1. AlGaN/GaN Metal–Oxide–Semiconductor High-Electron Mobility Transistor With Liquid-Phase-Deposited Barium-Doped \TiO2 as a Gate Dielectric.
- Author
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Hu, Chih-Chun, Lin, Mon-Sen, Wu, Tsu-Yi, Adriyanto, Feri, Sze, Po-Wen, Wu, Chang-Luen, and Wang, Yeong-Her
- Subjects
METAL oxide semiconductor field-effect transistors ,GALLIUM nitride ,ALUMINUM ,ELECTRON mobility ,ELECTRON transport ,TITANIUM dioxide films ,BARIUM ,GATE array circuits - Abstract
Barium-doped \TiO2 films deposited on GaN layers at low temperature through a simple liquid phase deposition method is investigated. The use as a gate dielectric in AlGaN/GaN metal–oxide–semiconductor high-electron mobility transistors (MOSHEMTs) is also demonstrated. The electrical characteristics of the MOS structure on n-doped GaN show that the leakage current density is about \5.09 \times \10^-9\ \A/cm^2 at 1 MV/cm, and the breakdown field is more than 13 MV/cm. The maximum drain current density of the AlGaN/GaN MOSHEMTs is higher than that of HEMTs, in which a wider gate voltage swing and a lower subthreshold swing (110 mV/decade) are obtained. The gate leakage current density is significantly improved, and the gate pulse measurement shows that the current collapse is more suppressed for MOSHEMTs. [ABSTRACT FROM PUBLISHER]
- Published
- 2012
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