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Your search keyword '"Meisenheimer, T. L."' showing total 1 results
Start Over Author "Meisenheimer, T. L." Topic dielectric films
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1. Long-Term Reliability Degradation of Ultrathin Dielectric Films Due to Heavy-Ion Irradiation.

Author

Choi, B. K., Fleetwood, D. M., Schrimpf, R. D., Massengill, Lloyd W., Galloway, K. F., Shaneyfelt, M. R., Meisenheimer, T. L., Dodd, P. E., Schwank, J. R., Lee, Y. M., John, R. S., and Lucovsky, G.

Subjects
DIELECTRIC films, IONS, IRRADIATION
Abstract

Presents a study that examined the mechanism of the reliability degradation of dielectric films due to high-energy ion irradiation using a percolation approach. Analysis of parameters that affect postirradiation reliability degradation; Investigation of the enhancement of the reliability of degradation due to increasing ion fluence incident; Results and implications.

Published
2002
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