materials
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.771f5da0242d4f24bf8401a63060bac3
- Document Type :
- article
- Full Text :
- https://doi.org/10.3390/ma15196867