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Thickness-modulated optical dielectric constants and band alignments of HfOxNy films grown by sputtering have been investigated by spectroscopic ellipsometry (SE) and x-ray photoelectron spectroscopy. Based on SE measurements, it has been noted that an increase in optical dielectric constant and band gap has been observed as a function of the film thickness. Analyses of thickness-dependent band alignment of the HfOxNy/Si system indicate that the valence band offset increases, but only slight change in the conduction band offset, resulting from the thickness-induced change in the structure. The suitable optical dielectric constants and band offsets relative to Si make sputtering-derived HfOxNy film a promising candidate for high-k gate dielectrics. [ABSTRACT FROM AUTHOR]

Composition-dependent electronic structure and optical properties of Hf1-xSixOy (0.1≤x≤0.6) gate dielectrics on Si at 450 °C grown by UV-photo-induced chemical vapor deposition (UV-CVD) have been investigated via x-ray photoemission spectroscopy and spectroscopy ellipsometry (SE). By means of the chemical shifts in the Hf 4f, Si 2p, and O 1s spectra, the Hf–O–Si bondings in the as-deposited films have been confirmed. Analyses of composition-dependent band alignment of Hf1-xSixOy/Si gate stacks have shown that the valence band (VB) offset (ΔEv) demonstrates little change; however, the values of conduction band offset (ΔEc) increase with the increase in the silicon atomic composition, resulting from the increase in the separation between oxygen 2p orbital VB state and antibonding d states intermixed of Hf and Si. Analysis by SE, based on the Tauc–Lorentz model, has indicated that decreases in the optical dielectric constant and increase in band gap have been observed as a function of silicon contents. Changes in the complex dielectric functions and band gap Eg related to the silicon concentration in the films are discussed systematically. From the band offset and band gap viewpoint, these results suggest that Hf1-xSixOy films provide sufficient tunneling barriers for electrons and holes, making them promising candidates as alternative gate dielectrics. [ABSTRACT FROM AUTHOR]

A high-k Hf-silicate interfacial layer grown by the solid phase reaction between sputtered metallic Hf films and an underlying SiO2/Si substrate through in situ vacuum annealing and subsequent thermal oxidation has been investigated. By means of the chemical shifts of Si 2p, Hf 4f, and O 1s core-level spectra determined by x-ray photoelectron spectroscopy (XPS), the formation of an interfacial Si-O-Si bond as the dominant reaction during in situ thermal oxidation of the Hf/SiO2/Si gate stack has been confirmed. In situ vacuum anneals without air exposure at 700 °C accelerates the interface reaction and results in the formation of Si-rich Hf-silicate interfacial layer. Analysis by Fourier transform infrared spectroscopy (FTIR) has indicated that vacuum annealed samples containing the silicate interface layer effectively suppresses the growth of the interfacial SiOx layer compared to unannealed samples during postdeposition annealing. [ABSTRACT FROM AUTHOR]

The effect of nitrogen incorporation on the band alignment and electrical properties of HfTiO gate dielectric complementary metal-oxide-semiconductor (MOS) capacitors has been investigated by spectroscopy ellipsometry, x-ray photoelectron spectroscopy, and electrical measurements. Reduction in optical band gap and band offsets has been detected. However, improved electrical properties have been achieved from HfTiON gate dielectric MOS capacitors attributed to the nitrogen-induced reduction in oxygen-related traps and the improved interface quality. Although there is a nitrogen-induced reduction in band gap and band offset, the sufficient barrier heights still makes HfTiON a promising high-k gate dielectric candidate for proposed near-future complementary metal-oxide-semiconductor applications. [ABSTRACT FROM AUTHOR]

The effect of nitrogen atom doping on the optical properties and dielectric constant of HfO2 films has been systematically investigated. Spectroscopic ellipsometry was employed to investigate the optical properties of nitrogen incorporated HfO2 films. The values of average oscillator strength and average oscillator position extracted from spectroscopic ellipsometry demonstrated that nitrogen incorporation could influence the dipole oscillator strength and oscillator position of HfO2. A physical model of dipole structures was proposed to verify the enhancement of dielectric constant of HfO2 films by nitrogen incorporation. [ABSTRACT FROM AUTHOR]

The effect of N concentration on the band gap and band offsets of HfOxNy films has been systematically investigated. It was found that the band gap as well as the band offsets of HfOxNy films decreased with the increase of N concentration. When the N concentration reached 16.3%, the conduction band offset (ΔEc) reduced to be 0.88 eV, which is smaller than the minimal requirement of ΔEc values for high-k dielectrics and, thus, leads to unacceptably high leakage currents. Therefore, nitrogen concentration should be carefully controlled to guarantee excellent properties of nitrogen incorporated high-k dielectrics. [ABSTRACT FROM AUTHOR]

We report in this letter that Hafnium oxynitride (HfOxNy) gate dielectrics were prepared by radio frequency (RF) reactive magnetron sputtering and optical properties of the HfOxNy thin films were investigated by spectroscopic ellipsometry with photon energy of 0.75–6.5 eV at room temperature. The investigations showed that the annealing temperatures have a strong effect on the optical properties of HfOxNy thin films. With increased annealing temperature, the refractive index n is observed to increase, while the extinction coefficient k decreases, respectively. The changes of the complex dielectric functions and the optical band gap Eg with the annealing temperature are also discussed. [ABSTRACT FROM AUTHOR]